FR2535893B1 - Procede de fabrication d'un composant passif a radio frequence et condensateur fabrique par ce procede - Google Patents

Procede de fabrication d'un composant passif a radio frequence et condensateur fabrique par ce procede

Info

Publication number
FR2535893B1
FR2535893B1 FR8317817A FR8317817A FR2535893B1 FR 2535893 B1 FR2535893 B1 FR 2535893B1 FR 8317817 A FR8317817 A FR 8317817A FR 8317817 A FR8317817 A FR 8317817A FR 2535893 B1 FR2535893 B1 FR 2535893B1
Authority
FR
France
Prior art keywords
manufacturing
radio frequency
frequency component
passive radio
capacitor manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8317817A
Other languages
English (en)
Other versions
FR2535893A1 (fr
Inventor
Mark S Durschlag
James L Vorhaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Publication of FR2535893A1 publication Critical patent/FR2535893A1/fr
Application granted granted Critical
Publication of FR2535893B1 publication Critical patent/FR2535893B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
    • H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/10—Metal-oxide dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Formation Of Insulating Films (AREA)
FR8317817A 1982-11-09 1983-11-09 Procede de fabrication d'un composant passif a radio frequence et condensateur fabrique par ce procede Expired FR2535893B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/440,479 US4458295A (en) 1982-11-09 1982-11-09 Lumped passive components and method of manufacture

Publications (2)

Publication Number Publication Date
FR2535893A1 FR2535893A1 (fr) 1984-05-11
FR2535893B1 true FR2535893B1 (fr) 1988-10-14

Family

ID=23748909

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8317817A Expired FR2535893B1 (fr) 1982-11-09 1983-11-09 Procede de fabrication d'un composant passif a radio frequence et condensateur fabrique par ce procede

Country Status (5)

Country Link
US (1) US4458295A (fr)
JP (1) JPS5999756A (fr)
DE (1) DE3340563C2 (fr)
FR (1) FR2535893B1 (fr)
GB (1) GB2129717B (fr)

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* Cited by examiner, † Cited by third party
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US4735676A (en) * 1986-01-14 1988-04-05 Asahi Chemical Research Laboratory Co., Ltd. Method for forming electric circuits on a base board
US4805071A (en) * 1987-11-30 1989-02-14 Texas Instruments Incorporated High voltage capacitor for integrated circuits
CH674085A5 (fr) * 1988-03-03 1990-04-30 Martin Ineichen
DE3900512A1 (de) * 1989-01-10 1990-07-19 Tucker Gmbh Bostik Halbleiterbauelement fuer ein schaltnetzteil
US5434742A (en) * 1991-12-25 1995-07-18 Hitachi, Ltd. Capacitor for semiconductor integrated circuit and method of manufacturing the same
US5440174A (en) * 1992-10-20 1995-08-08 Matsushita Electric Industrial Co., Ltd. Plurality of passive elements in a semiconductor integrated circuit and semiconductor integrated circuit in which passive elements are arranged
US5442225A (en) * 1993-08-13 1995-08-15 Lsi Logic Corporation Integrated circuit having interconnects with ringing suppressing elements
US5541442A (en) * 1994-08-31 1996-07-30 International Business Machines Corporation Integrated compact capacitor-resistor/inductor configuration
US5666004A (en) * 1994-09-28 1997-09-09 Intel Corporation Use of tantalum oxide capacitor on ceramic co-fired technology
US6660610B2 (en) * 1996-07-08 2003-12-09 Micron Technology, Inc. Devices having improved capacitance and methods of their fabrication
US5777384A (en) * 1996-10-11 1998-07-07 Motorola, Inc. Tunable semiconductor device
US6316820B1 (en) 1997-07-25 2001-11-13 Hughes Electronics Corporation Passivation layer and process for semiconductor devices
AU2001231203A1 (en) * 2000-01-28 2001-08-07 The Board Of Trustees Of The University Of Arkansas Rc terminator and production method therefor
DE10014985A1 (de) * 2000-03-25 2001-10-04 Bosch Gmbh Robert Herstellungsverfahren für ein Dünnschicht-Bauelement, insbesondere ein Dünnschicht-Hochdrucksensorelement
US7005722B2 (en) * 2001-01-26 2006-02-28 The Board Of Trustees Of The University Of Arkansas RC terminator and production method therefor
JP2004152796A (ja) * 2002-10-28 2004-05-27 Toshiba Corp 半導体装置及びその製造方法
DE10341059B4 (de) * 2003-09-05 2007-05-31 Infineon Technologies Ag Integrierte Schaltungsanordnung mit Kondensator und Herstellungsverfahren
DE10344389A1 (de) * 2003-09-25 2005-05-19 Infineon Technologies Ag Verfahren zur Herstellung einer multifunktionellen Dielektrikumschicht auf einem Substrat
US20060000542A1 (en) * 2004-06-30 2006-01-05 Yongki Min Metal oxide ceramic thin film on base metal electrode
US7290315B2 (en) * 2004-10-21 2007-11-06 Intel Corporation Method for making a passive device structure
US20060099803A1 (en) * 2004-10-26 2006-05-11 Yongki Min Thin film capacitor
US20060091495A1 (en) * 2004-10-29 2006-05-04 Palanduz Cengiz A Ceramic thin film on base metal electrode
US20060220177A1 (en) * 2005-03-31 2006-10-05 Palanduz Cengiz A Reduced porosity high-k thin film mixed grains for thin film capacitor applications
US7629269B2 (en) * 2005-03-31 2009-12-08 Intel Corporation High-k thin film grain size control
US7375412B1 (en) 2005-03-31 2008-05-20 Intel Corporation iTFC with optimized C(T)
US7453144B2 (en) * 2005-06-29 2008-11-18 Intel Corporation Thin film capacitors and methods of making the same
US7755164B1 (en) * 2006-06-21 2010-07-13 Amkor Technology, Inc. Capacitor and resistor having anodic metal and anodic metal oxide structure
KR20100079081A (ko) * 2008-12-30 2010-07-08 주식회사 동부하이텍 엠아이엠 커패시터 및 그의 제조 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3257592A (en) * 1966-06-21 Silicon monoxide
DE1564922A1 (de) * 1966-10-26 1970-03-05 Telefunken Patent Auf einem isolierenden Traeger aufgedampfter Kondensator
US3867193A (en) * 1970-12-28 1975-02-18 Iwatsu Electric Co Ltd Process of producing a thin film circuit
US3988824A (en) * 1972-05-22 1976-11-02 Hewlett-Packard Company Method for manufacturing thin film circuits
US3864817A (en) * 1972-06-26 1975-02-11 Sprague Electric Co Method of making capacitor and resistor for monolithic integrated circuits
FR2249418A1 (en) * 1973-10-29 1975-05-23 Ibm France Thin film circuit capacitor mfr. - by forming valve metal pattern on substrate, followed by anodising using quartz mask
DE2459924A1 (de) * 1974-12-18 1976-06-24 Siemens Ag Verfahren zur herstellung von schaltkreisen in duennschichttechnik
JPS5517504A (en) * 1978-07-03 1980-02-07 Yatsumine Sangyo Kk Metal net insert device in synthetic resin turning formation
JPS5648108A (en) * 1979-09-28 1981-05-01 Hitachi Ltd Superconductive magnet

Also Published As

Publication number Publication date
JPS5999756A (ja) 1984-06-08
GB8329648D0 (en) 1983-12-07
DE3340563A1 (de) 1984-05-10
GB2129717B (en) 1985-11-13
FR2535893A1 (fr) 1984-05-11
JPS6350867B2 (fr) 1988-10-12
DE3340563C2 (de) 1994-09-01
GB2129717A (en) 1984-05-23
US4458295A (en) 1984-07-03

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