FR2534022B1 - Procede de production d'un element sensible a une contrainte, dispositif pour convertir un mouvement mecanique en signaux electriques et transducteur - Google Patents

Procede de production d'un element sensible a une contrainte, dispositif pour convertir un mouvement mecanique en signaux electriques et transducteur

Info

Publication number
FR2534022B1
FR2534022B1 FR8313427A FR8313427A FR2534022B1 FR 2534022 B1 FR2534022 B1 FR 2534022B1 FR 8313427 A FR8313427 A FR 8313427A FR 8313427 A FR8313427 A FR 8313427A FR 2534022 B1 FR2534022 B1 FR 2534022B1
Authority
FR
France
Prior art keywords
transducer
converting
producing
sensitive element
electric signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8313427A
Other languages
English (en)
French (fr)
Other versions
FR2534022A1 (fr
Inventor
Leslie Bruce Wilner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Becton Dickinson and Co
Original Assignee
Becton Dickinson and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Becton Dickinson and Co filed Critical Becton Dickinson and Co
Publication of FR2534022A1 publication Critical patent/FR2534022A1/fr
Application granted granted Critical
Publication of FR2534022B1 publication Critical patent/FR2534022B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FR8313427A 1982-10-04 1983-08-18 Procede de production d'un element sensible a une contrainte, dispositif pour convertir un mouvement mecanique en signaux electriques et transducteur Expired FR2534022B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/432,620 US4498229A (en) 1982-10-04 1982-10-04 Piezoresistive transducer

Publications (2)

Publication Number Publication Date
FR2534022A1 FR2534022A1 (fr) 1984-04-06
FR2534022B1 true FR2534022B1 (fr) 1986-09-05

Family

ID=23716906

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8313427A Expired FR2534022B1 (fr) 1982-10-04 1983-08-18 Procede de production d'un element sensible a une contrainte, dispositif pour convertir un mouvement mecanique en signaux electriques et transducteur

Country Status (5)

Country Link
US (1) US4498229A (enExample)
JP (1) JPS59132173A (enExample)
DE (1) DE3335772C2 (enExample)
FR (1) FR2534022B1 (enExample)
GB (1) GB2128404B (enExample)

Families Citing this family (29)

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US4737473A (en) * 1985-03-26 1988-04-12 Endevco Corporation Piezoresistive transducer
US4793194A (en) * 1985-03-26 1988-12-27 Endevco Corporation Piezoresistive transducer
AT396998B (de) * 1985-12-09 1994-01-25 Ottosensors Corp Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen
US4689600A (en) * 1986-01-21 1987-08-25 Allied Corporation Piezoresistive transducer having frangible links
US5012316A (en) * 1989-03-28 1991-04-30 Cardiac Pacemakers, Inc. Multiaxial transducer interconnection apparatus
US4967146A (en) * 1989-05-15 1990-10-30 Rockwell International Corporation Semiconductor chip production and testing processes
DE3940696C2 (de) * 1989-12-08 1993-11-11 Fraunhofer Ges Forschung Sensor zum Messen einer Kraft und/oder eines Weges
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
US5286671A (en) * 1993-05-07 1994-02-15 Kulite Semiconductor Products, Inc. Fusion bonding technique for use in fabricating semiconductor devices
JP3317084B2 (ja) * 1995-03-31 2002-08-19 株式会社豊田中央研究所 力検知素子およびその製造方法
WO1997009584A1 (en) * 1995-09-01 1997-03-13 International Business Machines Corporation Cantilever with integrated deflection sensor
US6694822B1 (en) * 1999-07-20 2004-02-24 Fidelica Microsystems, Inc. Use of multi-layer thin films as stress sensor
US6889555B1 (en) * 1999-07-20 2005-05-10 Fidelica Microsystems, Inc. Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same
DE102004026145A1 (de) 2004-05-28 2006-05-11 Advanced Micro Devices, Inc., Sunnyvale Halbleiterstruktur mit einem spannungsempfindlichen Element und Verfahren zum Messen einer elastischen Spannung in einer Halbleiterstruktur
US6988412B1 (en) * 2004-11-30 2006-01-24 Endevco Corporation Piezoresistive strain concentrator
JP2007066612A (ja) * 2005-08-30 2007-03-15 Toyota Motor Corp 電池構造および電池モジュール
US7439159B2 (en) * 2005-10-28 2008-10-21 Kulite Semiconductor Products, Inc. Fusion bonding process and structure for fabricating silicon-on-insulator (SOI) semiconductor devices
TWI416739B (zh) * 2006-05-01 2013-11-21 Tanita Seisakusho Kk 半導體型應變檢測器及其製造方法
JP5191030B2 (ja) * 2006-05-01 2013-04-24 株式会社タニタ 半導体歪みゲージ
US7594440B2 (en) * 2006-10-05 2009-09-29 Endevco Corporation Highly sensitive piezoresistive element
KR101151125B1 (ko) * 2007-08-27 2012-06-01 가부시키가이샤 히타치세이사쿠쇼 반도체 왜곡 센서
FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
US8191420B2 (en) * 2009-08-13 2012-06-05 Meggitt (San Juan Capistrano), Inc. Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors
DE102011006332A1 (de) 2011-03-29 2012-10-04 Robert Bosch Gmbh Verfahren zum Erzeugen von monokristallinen Piezowiderständen
RU2505782C1 (ru) * 2012-08-21 2014-01-27 Федеральное государственное унитарное предприятие "Научно-производственное объединение им. С.А. Лавочкина" Наклеиваемый полупроводниковый тензорезистор (варианты)
US9581511B2 (en) * 2013-10-15 2017-02-28 Meggitt (Orange County), Inc. Microelectromechanical pressure sensors
US9581614B2 (en) 2014-06-02 2017-02-28 Meggit (Orange County), Inc. High-output MEMS accelerometer
US9625486B2 (en) 2014-07-17 2017-04-18 Meggitt (Orange County), Inc. MEMS accelerometer
US12422314B2 (en) 2021-10-08 2025-09-23 Qorvo Us, Inc. Input structures that include slots that create a stress concentration region in a substrate for strain detection by a sensor

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US2963911A (en) * 1959-02-18 1960-12-13 Bell Telephone Labor Inc Piezoresistive accelerometer
US3351880A (en) * 1964-05-04 1967-11-07 Endevco Corp Piezoresistive transducer
US3501732A (en) * 1964-05-04 1970-03-17 Endevco Corp Semiconductive piezoresistive transducer having a grooved support with electrical contacts
US3392358A (en) * 1965-02-25 1968-07-09 Sonotone Corp Piezoresistive mechanoelectric transducers
US3444499A (en) * 1967-01-16 1969-05-13 Endevco Corp Strain gauge
US3492513A (en) * 1967-07-27 1970-01-27 Lewis E Hollander Jr Mesa t-bar piezoresistor
US3638481A (en) * 1969-03-04 1972-02-01 Becton Dickinson Co Pressure sensor
GB1211499A (en) * 1969-03-07 1970-11-04 Standard Telephones Cables Ltd A method of manufacturing semiconductor devices
US4047144A (en) * 1971-06-30 1977-09-06 Becton, Dickinson Electronics Company Transducer
US3905005A (en) * 1973-05-25 1975-09-09 Iv Thomas B Hutchins Deflection-sensitive electrical transducer with deflection focusing
US3897627A (en) * 1974-06-28 1975-08-05 Rca Corp Method for manufacturing semiconductor devices
DE2545881C2 (de) * 1975-10-14 1985-08-29 Bayer Ag, 5090 Leverkusen 0-Pyrazolopyrimidinthionothiolphosphorsäureester, Verfahren zu ihrer Herstellung sowie ihre Verwendung zur Bekämpfung von Insekten, Milben und Nematoden
US3995247A (en) * 1975-10-22 1976-11-30 Kulite Semiconductor Products, Inc. Transducers employing gap-bridging shim members
US4071838A (en) * 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4093933A (en) * 1976-05-14 1978-06-06 Becton, Dickinson Electronics Company Sculptured pressure diaphragm
GB1541513A (en) * 1977-03-01 1979-03-07 Standard Telephones Cables Ltd Semiconductor keyswitch arrangement
GB1580087A (en) * 1977-11-22 1980-11-26 Standard Telephones Cables Ltd Electroacoustic transducer device
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer
US4408386A (en) * 1980-12-12 1983-10-11 Oki Electric Industry Co., Ltd. Method of manufacturing semiconductor integrated circuit devices
US4400869A (en) * 1981-02-12 1983-08-30 Becton Dickinson And Company Process for producing high temperature pressure transducers and semiconductors

Also Published As

Publication number Publication date
DE3335772C2 (de) 1987-04-23
GB8326485D0 (en) 1983-11-02
GB2128404B (en) 1986-04-30
US4498229A (en) 1985-02-12
JPH0471343B2 (enExample) 1992-11-13
GB2128404A (en) 1984-04-26
FR2534022A1 (fr) 1984-04-06
DE3335772A1 (de) 1984-04-05
JPS59132173A (ja) 1984-07-30

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse