FR2530671A1 - Appareil pour le placage par bombardement ionique de matieres granulaires ou d'autres matieres en vrac - Google Patents

Appareil pour le placage par bombardement ionique de matieres granulaires ou d'autres matieres en vrac Download PDF

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Publication number
FR2530671A1
FR2530671A1 FR8312185A FR8312185A FR2530671A1 FR 2530671 A1 FR2530671 A1 FR 2530671A1 FR 8312185 A FR8312185 A FR 8312185A FR 8312185 A FR8312185 A FR 8312185A FR 2530671 A1 FR2530671 A1 FR 2530671A1
Authority
FR
France
Prior art keywords
drum
anode
plating
ground
vaporization device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8312185A
Other languages
English (en)
French (fr)
Other versions
FR2530671B1 (enExample
Inventor
Hilmar Hoder
Jorg Kieser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2530671A1 publication Critical patent/FR2530671A1/fr
Application granted granted Critical
Publication of FR2530671B1 publication Critical patent/FR2530671B1/fr
Granted legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/223Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating specially adapted for coating particles
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8312185A 1982-07-24 1983-07-22 Appareil pour le placage par bombardement ionique de matieres granulaires ou d'autres matieres en vrac Granted FR2530671A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823227717 DE3227717A1 (de) 1982-07-24 1982-07-24 Vorrichtung zum ionen-plattieren von schuettgut

Publications (2)

Publication Number Publication Date
FR2530671A1 true FR2530671A1 (fr) 1984-01-27
FR2530671B1 FR2530671B1 (enExample) 1985-05-17

Family

ID=6169249

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8312185A Granted FR2530671A1 (fr) 1982-07-24 1983-07-22 Appareil pour le placage par bombardement ionique de matieres granulaires ou d'autres matieres en vrac

Country Status (3)

Country Link
DE (1) DE3227717A1 (enExample)
FR (1) FR2530671A1 (enExample)
GB (1) GB2124259B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2282824A (en) * 1993-10-14 1995-04-19 Secr Defence Reinforcement particles pre-coated with metal matrix; particle-reinforced metal matrix composites
FR2727132B1 (fr) * 1994-11-18 1996-12-20 Surface Engineering Appareil de depot sous vide relatif d'un materiau sur des pieces en vrac

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4116161A (en) * 1976-11-12 1978-09-26 Mcdonnell Douglas Corporation Dual tumbling barrel plating apparatus

Also Published As

Publication number Publication date
GB2124259B (en) 1985-12-04
GB8318847D0 (en) 1983-08-10
DE3227717A1 (de) 1984-01-26
GB2124259A (en) 1984-02-15
FR2530671B1 (enExample) 1985-05-17

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Date Code Title Description
ST Notification of lapse