FR2521650B1 - - Google Patents

Info

Publication number
FR2521650B1
FR2521650B1 FR8202496A FR8202496A FR2521650B1 FR 2521650 B1 FR2521650 B1 FR 2521650B1 FR 8202496 A FR8202496 A FR 8202496A FR 8202496 A FR8202496 A FR 8202496A FR 2521650 B1 FR2521650 B1 FR 2521650B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8202496A
Other versions
FR2521650A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9271019&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2521650(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR8202496A priority Critical patent/FR2521650A1/fr
Priority to EP83101276A priority patent/EP0086460B1/fr
Priority to DE8383101276T priority patent/DE3360947D1/de
Priority to JP58022657A priority patent/JPS58150096A/ja
Priority to US06/467,045 priority patent/US4512725A/en
Publication of FR2521650A1 publication Critical patent/FR2521650A1/fr
Application granted granted Critical
Publication of FR2521650B1 publication Critical patent/FR2521650B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
FR8202496A 1982-02-16 1982-02-16 Pompe rotative a vide eleve Granted FR2521650A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR8202496A FR2521650A1 (fr) 1982-02-16 1982-02-16 Pompe rotative a vide eleve
EP83101276A EP0086460B1 (fr) 1982-02-16 1983-02-10 Pompe rotative à vide élevé
DE8383101276T DE3360947D1 (en) 1982-02-16 1983-02-10 High vacuum rotary pump
JP58022657A JPS58150096A (ja) 1982-02-16 1983-02-14 高真空回転式ポンプ
US06/467,045 US4512725A (en) 1982-02-16 1983-02-16 Rotary vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8202496A FR2521650A1 (fr) 1982-02-16 1982-02-16 Pompe rotative a vide eleve

Publications (2)

Publication Number Publication Date
FR2521650A1 FR2521650A1 (fr) 1983-08-19
FR2521650B1 true FR2521650B1 (fr) 1984-04-06

Family

ID=9271019

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8202496A Granted FR2521650A1 (fr) 1982-02-16 1982-02-16 Pompe rotative a vide eleve

Country Status (5)

Country Link
US (1) US4512725A (fr)
EP (1) EP0086460B1 (fr)
JP (1) JPS58150096A (fr)
DE (1) DE3360947D1 (fr)
FR (1) FR2521650A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
FR2567208B1 (fr) * 1984-07-05 1988-12-09 Cit Alcatel Pompe rotative a vide eleve
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ
DE3616319C1 (de) * 1986-05-15 1987-07-02 Cit Alcatel Gmbh Heliumlecksuchanlage
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
JP2998441B2 (ja) * 1992-08-19 2000-01-11 株式会社日立製作所 ターボ真空ポンプ
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
IT1292764B1 (it) * 1997-06-11 1999-02-11 Varian Spa Pompa da vuoto.
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
US6196813B1 (en) 1999-07-06 2001-03-06 Flowserve Management Company Pump assembly including integrated adapter
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
DE10256086A1 (de) * 2002-11-29 2004-06-17 Leybold Vakuum Gmbh Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
PE20110032A1 (es) * 2008-06-13 2011-02-11 Weir Minerals Australia Ltd Mejoramientos relacionados con conjuntos de sellos de bombas
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung
CN103671578A (zh) * 2012-09-26 2014-03-26 上海阔步机械模具有限公司 一种用于动压轴承的润滑装置
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11338258B2 (en) * 2019-09-19 2022-05-24 Limited Liability Company “Bioenergy” Rotary-pulsation device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1230206A (en) * 1911-04-27 1917-06-19 Richmond Radiator Company Suction-producer.
US1657550A (en) * 1922-04-29 1928-01-31 Doherty Res Co Method and apparatus for cooling electrical apparatus
US3355179A (en) * 1964-08-24 1967-11-28 Gen Electric Gas buffered screw seal
US3411707A (en) * 1967-03-23 1968-11-19 Rotron Mfg Co Apparatus for preventing gas flow through bearings
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem

Also Published As

Publication number Publication date
DE3360947D1 (en) 1985-11-14
EP0086460B1 (fr) 1985-10-09
JPS58150096A (ja) 1983-09-06
EP0086460A1 (fr) 1983-08-24
FR2521650A1 (fr) 1983-08-19
JPH0133677B2 (fr) 1989-07-14
US4512725A (en) 1985-04-23

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