FR2519156B1 - - Google Patents

Info

Publication number
FR2519156B1
FR2519156B1 FR8124300A FR8124300A FR2519156B1 FR 2519156 B1 FR2519156 B1 FR 2519156B1 FR 8124300 A FR8124300 A FR 8124300A FR 8124300 A FR8124300 A FR 8124300A FR 2519156 B1 FR2519156 B1 FR 2519156B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8124300A
Other languages
French (fr)
Other versions
FR2519156A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR8124300A priority Critical patent/FR2519156A1/fr
Publication of FR2519156A1 publication Critical patent/FR2519156A1/fr
Application granted granted Critical
Publication of FR2519156B1 publication Critical patent/FR2519156B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70558—Dose control, i.e. achievement of a desired dose
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR8124300A 1981-12-28 1981-12-28 Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre Granted FR2519156A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8124300A FR2519156A1 (fr) 1981-12-28 1981-12-28 Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8124300A FR2519156A1 (fr) 1981-12-28 1981-12-28 Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre

Publications (2)

Publication Number Publication Date
FR2519156A1 FR2519156A1 (fr) 1983-07-01
FR2519156B1 true FR2519156B1 (enrdf_load_stackoverflow) 1984-12-07

Family

ID=9265432

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8124300A Granted FR2519156A1 (fr) 1981-12-28 1981-12-28 Dispositif optique a source d'energie radiante pour le transfert de motifs sur un substrat et procede de mise en oeuvre

Country Status (1)

Country Link
FR (1) FR2519156A1 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153543B (en) * 1983-12-28 1988-09-01 Canon Kk A projection exposure apparatus
US4822975A (en) * 1984-01-30 1989-04-18 Canon Kabushiki Kaisha Method and apparatus for scanning exposure
JPS61162051A (ja) * 1985-01-12 1986-07-22 Canon Inc 露光方法
US5171965A (en) * 1984-02-01 1992-12-15 Canon Kabushiki Kaisha Exposure method and apparatus
GB2155647B (en) * 1984-02-01 1988-12-21 Canon Kk Exposure method and apparatus
US5091744A (en) * 1984-02-13 1992-02-25 Canon Kabushiki Kaisha Illumination optical system
GB2155201B (en) * 1984-02-24 1988-07-13 Canon Kk An x-ray exposure apparatus
JP2731953B2 (ja) * 1989-08-07 1998-03-25 キヤノン株式会社 エネルギー量制御装置
JPH088154A (ja) * 1994-06-16 1996-01-12 Nec Yamagata Ltd 露光装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1515127A (fr) * 1967-01-16 1968-03-01 Radiotechnique Coprim Rtc Dispositifs d'obtention de clichés à haute définition destinés, notamment, à la fabrication de dispositifs semi-conducteurs
FR2030468A5 (enrdf_load_stackoverflow) * 1969-01-29 1970-11-13 Thomson Brandt Csf
FR2406236A1 (fr) * 1976-12-10 1979-05-11 Thomson Csf Dispositif optique a source coherente pour le transfert rapide de motifs sur substrats, applique a la realisation de composants et circuits a microstructures
NL171648C (nl) * 1978-11-10 1983-04-18 Stichting Fund Ond Material Gaslaser.

Also Published As

Publication number Publication date
FR2519156A1 (fr) 1983-07-01

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Legal Events

Date Code Title Description
ST Notification of lapse