FR2517124B1 - - Google Patents
Info
- Publication number
- FR2517124B1 FR2517124B1 FR8219603A FR8219603A FR2517124B1 FR 2517124 B1 FR2517124 B1 FR 2517124B1 FR 8219603 A FR8219603 A FR 8219603A FR 8219603 A FR8219603 A FR 8219603A FR 2517124 B1 FR2517124 B1 FR 2517124B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/0434—
-
- H10P72/7606—
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US32451281A | 1981-11-24 | 1981-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2517124A1 FR2517124A1 (fr) | 1983-05-27 |
| FR2517124B1 true FR2517124B1 (Direct) | 1985-02-15 |
Family
ID=23263921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8219603A Granted FR2517124A1 (fr) | 1981-11-24 | 1982-11-23 | Appareil de serrage de tranches de semi-conducteur actionne de facon hydraulique |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS5893247A (Direct) |
| DE (1) | DE3242856A1 (Direct) |
| FR (1) | FR2517124A1 (Direct) |
| GB (1) | GB2109996B (Direct) |
| NL (1) | NL8204560A (Direct) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0775158B2 (ja) * | 1986-05-20 | 1995-08-09 | 東京エレクトロン株式会社 | 半導体製造装置用高真空チヤンバ−における駆動装置 |
| JPH0770297B2 (ja) * | 1986-05-20 | 1995-07-31 | 東京エレクトロン株式会社 | イオン注入装置におけるウエハ保持装置 |
| US4891335A (en) * | 1986-10-15 | 1990-01-02 | Advantage Production Technology Inc. | Semiconductor substrate heater and reactor process and apparatus |
| US4938815A (en) * | 1986-10-15 | 1990-07-03 | Advantage Production Technology, Inc. | Semiconductor substrate heater and reactor process and apparatus |
| US5044314A (en) * | 1986-10-15 | 1991-09-03 | Advantage Production Technology, Inc. | Semiconductor wafer processing apparatus |
| US4956046A (en) * | 1986-10-15 | 1990-09-11 | Advantage Production Technology, Inc. | Semiconductor substrate treating method |
| US4778559A (en) * | 1986-10-15 | 1988-10-18 | Advantage Production Technology | Semiconductor substrate heater and reactor process and apparatus |
| US7385821B1 (en) * | 2001-12-06 | 2008-06-10 | Apple Inc. | Cooling method for ICS |
| CH697200A5 (de) | 2004-10-01 | 2008-06-25 | Oerlikon Assembly Equipment Ag | Klemmvorrichtung und Transportvorrichtung zum Transportieren von Substraten. |
| CN110379729B (zh) * | 2018-04-13 | 2022-10-21 | 北京北方华创微电子装备有限公司 | 加热基座及半导体加工设备 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4282924A (en) * | 1979-03-16 | 1981-08-11 | Varian Associates, Inc. | Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface |
| FR2501907A1 (fr) * | 1981-03-13 | 1982-09-17 | Thomson Csf | Procede de positionnement, de maintien d'un substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que l'appareillage pour la mise en oeuvre du procede |
-
1982
- 1982-11-11 GB GB08232241A patent/GB2109996B/en not_active Expired
- 1982-11-19 DE DE19823242856 patent/DE3242856A1/de not_active Withdrawn
- 1982-11-22 JP JP57203835A patent/JPS5893247A/ja active Pending
- 1982-11-23 NL NL8204560A patent/NL8204560A/nl not_active Application Discontinuation
- 1982-11-23 FR FR8219603A patent/FR2517124A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE3242856A1 (de) | 1983-06-01 |
| GB2109996B (en) | 1985-08-07 |
| FR2517124A1 (fr) | 1983-05-27 |
| GB2109996A (en) | 1983-06-08 |
| JPS5893247A (ja) | 1983-06-02 |
| NL8204560A (nl) | 1983-06-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |