FR2512623B1 - - Google Patents

Info

Publication number
FR2512623B1
FR2512623B1 FR8117151A FR8117151A FR2512623B1 FR 2512623 B1 FR2512623 B1 FR 2512623B1 FR 8117151 A FR8117151 A FR 8117151A FR 8117151 A FR8117151 A FR 8117151A FR 2512623 B1 FR2512623 B1 FR 2512623B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8117151A
Other languages
French (fr)
Other versions
FR2512623A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR8117151A priority Critical patent/FR2512623A1/fr
Publication of FR2512623A1 publication Critical patent/FR2512623A1/fr
Application granted granted Critical
Publication of FR2512623B1 publication Critical patent/FR2512623B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacture And Refinement Of Metals (AREA)
FR8117151A 1981-09-10 1981-09-10 Procede de fusion et/ou d'evaporation pulsee d'un materiau solide Granted FR2512623A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8117151A FR2512623A1 (fr) 1981-09-10 1981-09-10 Procede de fusion et/ou d'evaporation pulsee d'un materiau solide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8117151A FR2512623A1 (fr) 1981-09-10 1981-09-10 Procede de fusion et/ou d'evaporation pulsee d'un materiau solide

Publications (2)

Publication Number Publication Date
FR2512623A1 FR2512623A1 (fr) 1983-03-11
FR2512623B1 true FR2512623B1 (enExample) 1985-04-05

Family

ID=9262037

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8117151A Granted FR2512623A1 (fr) 1981-09-10 1981-09-10 Procede de fusion et/ou d'evaporation pulsee d'un materiau solide

Country Status (1)

Country Link
FR (1) FR2512623A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4534842A (en) * 1983-06-15 1985-08-13 Centre National De La Recherche Scientifique (Cnrs) Process and device for producing a homogeneous large-volume plasma of high density and of low electronic temperature
FR2547692B1 (fr) * 1983-06-15 1988-07-15 Centre Nat Rech Scient Procede et dispositif de production d'un plasma de grand volume homogene, de grande densite et de faible temperature electronique
FR2551581A1 (fr) * 1983-09-07 1985-03-08 Centre Nat Rech Scient Procede et dispositif de traitement thermique de materiaux divers par un plasma homogene de grand volume
FR2553574B1 (fr) * 1983-10-17 1985-12-27 Commissariat Energie Atomique Dispositif de regulation d'un courant d'ions notamment metalliques fortement charges
DE3705666A1 (de) * 1987-02-21 1988-09-01 Leybold Ag Einrichtung zum herstellen eines plasmas und zur behandlung von substraten darin
DE19513345C2 (de) * 1995-04-08 2000-08-03 Ehret Hans P ECR-Ionenquelle
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3160566A (en) * 1962-08-09 1964-12-08 Raphael A Dandl Plasma generator
NL134693C (enExample) * 1964-05-13
FR2402301A1 (fr) * 1977-09-02 1979-03-30 Commissariat Energie Atomique Appareil de micro-usinage par erosion ionique utilisant une source de plasma
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede

Also Published As

Publication number Publication date
FR2512623A1 (fr) 1983-03-11

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