FR2512204B1 - Circuit de commande d'une jauge de pirani pour la mesure des faibles pressions - Google Patents

Circuit de commande d'une jauge de pirani pour la mesure des faibles pressions

Info

Publication number
FR2512204B1
FR2512204B1 FR8214743A FR8214743A FR2512204B1 FR 2512204 B1 FR2512204 B1 FR 2512204B1 FR 8214743 A FR8214743 A FR 8214743A FR 8214743 A FR8214743 A FR 8214743A FR 2512204 B1 FR2512204 B1 FR 2512204B1
Authority
FR
France
Prior art keywords
controlling
circuit
low pressures
measuring low
pirani gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8214743A
Other languages
English (en)
Other versions
FR2512204A1 (fr
Inventor
Alan Edward
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Ltd Great Britain
Original Assignee
BOC Ltd Great Britain
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Ltd Great Britain filed Critical BOC Ltd Great Britain
Publication of FR2512204A1 publication Critical patent/FR2512204A1/fr
Application granted granted Critical
Publication of FR2512204B1 publication Critical patent/FR2512204B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR8214743A 1981-08-28 1982-08-27 Circuit de commande d'une jauge de pirani pour la mesure des faibles pressions Expired FR2512204B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8126395 1981-08-28

Publications (2)

Publication Number Publication Date
FR2512204A1 FR2512204A1 (fr) 1983-03-04
FR2512204B1 true FR2512204B1 (fr) 1986-04-11

Family

ID=10524236

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8214743A Expired FR2512204B1 (fr) 1981-08-28 1982-08-27 Circuit de commande d'une jauge de pirani pour la mesure des faibles pressions

Country Status (3)

Country Link
US (1) US4541286A (fr)
DE (1) DE3230405A1 (fr)
FR (1) FR2512204B1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4787251A (en) * 1987-07-15 1988-11-29 Tsi Incorporated Directional low differential pressure transducer
JPH01313728A (ja) * 1988-06-13 1989-12-19 Seiko Electronic Components Ltd 水晶式真空計
US5079954A (en) * 1990-12-27 1992-01-14 The Boc Group, Inc. Vacuum gauge
DE4205551A1 (de) * 1992-02-24 1993-08-26 Leybold Ag Schaltung zur temperaturkompensation eines geregelten waermeleitungsvakuummeters
CH684805A5 (de) * 1992-07-20 1994-12-30 Balzers Hochvakuum Verfahren zur Wandlung eines gemessenen Signals, Wandler zu dessen Ausführung sowie Messanordnung.
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US5347869A (en) * 1993-03-25 1994-09-20 Opto Tech Corporation Structure of micro-pirani sensor
US5705752A (en) * 1996-03-01 1998-01-06 The Aerospace Corporation Rubber substrate shear lap-joint testing fixture and method
US6658941B1 (en) 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6023979A (en) * 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
US6938493B2 (en) 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
CH692762A5 (de) * 1997-09-22 2002-10-15 Unaxis Balzers Ag Verfahren zur Messung des Gasdrucks in einem Gefäss sowie Vorrichtungen zur Durchführung des Verfahrens.
US7249516B2 (en) * 2004-07-28 2007-07-31 Brooks Automation, Inc. Method of operating a resistive heat-loss pressure sensor
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
US7278322B1 (en) * 2006-03-30 2007-10-09 International Business Machines Corporation Semiconductor based pressure sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB788538A (en) * 1953-04-25 1958-01-02 Heraeus Gmbh W C Improvements in or relating to heat-conduction manometers
US3216249A (en) * 1961-05-18 1965-11-09 Johnson Service Co Differential pressure responsive signal circuit
US3368407A (en) * 1965-05-11 1968-02-13 Georgia Tech Res Inst Pressure gauge
DE1623799B1 (de) * 1967-06-19 1971-07-29 Philips Patentverwaltung Schaltungsanordnung zum anschluss von messwertaufnehmern an das messwerk von mehrfachmess oder registriergeräten
US3646815A (en) * 1970-03-26 1972-03-07 Bailey Meter Co Silicon pressure transducer circuit

Also Published As

Publication number Publication date
FR2512204A1 (fr) 1983-03-04
DE3230405C2 (fr) 1991-07-11
DE3230405A1 (de) 1983-03-10
US4541286A (en) 1985-09-17

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Legal Events

Date Code Title Description
ST Notification of lapse