FR2501907B1 - - Google Patents

Info

Publication number
FR2501907B1
FR2501907B1 FR8105134A FR8105134A FR2501907B1 FR 2501907 B1 FR2501907 B1 FR 2501907B1 FR 8105134 A FR8105134 A FR 8105134A FR 8105134 A FR8105134 A FR 8105134A FR 2501907 B1 FR2501907 B1 FR 2501907B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8105134A
Other languages
French (fr)
Other versions
FR2501907A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR8105134A priority Critical patent/FR2501907A1/fr
Publication of FR2501907A1 publication Critical patent/FR2501907A1/fr
Application granted granted Critical
Publication of FR2501907B1 publication Critical patent/FR2501907B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H10P72/7616—
FR8105134A 1981-03-13 1981-03-13 Procede de positionnement, de maintien d'un substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que l'appareillage pour la mise en oeuvre du procede Granted FR2501907A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8105134A FR2501907A1 (fr) 1981-03-13 1981-03-13 Procede de positionnement, de maintien d'un substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que l'appareillage pour la mise en oeuvre du procede

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8105134A FR2501907A1 (fr) 1981-03-13 1981-03-13 Procede de positionnement, de maintien d'un substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que l'appareillage pour la mise en oeuvre du procede

Publications (2)

Publication Number Publication Date
FR2501907A1 FR2501907A1 (fr) 1982-09-17
FR2501907B1 true FR2501907B1 (Direct) 1984-05-04

Family

ID=9256246

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8105134A Granted FR2501907A1 (fr) 1981-03-13 1981-03-13 Procede de positionnement, de maintien d'un substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que l'appareillage pour la mise en oeuvre du procede

Country Status (1)

Country Link
FR (1) FR2501907A1 (Direct)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2109996B (en) * 1981-11-24 1985-08-07 Varian Associates Hydraulically actuated semiconductor wafer clamping and cooling apparatus
KR970003885B1 (ko) * 1987-12-25 1997-03-22 도오교오 에레구토론 가부시끼 가이샤 에칭 방법 및 그 장치
FR2767604B1 (fr) 1997-08-19 2000-12-01 Commissariat Energie Atomique Procede de traitement pour le collage moleculaire et le decollage de deux structures
JP3772954B2 (ja) 1999-10-15 2006-05-10 株式会社村田製作所 チップ状部品の取扱方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122879A (Direct) * 1974-03-13 1975-09-26
US4139051A (en) * 1976-09-07 1979-02-13 Rockwell International Corporation Method and apparatus for thermally stabilizing workpieces

Also Published As

Publication number Publication date
FR2501907A1 (fr) 1982-09-17

Similar Documents

Publication Publication Date Title
FR2498083B1 (Direct)
FR2498570B3 (Direct)
FR2500223B1 (Direct)
FR2500406B1 (Direct)
FR2517124B1 (Direct)
FR2500159B1 (Direct)
FR2499874B1 (Direct)
FR2497698B1 (Direct)
FR2499810B3 (Direct)
FR2500025B1 (Direct)
FR2497545B3 (Direct)
FR2500296B1 (Direct)
FR2498149B1 (Direct)
JPS57164371U (Direct)
FR2501907B1 (Direct)
FR2499964B3 (Direct)
FR2497694B1 (Direct)
FR2497792B1 (Direct)
DE3231658A1 (Direct)
FR2510674B3 (Direct)
FR2500023B1 (Direct)
FR2498088B1 (Direct)
CH655546B (Direct)
FR2497500B1 (Direct)
FR2498050B3 (Direct)

Legal Events

Date Code Title Description
ST Notification of lapse