FR2498011B1 - - Google Patents
Info
- Publication number
- FR2498011B1 FR2498011B1 FR8200443A FR8200443A FR2498011B1 FR 2498011 B1 FR2498011 B1 FR 2498011B1 FR 8200443 A FR8200443 A FR 8200443A FR 8200443 A FR8200443 A FR 8200443A FR 2498011 B1 FR2498011 B1 FR 2498011B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56004108A JPS57118357A (en) | 1981-01-14 | 1981-01-14 | Objective lens for scan type electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2498011A1 FR2498011A1 (fr) | 1982-07-16 |
| FR2498011B1 true FR2498011B1 (US07534539-20090519-C00280.png) | 1985-01-11 |
Family
ID=11575589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8200443A Granted FR2498011A1 (fr) | 1981-01-14 | 1982-01-13 | Objectif magnetique a utiliser dans un microscope electronique a balayage |
Country Status (5)
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4864228A (en) * | 1985-03-15 | 1989-09-05 | Fairchild Camera And Instrument Corporation | Electron beam test probe for integrated circuit testing |
| ATE91822T1 (de) * | 1986-04-24 | 1993-08-15 | Integrated Circuit Testing | Elektrostatisch-magnetische-linse fuer korpuskularstrahlgeraete. |
| FR2644930B1 (fr) * | 1989-03-21 | 1996-04-26 | Cameca | Lentille electromagnetique composite a focale variable |
| US5063296A (en) * | 1990-05-31 | 1991-11-05 | Shimadzu Corporation | Electron-optical system for making a pseudoparallel micro electron-beam |
| US5563415A (en) * | 1995-06-07 | 1996-10-08 | Arch Development Corporation | Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
| EP1018757B1 (en) * | 1996-09-24 | 2007-11-28 | Hitachi, Ltd. | Charged particle beam emitting device |
| US5729022A (en) * | 1996-09-26 | 1998-03-17 | Etec Systems, Inc. | Composite concentric-gap magnetic lens and deflector with conical pole pieces |
| EP0910108B1 (de) * | 1997-09-29 | 2004-11-24 | Advantest Corporation | Elektronenstrahl-Linse |
| GB9807592D0 (en) * | 1998-04-08 | 1998-06-10 | Shimadzu Res Lab Europe Ltd | Magnetic immersion lenses |
| US6362486B1 (en) | 1998-11-12 | 2002-03-26 | Schlumberger Technologies, Inc. | Magnetic lens for focusing a charged particle beam |
| EP1120809B1 (en) * | 2000-01-27 | 2012-02-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Objective lens for a charged particle beam device |
| JP2004534360A (ja) * | 2001-06-15 | 2004-11-11 | 株式会社荏原製作所 | 電子線装置及びその電子線装置を用いたデバイスの製造方法 |
| JP3968334B2 (ja) * | 2002-09-11 | 2007-08-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び荷電粒子線照射方法 |
| EP2579268A1 (en) * | 2003-09-05 | 2013-04-10 | Carl Zeiss SMT GmbH | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements |
| EP2267751A3 (en) * | 2005-09-06 | 2011-01-05 | Carl Zeiss SMT AG | Particle-optical component |
| EP2211368B1 (en) | 2005-11-28 | 2012-06-27 | Carl Zeiss SMT GmbH | Particle-optical component |
| EP2019414B1 (en) * | 2007-07-27 | 2010-06-30 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Magnetic lens assembly |
| CN102148122B (zh) * | 2011-02-16 | 2012-07-18 | 北京航空航天大学 | 应用于透射电子显微镜的层叠式低像差会聚小透镜 |
| JP2014041733A (ja) * | 2012-08-22 | 2014-03-06 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
| TWI502616B (zh) * | 2014-08-08 | 2015-10-01 | Nat Univ Tsing Hua | 桌上型電子顯微鏡以及其廣域可調式磁透鏡 |
| US10886101B2 (en) * | 2017-03-29 | 2021-01-05 | Hitachi High-Tech Corporation | Charged particle beam device |
| DE102017007479B4 (de) * | 2017-08-08 | 2021-09-02 | Comet Ag | Objektiv und Kondensor für eine Röntgenröhre, Röntgenröhre und ein Verfahren zum Betrieb einer solchen Röntgenröhre |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1308086A (fr) * | 1961-07-10 | 1962-11-03 | Formeur de faisceau d'électrons et appareils comportant un tel forment | |
| JPS4936496B1 (US07534539-20090519-C00280.png) * | 1970-04-18 | 1974-10-01 | ||
| GB1420803A (en) * | 1973-06-28 | 1976-01-14 | Ass Elect Ind | Electron microscopes |
| DE2541915A1 (de) * | 1975-09-19 | 1977-03-31 | Max Planck Gesellschaft | Korpuskularstrahlenmikroskop mit ringzonensegmentabbildung |
| JPS5758689Y2 (US07534539-20090519-C00280.png) * | 1977-02-08 | 1982-12-15 | ||
| JPS5842935B2 (ja) * | 1978-04-07 | 1983-09-22 | 日本電子株式会社 | 走査電子顕微鏡等の対物レンズ |
| JPS5913141B2 (ja) * | 1979-04-28 | 1984-03-28 | 日本電子株式会社 | 走査電子顕微鏡等の対物レンズ |
| JPS5945171B2 (ja) * | 1979-12-28 | 1984-11-05 | 日本電子株式会社 | 電子レンズ |
-
1981
- 1981-01-14 JP JP56004108A patent/JPS57118357A/ja active Granted
-
1982
- 1982-01-11 US US06/338,622 patent/US4419581A/en not_active Expired - Fee Related
- 1982-01-13 FR FR8200443A patent/FR2498011A1/fr active Granted
- 1982-01-14 KR KR8200138A patent/KR900003907B1/ko active
- 1982-01-14 GB GB8201031A patent/GB2092365B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2092365B (en) | 1985-04-03 |
| KR830009504A (ko) | 1983-12-21 |
| KR900003907B1 (en) | 1990-06-04 |
| GB2092365A (en) | 1982-08-11 |
| FR2498011A1 (fr) | 1982-07-16 |
| US4419581A (en) | 1983-12-06 |
| JPS57118357A (en) | 1982-07-23 |
| JPS6257062B2 (US07534539-20090519-C00280.png) | 1987-11-28 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |