FR2494840A1 - Procede de mesure pour determiner l'epaisseur de couches minces au moyen d'un cristal oscillateur, notamment dans l'industrie optique et la fabrication des semi-conducteurs - Google Patents
Procede de mesure pour determiner l'epaisseur de couches minces au moyen d'un cristal oscillateur, notamment dans l'industrie optique et la fabrication des semi-conducteurs Download PDFInfo
- Publication number
- FR2494840A1 FR2494840A1 FR8121976A FR8121976A FR2494840A1 FR 2494840 A1 FR2494840 A1 FR 2494840A1 FR 8121976 A FR8121976 A FR 8121976A FR 8121976 A FR8121976 A FR 8121976A FR 2494840 A1 FR2494840 A1 FR 2494840A1
- Authority
- FR
- France
- Prior art keywords
- layer
- thickness
- foreign
- measured
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000013078 crystal Substances 0.000 title claims description 18
- 230000003287 optical effect Effects 0.000 title description 3
- 239000004065 semiconductor Substances 0.000 title description 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
- 230000010355 oscillation Effects 0.000 claims abstract description 29
- 150000001875 compounds Chemical class 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 238000005259 measurement Methods 0.000 claims description 21
- 239000010453 quartz Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 16
- 235000003197 Byrsonima crassifolia Nutrition 0.000 claims 1
- 240000001546 Byrsonima crassifolia Species 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 4
- 229940125904 compound 1 Drugs 0.000 abstract 1
- 229940125782 compound 2 Drugs 0.000 abstract 1
- 229940126214 compound 3 Drugs 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 86
- 238000000151 deposition Methods 0.000 description 14
- 238000001228 spectrum Methods 0.000 description 7
- 238000000691 measurement method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 241000607479 Yersinia pestis Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
- G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT571080A AT382963B (de) | 1980-11-24 | 1980-11-24 | Messverfahren zur bestimmung der dicke duenner schichten |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2494840A1 true FR2494840A1 (fr) | 1982-05-28 |
| FR2494840B1 FR2494840B1 (enExample) | 1984-03-23 |
Family
ID=3578812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8121976A Granted FR2494840A1 (fr) | 1980-11-24 | 1981-11-24 | Procede de mesure pour determiner l'epaisseur de couches minces au moyen d'un cristal oscillateur, notamment dans l'industrie optique et la fabrication des semi-conducteurs |
Country Status (4)
| Country | Link |
|---|---|
| AT (1) | AT382963B (enExample) |
| DE (1) | DE3145309A1 (enExample) |
| FR (1) | FR2494840A1 (enExample) |
| GB (1) | GB2088058B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3700366A1 (de) * | 1987-01-08 | 1988-07-21 | Leybold Ag | Einrichtung zum ermitteln der jeweiligen dicke von sich veraendernden material-schichten auf einem substrat waehrend des beschichtungsvorgangs |
| EP0284678B1 (en) * | 1987-03-31 | 1992-06-03 | Benjamin Gavish | A device and method for monitoring small displacements of a peak in a frequency spectrum |
| DE3920052A1 (de) * | 1989-06-20 | 1991-01-10 | Peter Dipl Ing Berg | Messsystem zur bestimmung von traeger masse sowie daraus resultierender physikalischer eigenschaften mit hilfe eines auch in betriebsfaellen hoher und/oder variabler daempfung arbeitenden oszillators |
| US5112642A (en) * | 1990-03-30 | 1992-05-12 | Leybold Inficon, Inc. | Measuring and controlling deposition on a piezoelectric monitor crystal |
| US6370955B1 (en) * | 1999-06-15 | 2002-04-16 | Massachusetts Institute Of Technology | High-temperature balance |
| RU2194248C2 (ru) * | 1999-10-25 | 2002-12-10 | Закрытое акционерное общество "КОМПОМАШ-ТЭК" | Способ определения толщины покрытия детали |
| JP2005049236A (ja) * | 2003-07-29 | 2005-02-24 | Kansai Paint Co Ltd | 電着特性測定装置と評価方法及び管理方法 |
| RU2257510C1 (ru) * | 2004-03-01 | 2005-07-27 | Шухостанов Владимир Кистуевич | Способ определения толщины слоя парафинов на внутренней стороне нефте- и газопроводов |
| DE102006006172B3 (de) * | 2006-02-10 | 2007-09-27 | Carl Zeiss Ag | Schichtdickenmessgerät insbesondere für Beschichtungsanlagen und Beschichtungsanlage mit einem solchen Schichtdickenmessgerät |
| CN116121686B (zh) * | 2022-11-24 | 2023-08-04 | 广东粤水电新能源装备有限公司 | 一种基于大数据的风电塔自动喷锌系统 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| HU167641B (enExample) * | 1974-02-07 | 1975-11-28 | ||
| HU170602B (enExample) * | 1975-05-05 | 1977-07-28 |
-
1980
- 1980-11-24 AT AT571080A patent/AT382963B/de not_active IP Right Cessation
-
1981
- 1981-11-14 DE DE19813145309 patent/DE3145309A1/de not_active Withdrawn
- 1981-11-23 GB GB8135283A patent/GB2088058B/en not_active Expired
- 1981-11-24 FR FR8121976A patent/FR2494840A1/fr active Granted
Non-Patent Citations (2)
| Title |
|---|
| ELECTRICAL & ELECTRONICS ABSTRACTS, volume 83, no. 987, mars 1980 (LONDRES, GB) & Elektronikschau, vol 55, no. 10, pages 31-2 (1979) E. BENES "The use of an AC-cut quartz crystal as a temperature sensor" page 679, colonne 1, abrégé 11550 * |
| JOURNAL OF APPLIED PHYSICS, volume 43, no. 11, novembre 1972 (NEW YORK, US) CHIH-SHUN LU et al. "Investigation of film-thickness determination by oscillating quartz resonators with large mass load", pages 4385-4390 * |
Also Published As
| Publication number | Publication date |
|---|---|
| ATA571080A (de) | 1986-09-15 |
| AT382963B (de) | 1987-05-11 |
| DE3145309A1 (de) | 1982-06-16 |
| FR2494840B1 (enExample) | 1984-03-23 |
| GB2088058B (en) | 1984-09-05 |
| GB2088058A (en) | 1982-06-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |