FR2490021A1 - Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication - Google Patents
Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication Download PDFInfo
- Publication number
- FR2490021A1 FR2490021A1 FR8019256A FR8019256A FR2490021A1 FR 2490021 A1 FR2490021 A1 FR 2490021A1 FR 8019256 A FR8019256 A FR 8019256A FR 8019256 A FR8019256 A FR 8019256A FR 2490021 A1 FR2490021 A1 FR 2490021A1
- Authority
- FR
- France
- Prior art keywords
- region
- electrolyte
- doped
- doping
- percentage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000007784 solid electrolyte Substances 0.000 title abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 38
- 239000013626 chemical specie Substances 0.000 claims abstract description 9
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 239000003792 electrolyte Substances 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 19
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 18
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 6
- 239000010416 ion conductor Substances 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 2
- 238000000992 sputter etching Methods 0.000 claims 2
- 229910000420 cerium oxide Inorganic materials 0.000 claims 1
- 238000003486 chemical etching Methods 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 16
- 239000007789 gas Substances 0.000 description 11
- 230000004044 response Effects 0.000 description 10
- 230000036961 partial effect Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 241000894007 species Species 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 239000011575 calcium Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 125000004430 oxygen atom Chemical group O* 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 230000027734 detection of oxygen Effects 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000005342 ion exchange Methods 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 210000003298 dental enamel Anatomy 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000003411 electrode reaction Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- -1 oxygen ions Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 241001071900 Scapanus orarius Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- HBCFGPCRXFLWPM-UHFFFAOYSA-N [Sn].[Sn].[Sn].[Sn] Chemical compound [Sn].[Sn].[Sn].[Sn] HBCFGPCRXFLWPM-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910001424 calcium ion Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- YUOWTJMRMWQJDA-UHFFFAOYSA-J tin(iv) fluoride Chemical compound [F-].[F-].[F-].[F-].[Sn+4] YUOWTJMRMWQJDA-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Fuel Cell (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8019256A FR2490021A1 (fr) | 1980-09-05 | 1980-09-05 | Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication |
| DE8181401309T DE3166490D1 (en) | 1980-09-05 | 1981-08-17 | Apparatus of the electrochemical-cell type with solid electrolyte, and method of manufacturing the same |
| EP19810401309 EP0047687B1 (fr) | 1980-09-05 | 1981-08-17 | Dispositif du type cellule électrochimique à électrolyte solide, et son procédé de fabrication |
| JP56139249A JPS5777955A (en) | 1980-09-05 | 1981-09-05 | Solid electrolyte electrochemical battery type apparatus and manufacture thereof |
| US07/653,997 US5106480A (en) | 1980-09-05 | 1991-02-13 | Device of the solid-electrolyte electrochemical cell type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8019256A FR2490021A1 (fr) | 1980-09-05 | 1980-09-05 | Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2490021A1 true FR2490021A1 (fr) | 1982-03-12 |
| FR2490021B1 FR2490021B1 (cg-RX-API-DMAC10.html) | 1983-11-04 |
Family
ID=9245697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8019256A Granted FR2490021A1 (fr) | 1980-09-05 | 1980-09-05 | Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0047687B1 (cg-RX-API-DMAC10.html) |
| JP (1) | JPS5777955A (cg-RX-API-DMAC10.html) |
| DE (1) | DE3166490D1 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2490021A1 (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0831332B2 (ja) * | 1987-06-26 | 1996-03-27 | 株式会社日立製作所 | 溶融炭酸塩型燃料電池の運転方法 |
| FR2620868B1 (fr) * | 1987-09-22 | 1994-03-25 | Thomson Csf | Procede de realisation de microcavites et application a un capteur electrochimique ainsi qu'a un chomatographe en phase gazeuse |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2904069A1 (de) * | 1979-02-03 | 1980-08-07 | Bosch Gmbh Robert | Festelektrolyt fuer elektrochemische anwendungen und verfahren zur herstellung desselben |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4925580B1 (cg-RX-API-DMAC10.html) * | 1968-06-28 | 1974-07-02 | ||
| DE2526340A1 (de) * | 1975-06-12 | 1976-12-23 | Battelle Institut E V | Elektrochemischer sensor zur messung des brennstoff/luftverhaeltnisses in gasgemischen |
| DE2650850A1 (de) * | 1976-11-06 | 1978-05-11 | Rosenthal Ag | Verfahren zur bestimmung von analytischen daten mittels verbesserter feststoffelektrolyten |
| JPS5439191A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Oxygen detector |
-
1980
- 1980-09-05 FR FR8019256A patent/FR2490021A1/fr active Granted
-
1981
- 1981-08-17 EP EP19810401309 patent/EP0047687B1/fr not_active Expired
- 1981-08-17 DE DE8181401309T patent/DE3166490D1/de not_active Expired
- 1981-09-05 JP JP56139249A patent/JPS5777955A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2904069A1 (de) * | 1979-02-03 | 1980-08-07 | Bosch Gmbh Robert | Festelektrolyt fuer elektrochemische anwendungen und verfahren zur herstellung desselben |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3166490D1 (en) | 1984-11-08 |
| JPS5777955A (en) | 1982-05-15 |
| JPH0132944B2 (cg-RX-API-DMAC10.html) | 1989-07-11 |
| EP0047687A2 (fr) | 1982-03-17 |
| EP0047687A3 (en) | 1982-03-31 |
| EP0047687B1 (fr) | 1984-10-03 |
| FR2490021B1 (cg-RX-API-DMAC10.html) | 1983-11-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |