FR2476142A1 - Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser - Google Patents
Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser Download PDFInfo
- Publication number
- FR2476142A1 FR2476142A1 FR8003322A FR8003322A FR2476142A1 FR 2476142 A1 FR2476142 A1 FR 2476142A1 FR 8003322 A FR8003322 A FR 8003322A FR 8003322 A FR8003322 A FR 8003322A FR 2476142 A1 FR2476142 A1 FR 2476142A1
- Authority
- FR
- France
- Prior art keywords
- chamber
- installation
- starting
- vacuum
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 title abstract description 31
- 238000000034 method Methods 0.000 title abstract description 23
- 238000000576 coating method Methods 0.000 abstract description 44
- 239000011248 coating agent Substances 0.000 abstract description 31
- 150000002894 organic compounds Chemical class 0.000 abstract description 13
- 229910052751 metal Inorganic materials 0.000 abstract description 6
- 239000002184 metal Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000006116 polymerization reaction Methods 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 description 32
- 239000007858 starting material Substances 0.000 description 27
- 229910052782 aluminium Inorganic materials 0.000 description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 18
- 238000005086 pumping Methods 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 11
- 230000007797 corrosion Effects 0.000 description 11
- 238000005299 abrasion Methods 0.000 description 10
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- 229920001296 polysiloxane Polymers 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000007792 addition Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000003570 air Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 229940125961 compound 24 Drugs 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005269 aluminizing Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- XRWSZZJLZRKHHD-WVWIJVSJSA-N asunaprevir Chemical compound O=C([C@@H]1C[C@H](CN1C(=O)[C@@H](NC(=O)OC(C)(C)C)C(C)(C)C)OC1=NC=C(C2=CC=C(Cl)C=C21)OC)N[C@]1(C(=O)NS(=O)(=O)C2CC2)C[C@H]1C=C XRWSZZJLZRKHHD-WVWIJVSJSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000001012 protector Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229920006268 silicone film Polymers 0.000 description 1
- -1 siloxanes Chemical class 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S41/00—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps
- F21S41/30—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors
- F21S41/37—Illuminating devices specially adapted for vehicle exteriors, e.g. headlamps characterised by reflectors characterised by their material, surface treatment or coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
- F21V7/24—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by the material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
- F21V7/28—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7937775A GB2062013B (en) | 1979-10-31 | 1979-10-31 | Coating reflecting surfaces with organic layer by glow discharge |
| DD21854680A DD149547A1 (de) | 1980-01-21 | 1980-01-21 | Auftragen von deckschichten auf reflektierende flaechen |
| DE3002643A DE3002643C2 (de) | 1979-10-31 | 1980-01-25 | Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten |
| FR8003322A FR2476142A1 (fr) | 1979-10-31 | 1980-02-14 | Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7937775A GB2062013B (en) | 1979-10-31 | 1979-10-31 | Coating reflecting surfaces with organic layer by glow discharge |
| DE3002643A DE3002643C2 (de) | 1979-10-31 | 1980-01-25 | Vorrichtung zum Beschichten von Werkstücksoberflächen mit reflektierenden Metall- sowie Schutzschichten |
| FR8003322A FR2476142A1 (fr) | 1979-10-31 | 1980-02-14 | Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2476142A1 true FR2476142A1 (fr) | 1981-08-21 |
| FR2476142B1 FR2476142B1 (OSRAM) | 1982-03-12 |
Family
ID=27188453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8003322A Granted FR2476142A1 (fr) | 1979-10-31 | 1980-02-14 | Procede d'application de revetements sur des surfaces reflechissantes et installation pour le realiser |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE3002643C2 (OSRAM) |
| FR (1) | FR2476142A1 (OSRAM) |
| GB (1) | GB2062013B (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0962260A1 (en) * | 1998-05-28 | 1999-12-08 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film |
| US6275649B1 (en) | 1998-06-01 | 2001-08-14 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus |
| US6473564B1 (en) | 2000-01-07 | 2002-10-29 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of manufacturing thin organic film |
| EP1482067A3 (en) * | 1998-05-28 | 2005-02-02 | Ulvac, Inc. | Vacuum evaporation apparatus |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4778721A (en) * | 1986-07-09 | 1988-10-18 | Battelle Memorial Institute | Method of forming abrasion-resistant plasma coatings and resulting articles |
| GB8708436D0 (en) * | 1987-04-08 | 1987-05-13 | British Telecomm | Reagent source |
| DE19608158C1 (de) * | 1996-03-04 | 1997-08-28 | Dresden Vakuumtech Gmbh | Verfahren und Einrichtung zur Hochfrequenz-Plasmapolymerisation |
| DE19704947A1 (de) * | 1997-02-10 | 1998-08-13 | Leybold Systems Gmbh | Verfahren und Vorrichtung zur Schutzbeschichtung von Verspiegelungsschichten |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1570137A (OSRAM) * | 1967-06-08 | 1969-06-06 | ||
| FR2311102A1 (fr) * | 1975-05-13 | 1976-12-10 | Lucas Industries Ltd | Procede de formation d'un metal et d'une substance de resine synthetique sur un substrat |
| FR2328025A1 (fr) * | 1975-08-22 | 1977-05-13 | Bosch Gmbh Robert | Procede pour la realisation d'une couche protectrice sur la surface de reflecteurs optiques et reflecteurs ainsi obtenus |
| FR2332313A1 (fr) * | 1975-11-21 | 1977-06-17 | Nasa | Revetements resistants a l'abrasion pour surfaces de matieres plastiques |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD99612A1 (OSRAM) * | 1972-11-10 | 1973-08-20 | ||
| DE2536013A1 (de) * | 1975-08-13 | 1977-03-03 | Bosch Gmbh Robert | Verfahren zur verbesserung der haltbarkeit von aus siliciumoxiden bestehenden schutzschichten |
| DE2537416B2 (de) * | 1975-08-22 | 1977-06-30 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur herstellung einer schutzschicht auf der oberflaeche optischer reflektoren |
-
1979
- 1979-10-31 GB GB7937775A patent/GB2062013B/en not_active Expired
-
1980
- 1980-01-25 DE DE3002643A patent/DE3002643C2/de not_active Expired
- 1980-02-14 FR FR8003322A patent/FR2476142A1/fr active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1570137A (OSRAM) * | 1967-06-08 | 1969-06-06 | ||
| FR2311102A1 (fr) * | 1975-05-13 | 1976-12-10 | Lucas Industries Ltd | Procede de formation d'un metal et d'une substance de resine synthetique sur un substrat |
| FR2328025A1 (fr) * | 1975-08-22 | 1977-05-13 | Bosch Gmbh Robert | Procede pour la realisation d'une couche protectrice sur la surface de reflecteurs optiques et reflecteurs ainsi obtenus |
| FR2332313A1 (fr) * | 1975-11-21 | 1977-06-17 | Nasa | Revetements resistants a l'abrasion pour surfaces de matieres plastiques |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0962260A1 (en) * | 1998-05-28 | 1999-12-08 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film |
| US6101316A (en) * | 1998-05-28 | 2000-08-08 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film |
| EP1482067A3 (en) * | 1998-05-28 | 2005-02-02 | Ulvac, Inc. | Vacuum evaporation apparatus |
| EP1696049A1 (en) * | 1998-05-28 | 2006-08-30 | Ulvac, Inc. | Vacuum evaporation apparatus |
| US6275649B1 (en) | 1998-06-01 | 2001-08-14 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus |
| US6507698B2 (en) | 1998-06-01 | 2003-01-14 | Nihon Shinku Gijutsu Kabushiki Kaisha | Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film |
| US6473564B1 (en) | 2000-01-07 | 2002-10-29 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of manufacturing thin organic film |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2062013B (en) | 1984-07-04 |
| FR2476142B1 (OSRAM) | 1982-03-12 |
| DE3002643A1 (de) | 1981-09-10 |
| GB2062013A (en) | 1981-05-20 |
| DE3002643C2 (de) | 1987-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |