FR2474243A1 - Dispositif generateur d'ondes acoustiques de surface - Google Patents

Dispositif generateur d'ondes acoustiques de surface Download PDF

Info

Publication number
FR2474243A1
FR2474243A1 FR8026979A FR8026979A FR2474243A1 FR 2474243 A1 FR2474243 A1 FR 2474243A1 FR 8026979 A FR8026979 A FR 8026979A FR 8026979 A FR8026979 A FR 8026979A FR 2474243 A1 FR2474243 A1 FR 2474243A1
Authority
FR
France
Prior art keywords
thickness
oxide layer
base
zinc oxide
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8026979A
Other languages
English (en)
French (fr)
Other versions
FR2474243B1 (enExample
Inventor
Shusuke Ono
Tsuneo Mitsuyu
Osamu Yamazaki
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of FR2474243A1 publication Critical patent/FR2474243A1/fr
Application granted granted Critical
Publication of FR2474243B1 publication Critical patent/FR2474243B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/36—Devices for manipulating acoustic surface waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
FR8026979A 1979-12-19 1980-12-18 Dispositif generateur d'ondes acoustiques de surface Granted FR2474243A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16610479A JPS5687913A (en) 1979-12-19 1979-12-19 Surface elastic wave element

Publications (2)

Publication Number Publication Date
FR2474243A1 true FR2474243A1 (fr) 1981-07-24
FR2474243B1 FR2474243B1 (enExample) 1984-09-07

Family

ID=15825082

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8026979A Granted FR2474243A1 (fr) 1979-12-19 1980-12-18 Dispositif generateur d'ondes acoustiques de surface

Country Status (4)

Country Link
US (1) US4354130A (enExample)
JP (1) JPS5687913A (enExample)
FR (1) FR2474243A1 (enExample)
GB (1) GB2069278B (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797214A (en) * 1980-12-08 1982-06-16 Matsushita Electric Ind Co Ltd Transducer for surface wave
JPS57145419A (en) * 1981-03-05 1982-09-08 Clarion Co Ltd Surface acoustic wave element
DE3308365A1 (de) * 1982-03-11 1983-09-15 Nobuo Mikoshiba Akustische oberflaechenwellen bildende vorrichtung
JPS58213519A (ja) * 1982-06-07 1983-12-12 Clarion Co Ltd 弾性表面波装置
GB2123638B (en) * 1982-06-22 1986-02-26 Clarion Co Ltd Surface acoustic wave device
JPS598418A (ja) * 1982-07-06 1984-01-17 Clarion Co Ltd 弾性表面波装置
JPS60119114A (ja) * 1983-11-30 1985-06-26 Murata Mfg Co Ltd 表面波装置
JPS60169210A (ja) * 1984-02-13 1985-09-02 Murata Mfg Co Ltd 表面波装置
US4665374A (en) * 1985-12-20 1987-05-12 Allied Corporation Monolithic programmable signal processor using PI-FET taps
US4985655A (en) * 1988-05-27 1991-01-15 Piezo Crystal Company, Division Of Ppa Industries, Inc. Crystal header package
US4952832A (en) * 1989-10-24 1990-08-28 Sumitomo Electric Industries, Ltd. Surface acoustic wave device
US5215546A (en) * 1990-09-04 1993-06-01 Motorola, Inc. Method and apparatus for SAW device passivation
JP3205976B2 (ja) * 1992-09-14 2001-09-04 住友電気工業株式会社 表面弾性波素子
JP3163606B2 (ja) * 1993-01-29 2001-05-08 住友電気工業株式会社 表面弾性波素子
JP3244386B2 (ja) * 1994-08-23 2002-01-07 松下電器産業株式会社 弾性表面波装置
US5783896A (en) * 1995-08-08 1998-07-21 Sumitomo Electric Industries, Ltd. Diamond-Zn0 surface acoustic wave device
US5959389A (en) * 1995-08-08 1999-09-28 Sumitomo Electronic Industries, Ltd. Diamond-ZnO surface acoustic wave device
US5696422A (en) * 1996-03-01 1997-12-09 Piezo Crystal Company Crystal package
JP3321369B2 (ja) * 1996-09-27 2002-09-03 日本碍子株式会社 表面弾性波装置およびその基板およびその製造方法
US5838089A (en) * 1997-02-18 1998-11-17 Kobe Steel Usa Inc. Acoustic wave devices on diamond with an interlayer
GB2349465A (en) * 1999-04-27 2000-11-01 Transense Technologies Plc Thin film SAW strain gauge

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2607837A1 (de) * 1975-03-04 1976-09-16 Murata Manufacturing Co Wandler fuer elastische oberflaechenwellen
US4037176A (en) * 1975-03-18 1977-07-19 Matsushita Electric Industrial Co., Ltd. Multi-layered substrate for a surface-acoustic-wave device
FR2423870A1 (fr) * 1978-04-18 1979-11-16 Matsushita Electric Industrial Co Ltd Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2607837A1 (de) * 1975-03-04 1976-09-16 Murata Manufacturing Co Wandler fuer elastische oberflaechenwellen
US4037176A (en) * 1975-03-18 1977-07-19 Matsushita Electric Industrial Co., Ltd. Multi-layered substrate for a surface-acoustic-wave device
FR2423870A1 (fr) * 1978-04-18 1979-11-16 Matsushita Electric Industrial Co Ltd Dispositif a ondes acoustiques de surface comprenant un substrat piezoelectrique comportant une couche d'oxyde de zinc sur une couche d'alumine-a

Also Published As

Publication number Publication date
GB2069278B (en) 1984-02-22
FR2474243B1 (enExample) 1984-09-07
US4354130A (en) 1982-10-12
GB2069278A (en) 1981-08-19
JPS5687913A (en) 1981-07-17

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