FR2472446B1 - - Google Patents

Info

Publication number
FR2472446B1
FR2472446B1 FR7931754A FR7931754A FR2472446B1 FR 2472446 B1 FR2472446 B1 FR 2472446B1 FR 7931754 A FR7931754 A FR 7931754A FR 7931754 A FR7931754 A FR 7931754A FR 2472446 B1 FR2472446 B1 FR 2472446B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7931754A
Other versions
FR2472446A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR7931754A priority Critical patent/FR2472446A1/fr
Publication of FR2472446A1 publication Critical patent/FR2472446A1/fr
Application granted granted Critical
Publication of FR2472446B1 publication Critical patent/FR2472446B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G65/00—Loading or unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
FR7931754A 1979-12-27 1979-12-27 Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement Granted FR2472446A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7931754A FR2472446A1 (fr) 1979-12-27 1979-12-27 Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7931754A FR2472446A1 (fr) 1979-12-27 1979-12-27 Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement

Publications (2)

Publication Number Publication Date
FR2472446A1 FR2472446A1 (fr) 1981-07-03
FR2472446B1 true FR2472446B1 (fr) 1984-02-10

Family

ID=9233190

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7931754A Granted FR2472446A1 (fr) 1979-12-27 1979-12-27 Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement

Country Status (1)

Country Link
FR (1) FR2472446A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2586658B1 (fr) * 1985-08-30 1987-12-24 Recif Sa Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661242A (en) * 1970-05-28 1972-05-09 Colgate Palmolive Co Packaging apparatus
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers
DE2613322C2 (de) * 1976-03-29 1978-04-27 Spiegelglaswerke Germania Zweigniederlassung Der Glaceries De Saint-Roch, S.A., 5000 Koeln Vorrichtung zum Aufstapeln einzelner Platten, insbesondere zum Aufstapeln von Glasscheiben

Also Published As

Publication number Publication date
FR2472446A1 (fr) 1981-07-03

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Legal Events

Date Code Title Description
ST Notification of lapse