FR2586658B1 - Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre - Google Patents

Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre

Info

Publication number
FR2586658B1
FR2586658B1 FR8513295A FR8513295A FR2586658B1 FR 2586658 B1 FR2586658 B1 FR 2586658B1 FR 8513295 A FR8513295 A FR 8513295A FR 8513295 A FR8513295 A FR 8513295A FR 2586658 B1 FR2586658 B1 FR 2586658B1
Authority
FR
France
Prior art keywords
baskets
nacelle
silicon wafers
implementing machine
online transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8513295A
Other languages
English (en)
Other versions
FR2586658A1 (fr
Inventor
Bernard Poli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Recif SA
Original Assignee
Recif SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Recif SA filed Critical Recif SA
Priority to FR8513295A priority Critical patent/FR2586658B1/fr
Publication of FR2586658A1 publication Critical patent/FR2586658A1/fr
Application granted granted Critical
Publication of FR2586658B1 publication Critical patent/FR2586658B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
FR8513295A 1985-08-30 1985-08-30 Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre Expired FR2586658B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8513295A FR2586658B1 (fr) 1985-08-30 1985-08-30 Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8513295A FR2586658B1 (fr) 1985-08-30 1985-08-30 Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre

Publications (2)

Publication Number Publication Date
FR2586658A1 FR2586658A1 (fr) 1987-03-06
FR2586658B1 true FR2586658B1 (fr) 1987-12-24

Family

ID=9322703

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8513295A Expired FR2586658B1 (fr) 1985-08-30 1985-08-30 Procede de transfert en ligne de plaquettes de silicium notamment de paniers dans au moins une nacelle et la machine de mise en oeuvre

Country Status (1)

Country Link
FR (1) FR2586658B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19549487C2 (de) * 1995-01-05 2000-11-16 Steag Micro Tech Gmbh Anlage zur chemischen Naßbehandlung
CN109279502A (zh) * 2018-11-30 2019-01-29 江苏润阳悦达光伏科技有限公司 制绒槽式清洗机花篮的应急吊具

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472446A1 (fr) * 1979-12-27 1981-07-03 Guy Mongodin Appareil pour le transfert de plaquettes minces disposees verticalement dans un panier rainure de rangement
US4493606A (en) * 1982-05-24 1985-01-15 Proconics International, Inc. Wafer transfer apparatus

Also Published As

Publication number Publication date
FR2586658A1 (fr) 1987-03-06

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Legal Events

Date Code Title Description
ST Notification of lapse