FR2470378A1 - Procede permettant de determiner la concentration en fluor - Google Patents
Procede permettant de determiner la concentration en fluor Download PDFInfo
- Publication number
- FR2470378A1 FR2470378A1 FR8025083A FR8025083A FR2470378A1 FR 2470378 A1 FR2470378 A1 FR 2470378A1 FR 8025083 A FR8025083 A FR 8025083A FR 8025083 A FR8025083 A FR 8025083A FR 2470378 A1 FR2470378 A1 FR 2470378A1
- Authority
- FR
- France
- Prior art keywords
- gas
- fluorine
- fluorine atoms
- concentration
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 16
- 239000010703 silicon Substances 0.000 claims abstract description 16
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 15
- 239000011737 fluorine Substances 0.000 claims abstract description 15
- 239000000126 substance Substances 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 10
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims abstract 4
- 125000001153 fluoro group Chemical group F* 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 238000005554 pickling Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 12
- 239000007789 gas Substances 0.000 description 22
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 6
- 229910052801 chlorine Inorganic materials 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 6
- 238000004020 luminiscence type Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 235000012771 pancakes Nutrition 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/76—Chemiluminescence; Bioluminescence
- G01N21/766—Chemiluminescence; Bioluminescence of gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/19—Halogen containing
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7908560A NL7908560A (nl) | 1979-11-26 | 1979-11-26 | Werkwijze voor het bepalen van fluor. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2470378A1 true FR2470378A1 (fr) | 1981-05-29 |
| FR2470378B1 FR2470378B1 (enExample) | 1984-01-13 |
Family
ID=19834235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8025083A Granted FR2470378A1 (fr) | 1979-11-26 | 1980-11-26 | Procede permettant de determiner la concentration en fluor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4666857A (enExample) |
| JP (1) | JPS5687847A (enExample) |
| CA (1) | CA1146768A (enExample) |
| DE (1) | DE3043619C2 (enExample) |
| FR (1) | FR2470378A1 (enExample) |
| GB (1) | GB2064110B (enExample) |
| IT (1) | IT1134420B (enExample) |
| NL (1) | NL7908560A (enExample) |
-
1979
- 1979-11-26 NL NL7908560A patent/NL7908560A/nl not_active Application Discontinuation
-
1980
- 1980-11-19 DE DE3043619A patent/DE3043619C2/de not_active Expired
- 1980-11-20 CA CA000365104A patent/CA1146768A/en not_active Expired
- 1980-11-21 IT IT26174/80A patent/IT1134420B/it active
- 1980-11-21 GB GB8037429A patent/GB2064110B/en not_active Expired
- 1980-11-22 JP JP16406080A patent/JPS5687847A/ja active Granted
- 1980-11-26 FR FR8025083A patent/FR2470378A1/fr active Granted
-
1983
- 1983-01-12 US US06/457,323 patent/US4666857A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB2064110A (en) | 1981-06-10 |
| GB2064110B (en) | 1983-11-16 |
| NL7908560A (nl) | 1981-06-16 |
| DE3043619A1 (de) | 1981-08-27 |
| IT1134420B (it) | 1986-08-13 |
| DE3043619C2 (de) | 1985-01-03 |
| US4666857A (en) | 1987-05-19 |
| JPS6319813B2 (enExample) | 1988-04-25 |
| JPS5687847A (en) | 1981-07-16 |
| IT8026174A0 (it) | 1980-11-21 |
| CA1146768A (en) | 1983-05-24 |
| FR2470378B1 (enExample) | 1984-01-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW561543B (en) | On-line UV-visible halogen gas analyzer for semiconductor processing effluent monitoring | |
| US6791692B2 (en) | Method and device utilizing plasma source for real-time gas sampling | |
| US5963336A (en) | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | |
| EP0654663B1 (fr) | Procédé d'analyse élémentaire par spectrométrie d'émission optique sur plasma produit par laser en présence d'argon | |
| FR2699917A1 (fr) | Méthode et dispositif de régulation d'un procédé de séparation d'isomères d'hydrocarbures aromatiques à 8 à 10 atomes de carbone. | |
| US20240079220A1 (en) | Optical absorption sensor for semiconductor processing | |
| EP0042789A1 (fr) | Procédé de mesure de grande sensibilité des concentrations de gaz et produits volatils in situ et en continu et appareil de mise en oeuvre | |
| FR2470378A1 (fr) | Procede permettant de determiner la concentration en fluor | |
| EP0930810A1 (fr) | Torche à plasma à injecteur réglable et installation d'analyse d'un gaz utilisant une telle torche | |
| FR2580077A1 (enExample) | ||
| FR2734363A1 (fr) | Methode de mesure de la teneur en 18o et/ou 15n d'une substance chimique, appareillage et dispositif de pyrolyse | |
| FR2568376A1 (fr) | Procede et dispositif d'analyse par chimioluminescence | |
| FR2482303A1 (fr) | Dispositif pour la mesure continue de la teneur en hydrocarbures de plusieurs courants temoins distincts au moyen de detecteurs d'ionisation de flammes | |
| US6267121B1 (en) | Process to season and determine condition of a high density plasma etcher | |
| FR2622295A1 (fr) | Dispositif et procede pour determiner la teneur totale en soufre de combinaisons chimiques | |
| EP0305269A1 (fr) | Procédé de contrôle en temps réel de la sélectivité de la gravure par analyse des gaz du plasma dans un procédé de gravure ionique réactive et réacteur pour sa mise en oeuvre | |
| EP0437405A1 (fr) | Procédé et appareil pour la détermination de l'azote total | |
| RU2064205C1 (ru) | Масс-спектрометр для анализа микроконцентраций примесей в газах и парах (его варианты) | |
| EP0059140A1 (fr) | Appareil pour la détection d'un corps dans un fluide en circulation | |
| FR2683156A1 (fr) | Interface d'extraction de solvant d'une solution et procede de concentration de solutions. | |
| EP0068910B1 (fr) | Procédé et appareil d'analyse directe et continue de traces d'hydrures gazeux | |
| EP0053527B1 (fr) | Procédé et appareil d'analyse directe et continue de traces d'arsine | |
| CN220934013U (zh) | 一种空心阴极光电光谱仪 | |
| EP0200645B1 (fr) | Procédé et dispositif d'introduction d'échantillons pour spectromètre de masse | |
| FR2907219A1 (fr) | Caracterisation de gaz par spectrometrie optique a emission |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |