FR2467832A1 - Procede de fabrication de pieces en silicium nitrure - Google Patents
Procede de fabrication de pieces en silicium nitrure Download PDFInfo
- Publication number
- FR2467832A1 FR2467832A1 FR7926222A FR7926222A FR2467832A1 FR 2467832 A1 FR2467832 A1 FR 2467832A1 FR 7926222 A FR7926222 A FR 7926222A FR 7926222 A FR7926222 A FR 7926222A FR 2467832 A1 FR2467832 A1 FR 2467832A1
- Authority
- FR
- France
- Prior art keywords
- nitrogen
- carbon monoxide
- parts
- aluminum
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 title claims description 9
- 230000008569 process Effects 0.000 title claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 24
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 21
- 238000005121 nitriding Methods 0.000 claims abstract description 15
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 15
- 238000006243 chemical reaction Methods 0.000 claims abstract description 12
- 239000012298 atmosphere Substances 0.000 claims abstract description 10
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 6
- 238000005245 sintering Methods 0.000 claims abstract description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 4
- 230000035515 penetration Effects 0.000 claims abstract description 4
- 239000002344 surface layer Substances 0.000 claims abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- AUEPDNOBDJYBBK-UHFFFAOYSA-N [Si].[C-]#[O+] Chemical compound [Si].[C-]#[O+] AUEPDNOBDJYBBK-UHFFFAOYSA-N 0.000 claims 1
- 238000005273 aeration Methods 0.000 claims 1
- 108090000623 proteins and genes Proteins 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 230000003647 oxidation Effects 0.000 abstract description 4
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005493 condensed matter Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7926222A FR2467832A1 (fr) | 1979-10-23 | 1979-10-23 | Procede de fabrication de pieces en silicium nitrure |
| EP80106295A EP0027639B1 (fr) | 1979-10-23 | 1980-10-16 | Procédé de fabrication de pièces en silicium nitrure |
| DE8080106295T DE3062061D1 (en) | 1979-10-23 | 1980-10-16 | Method of producing nitrided silicon articles |
| US06/198,087 US4331772A (en) | 1979-10-23 | 1980-10-17 | Method of manufacturing nitrided silicon parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7926222A FR2467832A1 (fr) | 1979-10-23 | 1979-10-23 | Procede de fabrication de pieces en silicium nitrure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2467832A1 true FR2467832A1 (fr) | 1981-04-30 |
| FR2467832B1 FR2467832B1 (OSRAM) | 1981-10-16 |
Family
ID=9230919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7926222A Granted FR2467832A1 (fr) | 1979-10-23 | 1979-10-23 | Procede de fabrication de pieces en silicium nitrure |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4331772A (OSRAM) |
| EP (1) | EP0027639B1 (OSRAM) |
| DE (1) | DE3062061D1 (OSRAM) |
| FR (1) | FR2467832A1 (OSRAM) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2517665B1 (fr) * | 1981-12-08 | 1986-01-31 | Ceraver | Procede de fabrication d'un materiau fritte a base de nitrure de silicium, et materiau obtenu par ce procede |
| DE3273585D1 (en) * | 1982-10-04 | 1986-11-06 | Trw Ceramics | Improvements in or relating to the formation of profiled ceramic bodies |
| EP0121518B1 (en) * | 1982-10-12 | 1987-07-08 | Ford Motor Company | Making hot pressed silicon nitride by use of low density reaction bonded body |
| FR2544335B1 (fr) * | 1983-04-13 | 1987-08-14 | Armines | Procede de fabrication de pieces ou poudres en un compose de silicium ou d'un metal, par reaction de pieces ou poudres de silicium ou d'un metal a l'etat solide sur un gaz |
| US4605588A (en) * | 1985-03-14 | 1986-08-12 | The Boeing Company | Barrier coated ceramic fiber and coating method |
| US4948662A (en) * | 1985-03-14 | 1990-08-14 | The Boeing Company | Boron nitride coated ceramic fibers and coating method |
| US7763205B2 (en) * | 2004-10-22 | 2010-07-27 | Ceradyne, Inc. | Continuous process for fabricating reaction bonded silicon nitride articles |
| CN113862775B (zh) * | 2021-09-30 | 2022-06-10 | 西安奕斯伟材料科技有限公司 | 一种用于制造掺氮单晶硅的设备及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2046973A1 (OSRAM) * | 1969-06-20 | 1971-03-12 | Danfoss As | |
| FR2339584A1 (fr) * | 1976-01-30 | 1977-08-26 | Norton Co | Procede de renforcement de pieces en nitrure de silicium fritte |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3892840A (en) * | 1971-12-16 | 1975-07-01 | Danfoss As | Method of producing an oxygen containing silicon compound |
| US3960581A (en) * | 1974-04-29 | 1976-06-01 | The University Of Utah | Process for producing a solid solution of aluminum oxide in silicon nitride |
| FR2445747A1 (fr) * | 1979-01-05 | 1980-08-01 | Armines | Procede de fabrication de pieces en silicium nitrure |
| JPS55116675A (en) * | 1979-02-27 | 1980-09-08 | Ngk Insulators Ltd | Manufacture of silicon nitride sintered body |
| US4235857A (en) * | 1979-07-02 | 1980-11-25 | Ford Motor Company | Method of nitriding silicon |
-
1979
- 1979-10-23 FR FR7926222A patent/FR2467832A1/fr active Granted
-
1980
- 1980-10-16 DE DE8080106295T patent/DE3062061D1/de not_active Expired
- 1980-10-16 EP EP80106295A patent/EP0027639B1/fr not_active Expired
- 1980-10-17 US US06/198,087 patent/US4331772A/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2046973A1 (OSRAM) * | 1969-06-20 | 1971-03-12 | Danfoss As | |
| FR2339584A1 (fr) * | 1976-01-30 | 1977-08-26 | Norton Co | Procede de renforcement de pieces en nitrure de silicium fritte |
Non-Patent Citations (1)
| Title |
|---|
| EXBK/76 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0027639B1 (fr) | 1983-02-16 |
| EP0027639A1 (fr) | 1981-04-29 |
| DE3062061D1 (en) | 1983-03-24 |
| FR2467832B1 (OSRAM) | 1981-10-16 |
| US4331772A (en) | 1982-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |