FR2459557A1 - Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support - Google Patents

Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support Download PDF

Info

Publication number
FR2459557A1
FR2459557A1 FR7915398A FR7915398A FR2459557A1 FR 2459557 A1 FR2459557 A1 FR 2459557A1 FR 7915398 A FR7915398 A FR 7915398A FR 7915398 A FR7915398 A FR 7915398A FR 2459557 A1 FR2459557 A1 FR 2459557A1
Authority
FR
France
Prior art keywords
aluminum
layer
support
substrate
support according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7915398A
Other languages
English (en)
French (fr)
Other versions
FR2459557B1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LEROUZIX JEAN
Original Assignee
LEROUZIX JEAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LEROUZIX JEAN filed Critical LEROUZIX JEAN
Priority to FR7915398A priority Critical patent/FR2459557A1/fr
Priority to US06/156,263 priority patent/US4285781A/en
Priority to CA000353906A priority patent/CA1151316A/en
Priority to DE19803022268 priority patent/DE3022268A1/de
Publication of FR2459557A1 publication Critical patent/FR2459557A1/fr
Application granted granted Critical
Publication of FR2459557B1 publication Critical patent/FR2459557B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
    • H05K1/053Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an inorganic insulating layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68Shapes or dispositions thereof
    • H10W70/6875Shapes or dispositions thereof being on a metallic substrate, e.g. insulated metal substrates [IMS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12583Component contains compound of adjacent metal
    • Y10T428/1259Oxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
FR7915398A 1979-06-15 1979-06-15 Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support Granted FR2459557A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7915398A FR2459557A1 (fr) 1979-06-15 1979-06-15 Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support
US06/156,263 US4285781A (en) 1979-06-15 1980-06-03 Metal support for an electronic component interconnection network and process for manufacturing this support
CA000353906A CA1151316A (en) 1979-06-15 1980-06-12 Metal support for an electronic component interconnection network and process for manufacturing this support
DE19803022268 DE3022268A1 (de) 1979-06-15 1980-06-13 Traeger fuer ein netz zur verbindung von elektronischen bauelementen und verfahren zu seiner herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7915398A FR2459557A1 (fr) 1979-06-15 1979-06-15 Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support

Publications (2)

Publication Number Publication Date
FR2459557A1 true FR2459557A1 (fr) 1981-01-09
FR2459557B1 FR2459557B1 (https=) 1982-05-21

Family

ID=9226682

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7915398A Granted FR2459557A1 (fr) 1979-06-15 1979-06-15 Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support

Country Status (4)

Country Link
US (1) US4285781A (https=)
CA (1) CA1151316A (https=)
DE (1) DE3022268A1 (https=)
FR (1) FR2459557A1 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2546878A1 (fr) * 1983-05-31 1984-12-07 Slonina Jean Pierre Plaque support d'un substrat ceramique, leger, a forte conductivite thermique et coefficient de dilatation adapte pour toutes applications dans le domaine electronique
EP0180219A3 (en) * 1984-11-01 1986-12-17 Nec Corporation Capacitor built-in integrated circuit packaged unit and process of fabrication thereof
EP0221531A3 (en) * 1985-11-06 1992-02-19 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha High heat conductive insulated substrate and method of manufacturing the same
WO1996003771A1 (en) * 1994-07-25 1996-02-08 Micro Components & Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
WO1998053499A1 (en) * 1997-05-20 1998-11-26 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
WO2000031797A3 (en) * 1998-11-25 2000-11-23 Micro Components Ltd Device for electronic packaging, pin jig fixture

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3501372A1 (de) * 1985-01-17 1986-07-17 Brown, Boveri & Cie Ag, 6800 Mannheim Substrat fuer leiterplatten
US4799309A (en) * 1987-12-24 1989-01-24 Ford Motor Company Method of making a rectifier and control module for an alternator
US4971894A (en) * 1989-02-13 1990-11-20 International Business Machines Corporation Method and structure for preventing wet etchant penetration at the interface between a resist mask and an underlying metal layer
WO2007091976A1 (en) * 2006-02-10 2007-08-16 Opulent Electronics International Pte Ltd Anodised aluminium, dielectric, and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1243254B (de) * 1964-08-07 1967-06-29 Telefunken Patent Traegerkoerper fuer Mikroschaltkreise
NL7712929A (en) * 1977-11-23 1979-05-28 Gennady Grigorievich Smolko Semiconductor with dielectric substrate in housing - has contact zone connected to capacitor with coatings separated by dielectric
FR2414281A1 (fr) * 1978-01-05 1979-08-03 Smolko Gennady Perfectionnements apportes aux dispositifs electroniques, notamment aux microcircuits

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3423821A (en) * 1965-03-18 1969-01-28 Hitachi Ltd Method of producing thin film integrated circuits
US3607381A (en) * 1968-06-14 1971-09-21 Platron Corp Spray process for creating electrical circuits
JPS4995591A (https=) * 1973-01-12 1974-09-10
US3941630A (en) * 1974-04-29 1976-03-02 Rca Corporation Method of fabricating a charged couple radiation sensing device
GB1536177A (en) * 1976-12-07 1978-12-20 Nat Res Dev Anodising a compound semiconductor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1243254B (de) * 1964-08-07 1967-06-29 Telefunken Patent Traegerkoerper fuer Mikroschaltkreise
NL7712929A (en) * 1977-11-23 1979-05-28 Gennady Grigorievich Smolko Semiconductor with dielectric substrate in housing - has contact zone connected to capacitor with coatings separated by dielectric
FR2414281A1 (fr) * 1978-01-05 1979-08-03 Smolko Gennady Perfectionnements apportes aux dispositifs electroniques, notamment aux microcircuits

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2546878A1 (fr) * 1983-05-31 1984-12-07 Slonina Jean Pierre Plaque support d'un substrat ceramique, leger, a forte conductivite thermique et coefficient de dilatation adapte pour toutes applications dans le domaine electronique
EP0180219A3 (en) * 1984-11-01 1986-12-17 Nec Corporation Capacitor built-in integrated circuit packaged unit and process of fabrication thereof
EP0221531A3 (en) * 1985-11-06 1992-02-19 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha High heat conductive insulated substrate and method of manufacturing the same
WO1996003771A1 (en) * 1994-07-25 1996-02-08 Micro Components & Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
US5661341A (en) * 1994-07-25 1997-08-26 Microcomponents And Systems Ltd. Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
WO1998053499A1 (en) * 1997-05-20 1998-11-26 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
US6448510B1 (en) 1997-05-20 2002-09-10 Micro Components Ltd. Substrate for electronic packaging, pin jig fixture
WO2000031797A3 (en) * 1998-11-25 2000-11-23 Micro Components Ltd Device for electronic packaging, pin jig fixture

Also Published As

Publication number Publication date
FR2459557B1 (https=) 1982-05-21
CA1151316A (en) 1983-08-02
US4285781A (en) 1981-08-25
DE3022268A1 (de) 1980-12-18

Similar Documents

Publication Publication Date Title
EP1636130B1 (fr) Circuit integre sur puce de hautes performances
KR100328901B1 (ko) BEOL 배선 제조를 위하여 작은 콘택트 비아에 행해지는 높은 양산 능력의 Al-Cu 박막 스퍼터링 공정
FR2459557A1 (fr) Support metallique pour reseau d'interconnexion de composants electroniques et procede de fabrication de ce support
EP0006810A1 (fr) Procédé de fabrication d'un circuit intégré hybride
FR2535893A1 (fr) Procede de fabrication d'un composant passif a radio frequence et condensateur fabrique par ce procede
FR2890984A1 (fr) Procede d'electrodeposition destine au revetement d'une surface d'un substrat par un metal.
US5217589A (en) Method of adherent metal coating for aluminum nitride surfaces
EP0611203A1 (fr) Détecteur thermique comprenant un isolant thermique en polymère expansé
EP3966850B1 (fr) Procede de fabrication d'un module electronique de puissance
US5595668A (en) Laser slag removal
FR2646311A1 (fr) Substrats metalliques isoles et procede de fabrication desdits substrats
EP1328012A1 (fr) Procédé de fabrication d'un composant électronique incorporant un microcomposantinductif
KR20020011135A (ko) 2층 확산 장벽 증착 방법
EP1239515B1 (fr) Substrat pour circuit électronique de puissance et module électronique de puissance utilisant un tel substrat
EP3966851B1 (fr) Procede de fabrication d'un module electronique de puissance
RU2231939C1 (ru) Способ изготовления печатных плат
FR2466103A1 (fr) Procede de realisation d'un reseau d'interconnexion de composants electroniques a conducteurs en aluminium et isolant en alumine et reseau d'interconnexion obtenu par ce procede
US4351704A (en) Production method for solder coated conductor wiring
FR2513476A1 (fr) Plaquette a circuit a plusieurs couches et son procede de fabrication
FR2763780A1 (fr) Procede de fabrication de circuits imprimes sur substrat metallique
KR100764386B1 (ko) 고온공정에 적합한 절연구조체 및 그 제조방법
EP0091075B1 (fr) Procédé d'élaboration de circuits d'interconnexion multicouches
FR2620860A1 (fr) Procede et structure pour obtenir une faible resistance de contact avec l'aluminium et ses alliages avec depot selectif de tungstene
EP1316974A1 (fr) Procédé de fabrication d'un composant électronique incorporant un micro-composant inductif
CN110957254A (zh) 一种无烧结的氮化铝的静电卡盘

Legal Events

Date Code Title Description
ST Notification of lapse