FR2455075B1 - - Google Patents
Info
- Publication number
- FR2455075B1 FR2455075B1 FR7910290A FR7910290A FR2455075B1 FR 2455075 B1 FR2455075 B1 FR 2455075B1 FR 7910290 A FR7910290 A FR 7910290A FR 7910290 A FR7910290 A FR 7910290A FR 2455075 B1 FR2455075 B1 FR 2455075B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Detergent Compositions (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7910290A FR2455075A1 (fr) | 1979-04-24 | 1979-04-24 | Composition a base de solvants chlores pour l'elimination de resines photoresistantes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7910290A FR2455075A1 (fr) | 1979-04-24 | 1979-04-24 | Composition a base de solvants chlores pour l'elimination de resines photoresistantes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2455075A1 FR2455075A1 (fr) | 1980-11-21 |
| FR2455075B1 true FR2455075B1 (cg-RX-API-DMAC7.html) | 1983-02-18 |
Family
ID=9224637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7910290A Granted FR2455075A1 (fr) | 1979-04-24 | 1979-04-24 | Composition a base de solvants chlores pour l'elimination de resines photoresistantes |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR2455075A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5374500A (en) * | 1993-04-02 | 1994-12-20 | International Business Machines Corporation | Positive photoresist composition containing photoacid generator and use thereof |
| US6231677B1 (en) * | 1998-02-27 | 2001-05-15 | Kanto Kagaku Kabushiki Kaisha | Photoresist stripping liquid composition |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1419726A (fr) * | 1963-10-04 | 1965-12-03 | Kalle Ag | Solutions détersives pour formes d'imprimerie planes |
| US3582401A (en) * | 1967-11-15 | 1971-06-01 | Mallinckrodt Chemical Works | Photosensitive resist remover compositions and methods |
| FR2072172A5 (cg-RX-API-DMAC7.html) * | 1969-12-23 | 1971-09-24 | Ibm | |
| US3871929A (en) * | 1974-01-30 | 1975-03-18 | Allied Chem | Polymeric etch resist strippers and method of using same |
| US4165295A (en) * | 1976-10-04 | 1979-08-21 | Allied Chemical Corporation | Organic stripping compositions and method for using same |
| US4078102A (en) * | 1976-10-29 | 1978-03-07 | International Business Machines Corporation | Process for stripping resist layers from substrates |
| US4242218A (en) * | 1976-11-08 | 1980-12-30 | Allied Chemical Corporation | Phenol-free photoresist stripper |
-
1979
- 1979-04-24 FR FR7910290A patent/FR2455075A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2455075A1 (fr) | 1980-11-21 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |