FR2454084A1 - Dispositif de verification des dimensions d'objets par mesure capacitive et sans contact - Google Patents

Dispositif de verification des dimensions d'objets par mesure capacitive et sans contact

Info

Publication number
FR2454084A1
FR2454084A1 FR8000106A FR8000106A FR2454084A1 FR 2454084 A1 FR2454084 A1 FR 2454084A1 FR 8000106 A FR8000106 A FR 8000106A FR 8000106 A FR8000106 A FR 8000106A FR 2454084 A1 FR2454084 A1 FR 2454084A1
Authority
FR
France
Prior art keywords
capacitive
verifying
dimensions
objects
contact measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8000106A
Other languages
English (en)
Other versions
FR2454084B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gould Inc
Original Assignee
Gould Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gould Inc filed Critical Gould Inc
Publication of FR2454084A1 publication Critical patent/FR2454084A1/fr
Application granted granted Critical
Publication of FR2454084B1 publication Critical patent/FR2454084B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G01B7/287—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'INVENTION CONCERNE UN DISPOSITIF DE VERIFICATION DIMENSIONNELLE, CAPACITIF ET SANS CONTACT. IL COMPORTE DES ENSEMBLES DE TETE 16 CONTENANT CHACUN PLUSIEURS SONDES CAPACITIVES 60, UN CONDENSATEUR CONNU 64 CONNECTE A CHAQUE SONDE ET UN AMPLIFICATEUR DE SORTIE 66 EGALEMENT CONNECTE A CHAQUE SONDE. LES SIGNAUX DE SORTIE DES AMPLIFICATEURS SONT ECHANTILLONNES PAR DES MULTIPLEXEURS 18, 20 ET UNE MEMOIRE PERMANENTE PROGRAMMABLE 22 ASSOCIEE AVEC CHAQUE ENSEMBLE DE TETE 16 MEMORISE LES INFORMATIONS CONCERNANT LES CARACTERISTIQUES DE TRANSFERT DES AMPLIFICATEURS DE SORTIE 66. L'INVENTION S'APPLIQUE NOTAMMENT AU CONTROLE DIMENSIONNEL DE PIECES USINEES, MOULEES, ETC.
FR8000106A 1978-03-31 1980-01-02 Dispositif de verification des dimensions d'objets par mesure capacitive et sans contact Granted FR2454084A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/891,957 US4190797A (en) 1978-03-31 1978-03-31 Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means

Publications (2)

Publication Number Publication Date
FR2454084A1 true FR2454084A1 (fr) 1980-11-07
FR2454084B1 FR2454084B1 (fr) 1983-11-18

Family

ID=25399115

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8000106A Granted FR2454084A1 (fr) 1978-03-31 1980-01-02 Dispositif de verification des dimensions d'objets par mesure capacitive et sans contact

Country Status (8)

Country Link
US (1) US4190797A (fr)
EP (1) EP0004757A1 (fr)
JP (1) JPS54133368A (fr)
CA (1) CA1138113A (fr)
DE (1) DE2952825A1 (fr)
FR (1) FR2454084A1 (fr)
GB (1) GB2041540B (fr)
IT (1) IT1148230B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0091288A1 (fr) * 1982-04-05 1983-10-12 Armco Inc. Sonde sans contact pour mesurer le profil d'une surface d'un banc d'acier en mouvement

Families Citing this family (39)

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US4350040A (en) * 1980-06-26 1982-09-21 The United States Of America As Represented By The United States Department Of Energy Capacitance-level/density monitor for fluidized-bed combustor
EP0056365A1 (fr) * 1980-07-07 1982-07-28 Viak Ab Dispositif de mesure des dimensions d'une lingotiere
USRE32457E (en) * 1981-09-30 1987-07-07 Rca Corporation Scanning capacitance microscope
US4481616A (en) * 1981-09-30 1984-11-06 Rca Corporation Scanning capacitance microscope
US4646009A (en) * 1982-05-18 1987-02-24 Ade Corporation Contacts for conductivity-type sensors
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
CA1191261A (fr) * 1983-12-14 1985-07-30 Francois Lalonde Appareil de mesure dynamique et sans contact de faibles distances
US4860229A (en) * 1984-01-20 1989-08-22 Ade Corporation Wafer flatness station
GB8405532D0 (en) * 1984-03-02 1984-04-04 Atherton E J Measurement using electrical transducers
US4935700A (en) * 1985-08-09 1990-06-19 Washington Research Foundation Fringe field capacitive sensor for measuring the size of an opening
DE3617373A1 (de) * 1986-05-23 1987-11-26 Mtu Muenchen Gmbh Kapazitives messsystem
US4820971A (en) * 1986-05-29 1989-04-11 Ko Wen Hsiung Precision impedance variation measurement circuit
GB8620966D0 (en) * 1986-08-29 1986-10-08 Analytical Instr Ltd Package tester
US4766389A (en) * 1986-09-03 1988-08-23 Extrude Hone Corporation Capacitor array sensors tactile and proximity sensing and methods of use thereof
EP0277421A1 (fr) * 1986-12-05 1988-08-10 The University Of Western Australia Dispositif de capteurs de la capacitance
EP0303563A3 (fr) * 1987-06-11 1990-03-28 C.A. Weidmüller GmbH & Co. Capteur avec dispositif de compensation
GB8718606D0 (en) * 1987-08-06 1987-09-09 Hiltcroft Packaging Systems Lt Monitoring apparatus
CA1332183C (fr) * 1989-06-23 1994-09-27 Richard W. Henderson Reseau de sondage capacitif
EP0425823A1 (fr) * 1989-09-29 1991-05-08 Antivision Systems Corp. Système électrostatique pour former des images
DE4022563A1 (de) * 1990-04-11 1991-10-17 Flachglas Ag Verfahren zur kontaktlosen messung des elektrischen widerstands eines untersuchungsmaterials
GB9021447D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
US5097216A (en) * 1990-10-09 1992-03-17 Agr International, Inc. Apparatus for inspecting the wall thickness of a container and corresponding method
AU8866991A (en) * 1990-11-16 1992-06-11 Moonstone Designs Limited Device for determining the presence and/or characteristics of an object or a substance
GB2279756B (en) * 1990-11-16 1995-06-07 Moonstone Technology Ltd Device for determining the presence and/or characteristics of an object or a substance
FR2690244B1 (fr) * 1992-01-10 1997-03-21 Leteurtre Jean Procede et/ou dispositif de mise en óoeuvre du procede de mesure capacitive susceptible d'effectuer des mesures dimensionnelles sans contact et de tres haute precision en milieu industriel.
DE69315452T2 (de) * 1992-02-10 1998-07-23 Syel Di Franchi A Martolini A Elektronische kapazitive Sensorstangeneinrichtung
US5272443A (en) * 1992-04-22 1993-12-21 Aluminum Company Of America Chatter and profile measuring using capacitor sensors
US5214388A (en) * 1992-05-28 1993-05-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Phase discriminating capacitive array sensor system
FR2705145B1 (fr) * 1993-05-10 1995-08-04 Exa Ingenierie Dispositif de mesure de rectitude.
US5505072A (en) * 1994-11-15 1996-04-09 Tekscan, Inc. Scanning circuit for pressure responsive array
US6144892A (en) * 1996-02-08 2000-11-07 Royal Master Grinders, Inc. Gauging system
US5786698A (en) * 1996-03-07 1998-07-28 Ade Corporation Transducer Bootstrapping apparatus
JP4365908B2 (ja) 1998-09-04 2009-11-18 キヤノン株式会社 面位置検出装置、露光装置およびデバイス製造方法
US6227938B1 (en) 1998-09-08 2001-05-08 Royal Masters Grinders, Inc. Guidewire position locator
US6476621B1 (en) 2001-06-29 2002-11-05 Ade Corporation Self-bootstrapping transducer interface
US6964205B2 (en) * 2003-12-30 2005-11-15 Tekscan Incorporated Sensor with plurality of sensor elements arranged with respect to a substrate
US6993954B1 (en) * 2004-07-27 2006-02-07 Tekscan, Incorporated Sensor equilibration and calibration system and method
WO2017072976A1 (fr) * 2015-10-30 2017-05-04 三菱電機株式会社 Machine à décharge électrique à fil, procédé de commande et procédé de positionnement pour dispositif de commande de machine à décharge électrique en fil
USD800983S1 (en) * 2016-08-26 2017-10-24 Shelita Lee Lottery ticket scratcher

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US3753373A (en) * 1965-10-22 1973-08-21 Bissett Berman Corp Transducer system
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
CH538114A (de) * 1971-05-06 1973-06-15 Bauer Messinstrumente Ag Vorrichtung zur Digitalen, kapazitiven Messung der örtlichen Lage von Trennschichten zwischen mindestens zwei aneinandergrenzenden Medien
US3716782A (en) * 1971-06-03 1973-02-13 J Henry Capacitance gage for measuring small distances
DE2158320B2 (de) * 1971-11-24 1980-04-10 Ferdy Dr. Grenoble Mayer (Frankreich) Vorrichtung zur berührungsfreien relativen Abstandsmessung
US3775679A (en) * 1971-12-09 1973-11-27 Ade Corp Apparatus and method for direct readout of capacitively gauged dimensions
GB1370233A (en) * 1972-01-06 1974-10-16 Goring Kerr Ltd Electrical sorting apparatus
US3984766A (en) * 1974-10-15 1976-10-05 Bactomatic Inc. Digital apparatus for rapidly detecting the growth of and identifying micro-biological organisms
US4160204A (en) * 1974-11-11 1979-07-03 Kaman Sciences Corporation Non-contact distance measurement system
US3986109A (en) * 1975-01-29 1976-10-12 Ade Corporation Self-calibrating dimension gauge
DE2529475C3 (de) * 1975-07-02 1981-10-08 Ewald Max Christian Dipl.-Phys. 6000 Frankfurt Hennig Elektrische Schaltungsanordnung zum zeitabhängigen Messen von physikalischen Größen
US4103226A (en) * 1976-09-15 1978-07-25 Westinghouse Electric Corp. Apparatus for gauging the texture of a conducting surface
US4112355A (en) * 1976-10-22 1978-09-05 Lockheed Corporation Quality and fit measuring apparatus for fasteners and their holes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0091288A1 (fr) * 1982-04-05 1983-10-12 Armco Inc. Sonde sans contact pour mesurer le profil d'une surface d'un banc d'acier en mouvement

Also Published As

Publication number Publication date
EP0004757A1 (fr) 1979-10-17
JPS54133368A (en) 1979-10-17
IT1148230B (it) 1986-11-26
US4190797A (en) 1980-02-26
DE2952825A1 (de) 1980-09-04
IT8086216A0 (it) 1980-03-07
FR2454084B1 (fr) 1983-11-18
GB2041540B (en) 1982-11-17
CA1138113A (fr) 1982-12-21
GB2041540A (en) 1980-09-10

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Legal Events

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