FR2449839B1 - Vanne pour vide pousse - Google Patents
Vanne pour vide pousseInfo
- Publication number
- FR2449839B1 FR2449839B1 FR8004521A FR8004521A FR2449839B1 FR 2449839 B1 FR2449839 B1 FR 2449839B1 FR 8004521 A FR8004521 A FR 8004521A FR 8004521 A FR8004521 A FR 8004521A FR 2449839 B1 FR2449839 B1 FR 2449839B1
- Authority
- FR
- France
- Prior art keywords
- valve
- empty push
- empty
- push
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
- F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH185879A CH636422A5 (de) | 1979-02-26 | 1979-02-26 | Hochvakuumventil. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2449839A1 FR2449839A1 (fr) | 1980-09-19 |
FR2449839B1 true FR2449839B1 (fr) | 1986-07-25 |
Family
ID=4220250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8004521A Expired FR2449839B1 (fr) | 1979-02-26 | 1980-02-29 | Vanne pour vide pousse |
Country Status (6)
Country | Link |
---|---|
US (1) | US4343455A (fr) |
CH (1) | CH636422A5 (fr) |
DE (1) | DE3000848A1 (fr) |
FR (1) | FR2449839B1 (fr) |
GB (1) | GB2043839B (fr) |
NL (1) | NL8000430A (fr) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2947517C2 (de) * | 1979-11-24 | 1982-07-15 | VAT Aktiengesellschaft für Vakuum-Apparate-Technik, Haag | Glanzmetall-Ventilschieber für Hochvakuumanlagen |
FR2517795B1 (fr) * | 1981-12-08 | 1987-01-02 | Europ Agence Spatiale | Source de faisceaux moleculaires gazeux pulses a vanne rapide |
GB2121921B (en) * | 1982-06-15 | 1985-11-27 | Nippon Oxygen Co Ltd | Sluice valve |
GB2240157A (en) * | 1990-01-12 | 1991-07-24 | Colin Badham | Flow control valve for fluid materials |
JPH04125305A (ja) * | 1990-09-13 | 1992-04-24 | Fuji Seiki Kk | 弁の開閉駆動機構 |
GB9118113D0 (en) * | 1991-08-22 | 1991-10-09 | D & C Ltd | Slide valve |
US6079693A (en) * | 1998-05-20 | 2000-06-27 | Applied Komatsu Technology, Inc. | Isolation valves |
US6215897B1 (en) | 1998-05-20 | 2001-04-10 | Applied Komatsu Technology, Inc. | Automated substrate processing system |
US6347918B1 (en) | 1999-01-27 | 2002-02-19 | Applied Materials, Inc. | Inflatable slit/gate valve |
CN100408902C (zh) * | 2003-05-13 | 2008-08-06 | 应用材料股份有限公司 | 密封一处理室一开口的方法与装置 |
US20060102282A1 (en) * | 2004-11-15 | 2006-05-18 | Supercritical Systems, Inc. | Method and apparatus for selectively filtering residue from a processing chamber |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US20060226117A1 (en) * | 2005-03-29 | 2006-10-12 | Bertram Ronald T | Phase change based heating element system and method |
US20060225769A1 (en) * | 2005-03-30 | 2006-10-12 | Gentaro Goshi | Isothermal control of a process chamber |
US7494107B2 (en) * | 2005-03-30 | 2009-02-24 | Supercritical Systems, Inc. | Gate valve for plus-atmospheric pressure semiconductor process vessels |
US7469715B2 (en) * | 2005-07-01 | 2008-12-30 | Applied Materials, Inc. | Chamber isolation valve RF grounding |
JP4979429B2 (ja) * | 2006-03-31 | 2012-07-18 | バット ホールディング アーゲー | 真空バルブ |
US7731151B2 (en) * | 2007-09-27 | 2010-06-08 | Kenneth K L Lee | Pendulum vacuum gate valve |
US20100098518A1 (en) * | 2008-10-20 | 2010-04-22 | Applied Materials, Inc. | In/out door for a vacuum chamber |
US9361620B2 (en) | 2011-10-14 | 2016-06-07 | Leisure Pass Group Limited | Electronic transaction system with entitlement and promotion engines |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1733685A (en) * | 1927-05-03 | 1929-10-29 | Charles B Gamble | Gas valve |
GB366697A (en) * | 1930-01-17 | 1932-02-11 | Fonderie De Cuivre Et D Antifr | Improvements in closures for pressure reservoirs |
US1957807A (en) * | 1931-03-04 | 1934-05-08 | Robinson Orifice Fitting Compa | Orifice meter fitting |
US2372273A (en) * | 1941-11-21 | 1945-03-27 | Honeywell Regulator Co | Fluid pressure motor |
US2556578A (en) * | 1948-11-26 | 1951-06-12 | Dohm & Nelke Inc | Closure mechanism for pressure vessels |
GB854311A (en) * | 1955-11-30 | 1960-11-16 | Glenfield & Kennedy Ltd | Improvements in or relating to sluice valves |
DE1093631B (de) * | 1957-09-17 | 1960-11-24 | Dingler Werke Ag | Absperrschieber mit zwei parallelen Schieberplatten und einer Spreizvorrichtung |
DE1093632B (de) * | 1957-11-04 | 1960-11-24 | Passavant Werke | Absperrschieber mit durch Druckrollen und Keilstuecke an ihren Sitz pressbarer Schieberplatte |
US3524467A (en) * | 1967-10-13 | 1970-08-18 | Exxon Research Engineering Co | Fluid expanded disk valve |
US3554486A (en) * | 1968-11-18 | 1971-01-12 | Eugene A Thebado | High vacuum valve |
US3596874A (en) * | 1969-06-20 | 1971-08-03 | American Smelting Refining | Shutoff dampers |
US3717322A (en) * | 1970-10-27 | 1973-02-20 | Verreries Appliquees | Shutter valves for high-vacuum applications |
US3973753A (en) * | 1974-03-18 | 1976-08-10 | Varian Associates | High vacuum gate valve |
US4044993A (en) * | 1974-03-18 | 1977-08-30 | Varian Associates, Inc. | High vacuum gate valve |
DE2639198C3 (de) * | 1976-08-31 | 1981-11-26 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Absperrschieber |
US4244557A (en) * | 1977-10-07 | 1981-01-13 | Leybold-Heraeus Gmbh | High vacuum seal |
-
1979
- 1979-02-26 CH CH185879A patent/CH636422A5/de not_active IP Right Cessation
-
1980
- 1980-01-11 DE DE19803000848 patent/DE3000848A1/de not_active Withdrawn
- 1980-01-23 NL NL8000430A patent/NL8000430A/nl not_active Application Discontinuation
- 1980-02-15 GB GB8005258A patent/GB2043839B/en not_active Expired
- 1980-02-21 US US06/123,399 patent/US4343455A/en not_active Expired - Lifetime
- 1980-02-29 FR FR8004521A patent/FR2449839B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL8000430A (nl) | 1980-08-28 |
CH636422A5 (de) | 1983-05-31 |
DE3000848A1 (de) | 1980-09-04 |
GB2043839A (en) | 1980-10-08 |
US4343455A (en) | 1982-08-10 |
FR2449839A1 (fr) | 1980-09-19 |
GB2043839B (en) | 1983-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |