FR2446873A1 - DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL - Google Patents
DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIALInfo
- Publication number
- FR2446873A1 FR2446873A1 FR7930855A FR7930855A FR2446873A1 FR 2446873 A1 FR2446873 A1 FR 2446873A1 FR 7930855 A FR7930855 A FR 7930855A FR 7930855 A FR7930855 A FR 7930855A FR 2446873 A1 FR2446873 A1 FR 2446873A1
- Authority
- FR
- France
- Prior art keywords
- crucible
- silicon crystals
- molten material
- vacuum silicon
- growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000013078 crystal Substances 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 2
- 239000012768 molten material Substances 0.000 title abstract 2
- 229910052710 silicon Inorganic materials 0.000 title abstract 2
- 239000010703 silicon Substances 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Silicon Compounds (AREA)
Abstract
L'invention concerne un dispositif et un procédé pour faire croître des cristaux à partir de matériaux fondus. Le dispositif comprend un élément de matière dont la conductibilité calorifique est supérieure à celle de la matière du creuset 10 dans lequel se trouve la substance à traiter, en position intermédiaire entre le sommet d'un échangeur de chaleur 20 placé en relation de conductibilité avec le fond du creuset, et la surface intérieure du fond du creuset, ledit élément formant partie au moins du trajet d'évacuation de la chaleur à partir de la surface intérieure de la partie du fond du creuset jusque vers l'échangeur de chaleur. Application à la croissance des cristaux de silicium.A device and method for growing crystals from molten materials is disclosed. The device comprises an element of material whose heat conductivity is greater than that of the material of the crucible 10 in which the substance to be treated is located, in an intermediate position between the top of a heat exchanger 20 placed in conductive relation with the bottom of the crucible, and the inner surface of the bottom of the crucible, said member forming at least part of the heat removal path from the inner surface of the bottom part of the crucible to the heat exchanger. Application to the growth of silicon crystals.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US446579A | 1979-01-18 | 1979-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2446873A1 true FR2446873A1 (en) | 1980-08-14 |
Family
ID=21710948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7930855A Withdrawn FR2446873A1 (en) | 1979-01-18 | 1979-12-17 | DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL |
Country Status (7)
Country | Link |
---|---|
JP (2) | JPS55100294A (en) |
BE (1) | BE880839A (en) |
DE (1) | DE3001815A1 (en) |
FR (1) | FR2446873A1 (en) |
GB (1) | GB2041236A (en) |
IT (1) | IT1192791B (en) |
NL (1) | NL8000094A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4590043A (en) * | 1982-12-27 | 1986-05-20 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
DE59801335D1 (en) * | 1997-07-16 | 2001-10-04 | Ald Vacuum Techn Ag | METHOD AND DEVICE FOR PRODUCING WORKPIECES OR BLOCKS FROM MELTABLE MATERIALS |
US7344596B2 (en) * | 2005-08-25 | 2008-03-18 | Crystal Systems, Inc. | System and method for crystal growing |
FR2918675B1 (en) * | 2007-07-10 | 2009-08-28 | Commissariat Energie Atomique | DEVICE FOR MANUFACTURING BLOCK OF CRYSTALLINE MATERIAL WITH MODULATION OF THERMAL CONDUCTIVITY. |
US20110180229A1 (en) * | 2010-01-28 | 2011-07-28 | Memc Singapore Pte. Ltd. (Uen200614794D) | Crucible For Use In A Directional Solidification Furnace |
US20120248286A1 (en) | 2011-03-31 | 2012-10-04 | Memc Singapore Pte. Ltd. (Uen200614794D) | Systems For Insulating Directional Solidification Furnaces |
-
1979
- 1979-11-08 GB GB7938785A patent/GB2041236A/en not_active Withdrawn
- 1979-12-12 IT IT69384/79A patent/IT1192791B/en active
- 1979-12-17 FR FR7930855A patent/FR2446873A1/en not_active Withdrawn
- 1979-12-21 BE BE0/198733A patent/BE880839A/en unknown
- 1979-12-24 JP JP16807179A patent/JPS55100294A/en active Pending
-
1980
- 1980-01-08 NL NL8000094A patent/NL8000094A/en not_active Application Discontinuation
- 1980-01-18 DE DE19803001815 patent/DE3001815A1/en not_active Withdrawn
- 1980-04-09 JP JP4669880A patent/JPS569298A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS569298A (en) | 1981-01-30 |
JPS55100294A (en) | 1980-07-31 |
BE880839A (en) | 1980-04-16 |
GB2041236A (en) | 1980-09-10 |
NL8000094A (en) | 1980-07-22 |
IT7969384A0 (en) | 1979-12-12 |
IT1192791B (en) | 1988-05-04 |
DE3001815A1 (en) | 1980-07-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |