FR2446873A1 - DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL - Google Patents

DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL

Info

Publication number
FR2446873A1
FR2446873A1 FR7930855A FR7930855A FR2446873A1 FR 2446873 A1 FR2446873 A1 FR 2446873A1 FR 7930855 A FR7930855 A FR 7930855A FR 7930855 A FR7930855 A FR 7930855A FR 2446873 A1 FR2446873 A1 FR 2446873A1
Authority
FR
France
Prior art keywords
crucible
silicon crystals
molten material
vacuum silicon
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7930855A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CRYSTAL SYSTEMS Inc
Crystal Systems Inc USA
Original Assignee
CRYSTAL SYSTEMS Inc
Crystal Systems Inc USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CRYSTAL SYSTEMS Inc, Crystal Systems Inc USA filed Critical CRYSTAL SYSTEMS Inc
Publication of FR2446873A1 publication Critical patent/FR2446873A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B17/00Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/003Heating or cooling of the melt or the crystallised material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)

Abstract

L'invention concerne un dispositif et un procédé pour faire croître des cristaux à partir de matériaux fondus. Le dispositif comprend un élément de matière dont la conductibilité calorifique est supérieure à celle de la matière du creuset 10 dans lequel se trouve la substance à traiter, en position intermédiaire entre le sommet d'un échangeur de chaleur 20 placé en relation de conductibilité avec le fond du creuset, et la surface intérieure du fond du creuset, ledit élément formant partie au moins du trajet d'évacuation de la chaleur à partir de la surface intérieure de la partie du fond du creuset jusque vers l'échangeur de chaleur. Application à la croissance des cristaux de silicium.A device and method for growing crystals from molten materials is disclosed. The device comprises an element of material whose heat conductivity is greater than that of the material of the crucible 10 in which the substance to be treated is located, in an intermediate position between the top of a heat exchanger 20 placed in conductive relation with the bottom of the crucible, and the inner surface of the bottom of the crucible, said member forming at least part of the heat removal path from the inner surface of the bottom part of the crucible to the heat exchanger. Application to the growth of silicon crystals.

FR7930855A 1979-01-18 1979-12-17 DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL Withdrawn FR2446873A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US446579A 1979-01-18 1979-01-18

Publications (1)

Publication Number Publication Date
FR2446873A1 true FR2446873A1 (en) 1980-08-14

Family

ID=21710948

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7930855A Withdrawn FR2446873A1 (en) 1979-01-18 1979-12-17 DEVICE AND METHOD FOR GROWING VACUUM SILICON CRYSTALS FROM MOLTEN MATERIAL

Country Status (7)

Country Link
JP (2) JPS55100294A (en)
BE (1) BE880839A (en)
DE (1) DE3001815A1 (en)
FR (1) FR2446873A1 (en)
GB (1) GB2041236A (en)
IT (1) IT1192791B (en)
NL (1) NL8000094A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590043A (en) * 1982-12-27 1986-05-20 Sri International Apparatus for obtaining silicon from fluosilicic acid
DE59801335D1 (en) * 1997-07-16 2001-10-04 Ald Vacuum Techn Ag METHOD AND DEVICE FOR PRODUCING WORKPIECES OR BLOCKS FROM MELTABLE MATERIALS
US7344596B2 (en) * 2005-08-25 2008-03-18 Crystal Systems, Inc. System and method for crystal growing
FR2918675B1 (en) * 2007-07-10 2009-08-28 Commissariat Energie Atomique DEVICE FOR MANUFACTURING BLOCK OF CRYSTALLINE MATERIAL WITH MODULATION OF THERMAL CONDUCTIVITY.
US20110180229A1 (en) * 2010-01-28 2011-07-28 Memc Singapore Pte. Ltd. (Uen200614794D) Crucible For Use In A Directional Solidification Furnace
US20120248286A1 (en) 2011-03-31 2012-10-04 Memc Singapore Pte. Ltd. (Uen200614794D) Systems For Insulating Directional Solidification Furnaces

Also Published As

Publication number Publication date
JPS569298A (en) 1981-01-30
JPS55100294A (en) 1980-07-31
BE880839A (en) 1980-04-16
GB2041236A (en) 1980-09-10
NL8000094A (en) 1980-07-22
IT7969384A0 (en) 1979-12-12
IT1192791B (en) 1988-05-04
DE3001815A1 (en) 1980-07-31

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Legal Events

Date Code Title Description
ST Notification of lapse