FR2446471B1 - - Google Patents
Info
- Publication number
- FR2446471B1 FR2446471B1 FR8000515A FR8000515A FR2446471B1 FR 2446471 B1 FR2446471 B1 FR 2446471B1 FR 8000515 A FR8000515 A FR 8000515A FR 8000515 A FR8000515 A FR 8000515A FR 2446471 B1 FR2446471 B1 FR 2446471B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/145—Housings with stress relieving means
- G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Child & Adolescent Psychology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP94579A JPS5595373A (en) | 1979-01-11 | 1979-01-11 | Semiconductor pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2446471A1 FR2446471A1 (fr) | 1980-08-08 |
| FR2446471B1 true FR2446471B1 (US20030157376A1-20030821-M00001.png) | 1983-02-25 |
Family
ID=11487804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8000515A Granted FR2446471A1 (fr) | 1979-01-11 | 1980-01-10 | Capteur de pression |
Country Status (5)
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57197872A (en) * | 1981-05-29 | 1982-12-04 | Toshiba Corp | Semiconductor pressure detecting element |
| JPS59124173A (ja) * | 1982-12-28 | 1984-07-18 | Toshiba Corp | 半導体式圧力センサ |
| JPS6193961A (ja) * | 1984-08-08 | 1986-05-12 | テキサス インスツルメンツ ドイチエランド ゲゼルシヤフト ミツト ベシユレンクテル ハフツンク | 力の作用に応答するセンサ |
| JPH064308Y2 (ja) * | 1985-07-10 | 1994-02-02 | サンクス株式会社 | 半導体圧力センサ |
| GB2276976B (en) * | 1993-04-07 | 1996-10-23 | British Aerospace | Method of manufacturing a motion sensor |
| US6148673A (en) * | 1994-10-07 | 2000-11-21 | Motorola, Inc. | Differential pressure sensor and method thereof |
| WO1996022515A1 (en) * | 1995-01-19 | 1996-07-25 | Honeywell Inc. | Apparatus for detection of a diaphragm rupture in a pressure sensor |
| US6150917A (en) * | 1995-02-27 | 2000-11-21 | Motorola, Inc. | Piezoresistive sensor bridge having overlapping diffused regions to accommodate mask misalignment and method |
| US5812047A (en) * | 1997-02-18 | 1998-09-22 | Exar Corporation | Offset-free resistor geometry for use in piezo-resistive pressure sensor |
| JP2000162069A (ja) * | 1998-11-26 | 2000-06-16 | Mitsubishi Electric Corp | 半導体圧力センサ |
| US6629448B1 (en) | 2000-02-25 | 2003-10-07 | Seagate Technology Llc | In-situ testing of a MEMS accelerometer in a disc storage system |
| JP4697004B2 (ja) | 2006-03-29 | 2011-06-08 | 株式会社日立製作所 | 力学量測定装置 |
| ATE503108T1 (de) * | 2007-12-10 | 2011-04-15 | Delphi Technologies Holding | Strahldüse zur dämpfung mittels bohrung |
| DE102012202035B4 (de) | 2012-02-10 | 2014-05-28 | Robert Bosch Gmbh | Mikromechanisches Bauelement mit einer Membran |
| JP2015108581A (ja) * | 2013-12-05 | 2015-06-11 | 株式会社デンソー | 圧力センサ |
| DE102015112408A1 (de) * | 2015-07-29 | 2017-02-02 | Endress + Hauser Gmbh + Co. Kg | Drucksensor und Verfahren zum Überwachen eines Drucksensors |
| DE102015121859A1 (de) * | 2015-12-15 | 2017-06-22 | Endress+Hauser Gmbh+Co. Kg | Drucksensor und Verfahren zum Bedienen eines Drucksensors |
| DE102017208048B3 (de) | 2017-05-12 | 2018-09-27 | Robert Bosch Gmbh | Mikromechanischer Drucksensor |
| JP2022139616A (ja) * | 2021-03-12 | 2022-09-26 | Tdk株式会社 | 圧力センサおよびセンサシステム |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3289134A (en) * | 1964-04-24 | 1966-11-29 | Blh Electronics | Gaged diaphragm pressure transducer |
| GB1248087A (en) * | 1969-02-28 | 1971-09-29 | Ferranti Ltd | Improvements relating to pressure gauges |
| GB1406891A (en) * | 1972-12-15 | 1975-09-17 | Mather & Platt Ltd | Detectors |
| NL7415668A (nl) * | 1974-12-02 | 1976-06-04 | Philips Nv | Drukopnemer. |
| GB1540716A (en) * | 1975-03-18 | 1979-02-14 | Bell & Howell Ltd | Pressure or force transducers |
| US4023562A (en) * | 1975-09-02 | 1977-05-17 | Case Western Reserve University | Miniature pressure transducer for medical use and assembly method |
| US4085620A (en) * | 1975-09-30 | 1978-04-25 | Tokyo Shibaura Electric Co., Ltd. | Pressure-electric transducers |
| US4137516A (en) * | 1977-10-31 | 1979-01-30 | Carnegie-Mellon University | Grinding wheel crack detector |
| US4106349A (en) * | 1977-11-03 | 1978-08-15 | Kulite Semiconductor Products, Inc. | Transducer structures for high pressure application |
| US4129042A (en) * | 1977-11-18 | 1978-12-12 | Signetics Corporation | Semiconductor transducer packaged assembly |
-
1979
- 1979-01-11 JP JP94579A patent/JPS5595373A/ja active Granted
- 1979-12-19 GB GB7943665A patent/GB2039414B/en not_active Expired
-
1980
- 1980-01-04 US US06/109,476 patent/US4315236A/en not_active Expired - Lifetime
- 1980-01-07 DE DE3000364A patent/DE3000364C2/de not_active Expired
- 1980-01-10 FR FR8000515A patent/FR2446471A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6153873B2 (US20030157376A1-20030821-M00001.png) | 1986-11-19 |
| FR2446471A1 (fr) | 1980-08-08 |
| DE3000364A1 (de) | 1980-07-17 |
| DE3000364C2 (de) | 1984-01-12 |
| GB2039414A (en) | 1980-08-06 |
| GB2039414B (en) | 1983-05-05 |
| US4315236A (en) | 1982-02-09 |
| JPS5595373A (en) | 1980-07-19 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |