FR2438911A1 - Procede et dispositif de reglage du courant de chauffage de la cathode d'un appareil industriel a faisceau d'electrons - Google Patents

Procede et dispositif de reglage du courant de chauffage de la cathode d'un appareil industriel a faisceau d'electrons

Info

Publication number
FR2438911A1
FR2438911A1 FR7925109A FR7925109A FR2438911A1 FR 2438911 A1 FR2438911 A1 FR 2438911A1 FR 7925109 A FR7925109 A FR 7925109A FR 7925109 A FR7925109 A FR 7925109A FR 2438911 A1 FR2438911 A1 FR 2438911A1
Authority
FR
France
Prior art keywords
cathode
heating current
adjusting
electron beam
beam apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7925109A
Other languages
English (en)
Other versions
FR2438911B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steigerwald Strahltecknik GmbH
Original Assignee
Steigerwald Strahltecknik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steigerwald Strahltecknik GmbH filed Critical Steigerwald Strahltecknik GmbH
Publication of FR2438911A1 publication Critical patent/FR2438911A1/fr
Application granted granted Critical
Publication of FR2438911B1 publication Critical patent/FR2438911B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PROCEDE ET DISPOSITIF DE REGLAGE DU COURANT DE CHAUFFAGE DE LA CATHODE D'UN CANON ELECTRONIQUE D'APPAREIL INDUSTRIEL A FAISCEAU D'ELECTRONS, DONT LE COURANT DE FAISCEAU EST STABILISE PAR COMMANDE DE LA TENSION DE MODULATION. LE REGLAGE DU COURANT DE CHAUFFAGE DE LA CATHODE S'EFFECTUE A PARTIR DE LA VARIATION DE LA TENSION DE MODULATION U EN FONCTION DU COURANT DE CHAUFFAGE I, A COURANT DE FAISCEAU STATILISE.
FR7925109A 1978-10-10 1979-10-09 Procede et dispositif de reglage du courant de chauffage de la cathode d'un appareil industriel a faisceau d'electrons Granted FR2438911A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2844183A DE2844183C2 (de) 1978-10-10 1978-10-10 Verfahren und Einrichtung zum Einstellen des Kathodenheizstromes in einem technischen Elektronenstrahl-Gerät

Publications (2)

Publication Number Publication Date
FR2438911A1 true FR2438911A1 (fr) 1980-05-09
FR2438911B1 FR2438911B1 (fr) 1984-01-06

Family

ID=6051869

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7925109A Granted FR2438911A1 (fr) 1978-10-10 1979-10-09 Procede et dispositif de reglage du courant de chauffage de la cathode d'un appareil industriel a faisceau d'electrons

Country Status (5)

Country Link
US (1) US4317983A (fr)
JP (1) JPS5557387A (fr)
DE (1) DE2844183C2 (fr)
FR (1) FR2438911A1 (fr)
GB (1) GB2034924B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490442A1 (fr) * 1979-12-26 1982-03-19 Razin Gennady Dispositif de stabilisation d'un courant de faisceau electronique dans un tube accelerateur a cathode chaude

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596024B2 (ja) * 1981-06-17 1984-02-08 株式会社東芝 イオン源用電源装置
JPS6175227A (ja) * 1984-09-20 1986-04-17 Nippon Kokan Kk <Nkk> 移動物体の温度測定装置
CA2065581C (fr) 1991-04-22 2002-03-12 Andal Corp. Methode de deposition physique en phase vapeur activee par plasma, et appareil connexe
US6031334A (en) * 1998-06-17 2000-02-29 Primex Technologies, Inc. Method and apparatus for selectively distributing power in a thruster system
US6781300B1 (en) 1999-08-06 2004-08-24 Ralf Klaus Edinger Laser based electron beam gun
US8546717B2 (en) 2009-09-17 2013-10-01 Sciaky, Inc. Electron beam layer manufacturing
AU2011233678B2 (en) 2010-03-31 2015-01-22 Sciaky, Inc. Raster methodology, apparatus and system for electron beam layer manufacturing using closed loop control
DE102015207484B4 (de) 2015-04-23 2022-11-03 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
US10916399B1 (en) * 2019-09-09 2021-02-09 City University Of Hong Kong Electron gun and apparatus incorporating the same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3413517A (en) * 1967-01-13 1968-11-26 Ibm Filament current control by a superposed dithering voltage
DE2100506C3 (de) * 1970-01-09 1974-02-07 Hitachi, Ltd., Tokio Ionenquelle insbesondere für Ionen-Mikroanalysatoren
US3760279A (en) * 1971-09-16 1973-09-18 United States Steel Corp Beam current limiting circuit
DE2153695C3 (de) * 1971-10-28 1974-05-22 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Verfahren und Einrichtung zur Regelung des Strahlstroms in technischen Ladungsträgerstrahlgeräten, insb. Elektronenstrahl-Materialbearbeitungsmaschinen
US3838313A (en) * 1973-05-21 1974-09-24 United Aircraft Corp Beam current regulator for electron beam machines
FR2289956A1 (fr) * 1974-10-29 1976-05-28 Steigerwald Strahltech Dispositif de regulation du courant de faisceau dans un appareil a faisceau de porteurs de charge industriel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490442A1 (fr) * 1979-12-26 1982-03-19 Razin Gennady Dispositif de stabilisation d'un courant de faisceau electronique dans un tube accelerateur a cathode chaude

Also Published As

Publication number Publication date
DE2844183C2 (de) 1984-09-13
US4317983A (en) 1982-03-02
FR2438911B1 (fr) 1984-01-06
JPS5557387A (en) 1980-04-28
DE2844183A1 (de) 1980-04-24
GB2034924A (en) 1980-06-11
GB2034924B (en) 1982-11-24

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Legal Events

Date Code Title Description
ST Notification of lapse