FR2437271A1 - Dispositif pour detourer les tranches de silicium - Google Patents
Dispositif pour detourer les tranches de siliciumInfo
- Publication number
- FR2437271A1 FR2437271A1 FR7827726A FR7827726A FR2437271A1 FR 2437271 A1 FR2437271 A1 FR 2437271A1 FR 7827726 A FR7827726 A FR 7827726A FR 7827726 A FR7827726 A FR 7827726A FR 2437271 A1 FR2437271 A1 FR 2437271A1
- Authority
- FR
- France
- Prior art keywords
- suction cups
- grinding wheels
- rocker arms
- centring
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
DISPOSITIF POUR DETOURER LES TRANCHES DE SILICIUM ASSOCIE A DES MOYENS POUR LAVER, SECHER ET STOCKER LESDITES TRANCHES, CARACTERISE PAR LE FAIT QUE LES TRANCHES SONT ALIGNEES EN POSITION VERTICALE DANS UN PANIER D'OU ELLES SONT EXTRAITES, DANS UN PREMIER TEMPS AU MOYEN D'UNE PLURALITE DE BRAS SE DEPLACANT EN TRANSLATION VERTICALE ET POURVUS DE VENTOUSES, PUIS REPRISES, DANS UN DEUXIEME TEMPS PAR DES BRAS OSCILLANTS POURVUS DE VENTOUSES TOURNANTES POUR LES AMENER AU CONTACT DE MEULES DE PROFIL, LESDITES MEULES ENTRAINEES EN ROTATION PAR UN MOTEUR ET DES COURROIES, ETANT MONTEES SUR DES AXES DE TELLE SORTE QU'ELLES AIENT UN JEU AXIAL SUFFISANT POUR S'AUTOCENTRER SUR LA PIECE A USINER.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7827726A FR2437271A1 (fr) | 1978-09-26 | 1978-09-26 | Dispositif pour detourer les tranches de silicium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7827726A FR2437271A1 (fr) | 1978-09-26 | 1978-09-26 | Dispositif pour detourer les tranches de silicium |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2437271A1 true FR2437271A1 (fr) | 1980-04-25 |
FR2437271B1 FR2437271B1 (fr) | 1982-11-19 |
Family
ID=9213113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7827726A Granted FR2437271A1 (fr) | 1978-09-26 | 1978-09-26 | Dispositif pour detourer les tranches de silicium |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2437271A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0222521A2 (fr) * | 1985-11-04 | 1987-05-20 | Silicon Technology Corporation | Meuleuse de bords automatique |
EP0264679A1 (fr) * | 1986-10-13 | 1988-04-27 | BBC Brown Boveri AG | Procédé pour appliquer un contour de bord biseauté sur un disque semi-conducteur |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2021198A (en) * | 1935-02-23 | 1935-11-19 | Pittsburgh Plate Glass Co | Machine for edging glass sheets |
US3023548A (en) * | 1960-10-06 | 1962-03-06 | Sun Tool And Machine Company | Automatic contour edge grinder |
FR2246354A1 (fr) * | 1973-10-04 | 1975-05-02 | Sack Glastech | |
US3913272A (en) * | 1973-06-08 | 1975-10-21 | Ford Motor Co | Trim separation |
US4031667A (en) * | 1976-03-29 | 1977-06-28 | Macronetics, Inc. | Apparatus for contouring edge of semiconductor wafers |
-
1978
- 1978-09-26 FR FR7827726A patent/FR2437271A1/fr active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2021198A (en) * | 1935-02-23 | 1935-11-19 | Pittsburgh Plate Glass Co | Machine for edging glass sheets |
US3023548A (en) * | 1960-10-06 | 1962-03-06 | Sun Tool And Machine Company | Automatic contour edge grinder |
US3913272A (en) * | 1973-06-08 | 1975-10-21 | Ford Motor Co | Trim separation |
FR2246354A1 (fr) * | 1973-10-04 | 1975-05-02 | Sack Glastech | |
US4031667A (en) * | 1976-03-29 | 1977-06-28 | Macronetics, Inc. | Apparatus for contouring edge of semiconductor wafers |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0222521A2 (fr) * | 1985-11-04 | 1987-05-20 | Silicon Technology Corporation | Meuleuse de bords automatique |
EP0222521A3 (en) * | 1985-11-04 | 1989-03-01 | Silicon Technology Corporation | An automatic edge grinder |
EP0264679A1 (fr) * | 1986-10-13 | 1988-04-27 | BBC Brown Boveri AG | Procédé pour appliquer un contour de bord biseauté sur un disque semi-conducteur |
US4793102A (en) * | 1986-10-13 | 1988-12-27 | Bbc Brown Boveri Ag | Method of producing a beveled peripheral profile on a semiconductor disc |
CH671116A5 (fr) * | 1986-10-13 | 1989-07-31 | Bbc Brown Boveri & Cie |
Also Published As
Publication number | Publication date |
---|---|
FR2437271B1 (fr) | 1982-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |