FR2437271A1 - Dispositif pour detourer les tranches de silicium - Google Patents

Dispositif pour detourer les tranches de silicium

Info

Publication number
FR2437271A1
FR2437271A1 FR7827726A FR7827726A FR2437271A1 FR 2437271 A1 FR2437271 A1 FR 2437271A1 FR 7827726 A FR7827726 A FR 7827726A FR 7827726 A FR7827726 A FR 7827726A FR 2437271 A1 FR2437271 A1 FR 2437271A1
Authority
FR
France
Prior art keywords
suction cups
grinding wheels
rocker arms
centring
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7827726A
Other languages
English (en)
Other versions
FR2437271B1 (fr
Inventor
Claude Tremeau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Crouzet SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crouzet SA filed Critical Crouzet SA
Priority to FR7827726A priority Critical patent/FR2437271A1/fr
Publication of FR2437271A1 publication Critical patent/FR2437271A1/fr
Application granted granted Critical
Publication of FR2437271B1 publication Critical patent/FR2437271B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

DISPOSITIF POUR DETOURER LES TRANCHES DE SILICIUM ASSOCIE A DES MOYENS POUR LAVER, SECHER ET STOCKER LESDITES TRANCHES, CARACTERISE PAR LE FAIT QUE LES TRANCHES SONT ALIGNEES EN POSITION VERTICALE DANS UN PANIER D'OU ELLES SONT EXTRAITES, DANS UN PREMIER TEMPS AU MOYEN D'UNE PLURALITE DE BRAS SE DEPLACANT EN TRANSLATION VERTICALE ET POURVUS DE VENTOUSES, PUIS REPRISES, DANS UN DEUXIEME TEMPS PAR DES BRAS OSCILLANTS POURVUS DE VENTOUSES TOURNANTES POUR LES AMENER AU CONTACT DE MEULES DE PROFIL, LESDITES MEULES ENTRAINEES EN ROTATION PAR UN MOTEUR ET DES COURROIES, ETANT MONTEES SUR DES AXES DE TELLE SORTE QU'ELLES AIENT UN JEU AXIAL SUFFISANT POUR S'AUTOCENTRER SUR LA PIECE A USINER.
FR7827726A 1978-09-26 1978-09-26 Dispositif pour detourer les tranches de silicium Granted FR2437271A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7827726A FR2437271A1 (fr) 1978-09-26 1978-09-26 Dispositif pour detourer les tranches de silicium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7827726A FR2437271A1 (fr) 1978-09-26 1978-09-26 Dispositif pour detourer les tranches de silicium

Publications (2)

Publication Number Publication Date
FR2437271A1 true FR2437271A1 (fr) 1980-04-25
FR2437271B1 FR2437271B1 (fr) 1982-11-19

Family

ID=9213113

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7827726A Granted FR2437271A1 (fr) 1978-09-26 1978-09-26 Dispositif pour detourer les tranches de silicium

Country Status (1)

Country Link
FR (1) FR2437271A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0222521A2 (fr) * 1985-11-04 1987-05-20 Silicon Technology Corporation Meuleuse de bords automatique
EP0264679A1 (fr) * 1986-10-13 1988-04-27 BBC Brown Boveri AG Procédé pour appliquer un contour de bord biseauté sur un disque semi-conducteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2021198A (en) * 1935-02-23 1935-11-19 Pittsburgh Plate Glass Co Machine for edging glass sheets
US3023548A (en) * 1960-10-06 1962-03-06 Sun Tool And Machine Company Automatic contour edge grinder
FR2246354A1 (fr) * 1973-10-04 1975-05-02 Sack Glastech
US3913272A (en) * 1973-06-08 1975-10-21 Ford Motor Co Trim separation
US4031667A (en) * 1976-03-29 1977-06-28 Macronetics, Inc. Apparatus for contouring edge of semiconductor wafers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2021198A (en) * 1935-02-23 1935-11-19 Pittsburgh Plate Glass Co Machine for edging glass sheets
US3023548A (en) * 1960-10-06 1962-03-06 Sun Tool And Machine Company Automatic contour edge grinder
US3913272A (en) * 1973-06-08 1975-10-21 Ford Motor Co Trim separation
FR2246354A1 (fr) * 1973-10-04 1975-05-02 Sack Glastech
US4031667A (en) * 1976-03-29 1977-06-28 Macronetics, Inc. Apparatus for contouring edge of semiconductor wafers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0222521A2 (fr) * 1985-11-04 1987-05-20 Silicon Technology Corporation Meuleuse de bords automatique
EP0222521A3 (en) * 1985-11-04 1989-03-01 Silicon Technology Corporation An automatic edge grinder
EP0264679A1 (fr) * 1986-10-13 1988-04-27 BBC Brown Boveri AG Procédé pour appliquer un contour de bord biseauté sur un disque semi-conducteur
US4793102A (en) * 1986-10-13 1988-12-27 Bbc Brown Boveri Ag Method of producing a beveled peripheral profile on a semiconductor disc
CH671116A5 (fr) * 1986-10-13 1989-07-31 Bbc Brown Boveri & Cie

Also Published As

Publication number Publication date
FR2437271B1 (fr) 1982-11-19

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Legal Events

Date Code Title Description
ST Notification of lapse