FR2398385A1 - Procede de conversion d'un materiau dielectrique en materiau conducteur de l'electricite, et son application a l'obtention d'une famille de semi-conducteurs - Google Patents
Procede de conversion d'un materiau dielectrique en materiau conducteur de l'electricite, et son application a l'obtention d'une famille de semi-conducteursInfo
- Publication number
- FR2398385A1 FR2398385A1 FR7722564A FR7722564A FR2398385A1 FR 2398385 A1 FR2398385 A1 FR 2398385A1 FR 7722564 A FR7722564 A FR 7722564A FR 7722564 A FR7722564 A FR 7722564A FR 2398385 A1 FR2398385 A1 FR 2398385A1
- Authority
- FR
- France
- Prior art keywords
- esp
- plasma
- created
- electromagnetic field
- alternating electromagnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/50—Processes
- C25B1/55—Photoelectrolysis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
- H01C17/26—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material
- H01C17/265—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by converting resistive material by chemical or thermal treatment, e.g. oxydation, reduction, annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/336—Changing physical properties of treated surfaces
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
L'invention a pour but d'éviter les dégradations causées par les hautes températures, au cours de la fabrication de semi-conducteurs à partir d'oxydes de métaux de transition. Dans le procédé selon l'invention, on crée un plasma protonique dans une enceinte où se trouve le matériau à traiter Ti O2 , Li Nb O3 , Li Ta O3 , Sr TiO3 , etc.). A cet effet, on ionise de l'hydrogène à basse pression (0,2 Torr) par création d'un champ électromagnétique alternatif de haute fréquence, et on chauffe le matériau à 400 degrés C par rayonnement infrarouge à travers les parois de verre de l'enceinte. Application à la fabrication d'électrodes semi-conductrices pour la photoélectrolyse de l'eau.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7722564A FR2398385A1 (fr) | 1977-07-22 | 1977-07-22 | Procede de conversion d'un materiau dielectrique en materiau conducteur de l'electricite, et son application a l'obtention d'une famille de semi-conducteurs |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7722564A FR2398385A1 (fr) | 1977-07-22 | 1977-07-22 | Procede de conversion d'un materiau dielectrique en materiau conducteur de l'electricite, et son application a l'obtention d'une famille de semi-conducteurs |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2398385A1 true FR2398385A1 (fr) | 1979-02-16 |
Family
ID=9193684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7722564A Withdrawn FR2398385A1 (fr) | 1977-07-22 | 1977-07-22 | Procede de conversion d'un materiau dielectrique en materiau conducteur de l'electricite, et son application a l'obtention d'une famille de semi-conducteurs |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2398385A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0799557A1 (fr) * | 1994-12-22 | 1997-10-08 | Research Triangle Institute | Procede et appareil pour produire un plasma, par induction haute frequence |
GB2342775A (en) * | 1998-07-06 | 2000-04-19 | United Microelectronics Corp | Method of fabricating a local interconnect |
-
1977
- 1977-07-22 FR FR7722564A patent/FR2398385A1/fr not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0799557A1 (fr) * | 1994-12-22 | 1997-10-08 | Research Triangle Institute | Procede et appareil pour produire un plasma, par induction haute frequence |
EP0799557A4 (fr) * | 1994-12-22 | 1997-12-10 | Res Triangle Inst | Procede et appareil pour produire un plasma, par induction haute frequence |
GB2342775A (en) * | 1998-07-06 | 2000-04-19 | United Microelectronics Corp | Method of fabricating a local interconnect |
GB2342775B (en) * | 1998-07-06 | 2000-12-27 | United Microelectronics Corp | Method fabricating local interconnect |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |