FR2378872B1 - - Google Patents

Info

Publication number
FR2378872B1
FR2378872B1 FR7801889A FR7801889A FR2378872B1 FR 2378872 B1 FR2378872 B1 FR 2378872B1 FR 7801889 A FR7801889 A FR 7801889A FR 7801889 A FR7801889 A FR 7801889A FR 2378872 B1 FR2378872 B1 FR 2378872B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7801889A
Other versions
FR2378872A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2378872A1 publication Critical patent/FR2378872A1/fr
Application granted granted Critical
Publication of FR2378872B1 publication Critical patent/FR2378872B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • ing And Chemical Polishing (AREA)
  • Compounds Of Iron (AREA)
  • Soft Magnetic Materials (AREA)
  • Glass Compositions (AREA)
FR7801889A 1977-01-27 1978-01-24 Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises Granted FR2378872A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7700808A NL7700808A (nl) 1977-01-27 1977-01-27 Werkwijze voor de vervaardiging van ijzer- oxidefotomaskers en ijzeroxidemaskers verkre- gen volgens deze werkwijze.

Publications (2)

Publication Number Publication Date
FR2378872A1 FR2378872A1 (fr) 1978-08-25
FR2378872B1 true FR2378872B1 (fr) 1983-11-18

Family

ID=19827853

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7801889A Granted FR2378872A1 (fr) 1977-01-27 1978-01-24 Procede pour la realisation de photomasques d'oxyde de fer et masques ainsi realises

Country Status (7)

Country Link
US (1) US4199621A (fr)
JP (1) JPS596056B2 (fr)
CA (1) CA1110507A (fr)
DE (1) DE2802814C2 (fr)
FR (1) FR2378872A1 (fr)
GB (1) GB1592017A (fr)
NL (1) NL7700808A (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1268753A (en) * 1968-05-20 1972-03-29 United Glass Ltd Containers resistant to ultra-violet light
GB1307216A (en) * 1969-04-23 1973-02-14 Pilkington Brothers Ltd Treating glass
US3824100A (en) * 1970-06-29 1974-07-16 Corning Glass Works Transparent iron oxide microcircuit mask
FR2110622A5 (fr) * 1970-10-23 1972-06-02 Commissariat Energie Atomique
IT996924B (it) * 1972-12-21 1975-12-10 Glaverbel Procedimento per formare uno strato di ossido metallico

Also Published As

Publication number Publication date
DE2802814A1 (de) 1978-08-03
JPS596056B2 (ja) 1984-02-08
CA1110507A (fr) 1981-10-13
FR2378872A1 (fr) 1978-08-25
GB1592017A (en) 1981-07-01
NL7700808A (nl) 1978-07-31
JPS5394185A (en) 1978-08-17
US4199621A (en) 1980-04-22
DE2802814C2 (de) 1984-10-25

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Legal Events

Date Code Title Description
ST Notification of lapse