FR2363882A1 - Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants - Google Patents

Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants

Info

Publication number
FR2363882A1
FR2363882A1 FR7626376A FR7626376A FR2363882A1 FR 2363882 A1 FR2363882 A1 FR 2363882A1 FR 7626376 A FR7626376 A FR 7626376A FR 7626376 A FR7626376 A FR 7626376A FR 2363882 A1 FR2363882 A1 FR 2363882A1
Authority
FR
France
Prior art keywords
electron gun
gun
insulators
examination
ions produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7626376A
Other languages
English (en)
French (fr)
Other versions
FR2363882B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Bruno Blanchard
Patrick Carrier
Jean-Louis Marguerite
Jean-Claude Rocco
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7626376A priority Critical patent/FR2363882A1/fr
Publication of FR2363882A1 publication Critical patent/FR2363882A1/fr
Application granted granted Critical
Publication of FR2363882B1 publication Critical patent/FR2363882B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7626376A 1976-09-01 1976-09-01 Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants Granted FR2363882A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7626376A FR2363882A1 (fr) 1976-09-01 1976-09-01 Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7626376A FR2363882A1 (fr) 1976-09-01 1976-09-01 Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants

Publications (2)

Publication Number Publication Date
FR2363882A1 true FR2363882A1 (fr) 1978-03-31
FR2363882B1 FR2363882B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-02

Family

ID=9177307

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7626376A Granted FR2363882A1 (fr) 1976-09-01 1976-09-01 Analyseur ionique a emission secondaire muni d'un canon a electrons pour l'analyse des isolants

Country Status (1)

Country Link
FR (1) FR2363882A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0150326A3 (de) * 1984-01-31 1985-08-28 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Kompensation von Aufladungen bei der Sekundärionen-Massenspektrometrie (SIMS) elektrisch schlecht leitender Proben
EP0200333A3 (en) * 1985-04-24 1987-09-02 Micrion Limited Partnership Ion beam processing method and apparatus
EP0243060A3 (en) * 1986-04-22 1988-07-20 Kratos Analytical Limited A charged particle energy analyser
EP0278736A3 (en) * 1987-02-10 1989-11-29 FISONS plc Secondary ion mass spectrometer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (fr) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Microanalyseur par émission ionique secondaire

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1349302A (fr) * 1962-11-28 1964-01-17 Centre Nat Rech Scient Microanalyseur par émission ionique secondaire

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0150326A3 (de) * 1984-01-31 1985-08-28 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Kompensation von Aufladungen bei der Sekundärionen-Massenspektrometrie (SIMS) elektrisch schlecht leitender Proben
EP0200333A3 (en) * 1985-04-24 1987-09-02 Micrion Limited Partnership Ion beam processing method and apparatus
EP0243060A3 (en) * 1986-04-22 1988-07-20 Kratos Analytical Limited A charged particle energy analyser
EP0278736A3 (en) * 1987-02-10 1989-11-29 FISONS plc Secondary ion mass spectrometer

Also Published As

Publication number Publication date
FR2363882B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-02

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Legal Events

Date Code Title Description
ST Notification of lapse