FR2360533A1 - Procede pour reduire la permeabilite aux gaz de nitrure de silicium obtenu par frittage reactionnel - Google Patents

Procede pour reduire la permeabilite aux gaz de nitrure de silicium obtenu par frittage reactionnel

Info

Publication number
FR2360533A1
FR2360533A1 FR7722926A FR7722926A FR2360533A1 FR 2360533 A1 FR2360533 A1 FR 2360533A1 FR 7722926 A FR7722926 A FR 7722926A FR 7722926 A FR7722926 A FR 7722926A FR 2360533 A1 FR2360533 A1 FR 2360533A1
Authority
FR
France
Prior art keywords
silicon nitride
reducing
sintering
permeability
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7722926A
Other languages
English (en)
Other versions
FR2360533B3 (fr
Inventor
Godehard Sussmuth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosenthal AG
Original Assignee
Rosenthal AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosenthal AG filed Critical Rosenthal AG
Publication of FR2360533A1 publication Critical patent/FR2360533A1/fr
Application granted granted Critical
Publication of FR2360533B3 publication Critical patent/FR2360533B3/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
    • B01D39/2068—Other inorganic materials, e.g. ceramics
    • B01D39/2072—Other inorganic materials, e.g. ceramics the material being particulate or granular
    • B01D39/2075—Other inorganic materials, e.g. ceramics the material being particulate or granular sintered or bonded by inorganic agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B13/00—Diaphragms; Spacing elements
    • C25B13/04—Diaphragms; Spacing elements characterised by the material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0464—Impregnants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04—Additives and treatments of the filtering material
    • B01D2239/0471—Surface coating material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/10—Filtering material manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/12—Special parameters characterising the filtering material
    • B01D2239/1208—Porosity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Structural Engineering (AREA)
  • Geology (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Ceramic Products (AREA)

Abstract

Procédé permettant de réduire la perméabilité aux gaz de nitrure de silicium obtenu par frittage réactionnel. Une pièce en nitrure de silicium poreux obtenue par frittage réactionnel est imprégnée d'un halogénure de silicium, de préférence de SiCl4 ou de SiBr4 , puis de l'imide de silicium est amené à précipiter dans les pores par un traitement avec de l'ammoniac et l'imide de silicium est ensuite transformé en nitrure de silicium par cuisson en atmosphère d'azote. Le procédé est applicable, par exemple, à des éléments constitutifs de récupérateurs et de conduits véhiculant des gaz chaud ainsi que dans la construction d'installations à turbines.
FR7722926A 1976-08-05 1977-07-26 Procede pour reduire la permeabilite aux gaz de nitrure de silicium obtenu par frittage reactionnel Granted FR2360533A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2635167A DE2635167C2 (de) 1976-08-05 1976-08-05 Verfahren zur Verminderung der Gasdurchlässigkeit von porösen Körpern aus reaktionsgesintertem Siliziumnitrid

Publications (2)

Publication Number Publication Date
FR2360533A1 true FR2360533A1 (fr) 1978-03-03
FR2360533B3 FR2360533B3 (fr) 1980-07-11

Family

ID=5984755

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7722926A Granted FR2360533A1 (fr) 1976-08-05 1977-07-26 Procede pour reduire la permeabilite aux gaz de nitrure de silicium obtenu par frittage reactionnel

Country Status (3)

Country Link
DE (1) DE2635167C2 (fr)
FR (1) FR2360533A1 (fr)
GB (1) GB1527068A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54145400A (en) * 1978-05-08 1979-11-13 Ube Ind Ltd Production of metal nitride powder
JPS61295274A (ja) * 1985-06-24 1986-12-26 チッソ株式会社 セラミツク成形体の製造方法
DE3717670A1 (de) * 1986-11-21 1988-06-01 Hoechst Ceram Tec Ag Verfahren zum abdichten keramischer waermetauscher
US5004544A (en) * 1989-11-13 1991-04-02 Norton Company Reaction bonded silicon nitride filtration membranes
DK0870534T3 (da) * 1997-04-09 2001-06-18 Ceramiques Tech Soc D Makroporøs bærer med porøsitetsgradient og fremgangsmåde til dens fremstilling

Also Published As

Publication number Publication date
GB1527068A (en) 1978-10-04
FR2360533B3 (fr) 1980-07-11
DE2635167B1 (de) 1977-10-06
DE2635167C2 (de) 1978-06-01

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Legal Events

Date Code Title Description
ST Notification of lapse