FR2359506B1 - - Google Patents

Info

Publication number
FR2359506B1
FR2359506B1 FR7722125A FR7722125A FR2359506B1 FR 2359506 B1 FR2359506 B1 FR 2359506B1 FR 7722125 A FR7722125 A FR 7722125A FR 7722125 A FR7722125 A FR 7722125A FR 2359506 B1 FR2359506 B1 FR 2359506B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7722125A
Other languages
French (fr)
Other versions
FR2359506A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zaidan Hojin Handotai Kenkyu Shinkokai
Original Assignee
Zaidan Hojin Handotai Kenkyu Shinkokai
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zaidan Hojin Handotai Kenkyu Shinkokai filed Critical Zaidan Hojin Handotai Kenkyu Shinkokai
Publication of FR2359506A1 publication Critical patent/FR2359506A1/en
Application granted granted Critical
Publication of FR2359506B1 publication Critical patent/FR2359506B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thyristors (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Local Oxidation Of Silicon (AREA)
FR7722125A 1976-07-19 1977-07-19 Prodn. of semiconductor device - with dissociation centres of second conduction type injected, compensating second zone Granted FR2359506A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8584576A JPS5311572A (en) 1976-07-19 1976-07-19 Method of making semiconductor device

Publications (2)

Publication Number Publication Date
FR2359506A1 FR2359506A1 (en) 1978-02-17
FR2359506B1 true FR2359506B1 (en) 1984-03-30

Family

ID=13870194

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7722125A Granted FR2359506A1 (en) 1976-07-19 1977-07-19 Prodn. of semiconductor device - with dissociation centres of second conduction type injected, compensating second zone

Country Status (4)

Country Link
JP (1) JPS5311572A (en)
CA (1) CA1111146A (en)
DE (1) DE2732582C2 (en)
FR (1) FR2359506A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920014B2 (en) * 1973-12-07 1984-05-10 帝人株式会社 How to wind false twisted yarn
JPS58121684A (en) * 1982-01-13 1983-07-20 Hitachi Ltd Manufacture of semiconductor device
JPS58175874A (en) * 1982-04-08 1983-10-15 Sanyo Electric Co Ltd Formation of vertical type junction fet
JPS62162325A (en) * 1986-01-13 1987-07-18 Sanyo Electric Co Ltd Manufacture of semiconductor device
JPS62198120A (en) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd Manufacture of semiconductor device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1464840A1 (en) * 1961-07-13 1970-03-26 Itt Ind Gmbh Deutsche Semiconductor device and manufacturing process
GB1129531A (en) * 1964-12-16 1968-10-09 Associated Semiconductor Mft Improvements in and relating to semiconductor devices
GB1200596A (en) * 1966-11-25 1970-07-29 Plessey Co Ltd Improvements in or relating to diffusion masks for semiconductor diffusion processes
DE1644028A1 (en) * 1967-06-01 1971-03-25 Telefunken Patent Method for the diffusion of interference points into a limited area of a semiconductor body
NL153029B (en) * 1968-05-21 1977-04-15 Western Electric Co PROCESS OF MANUFACTURE OF A PLANAR ZENER DIODE AND PLANAR ZENER DIODE MADE BY APPLYING THIS PROCESS.

Also Published As

Publication number Publication date
JPS5311572A (en) 1978-02-02
DE2732582A1 (en) 1978-01-26
FR2359506A1 (en) 1978-02-17
DE2732582C2 (en) 1994-02-10
CA1111146A (en) 1981-10-20

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