FR2349947A1 - Dispositif d'emission de champ et son procede de fabrication - Google Patents
Dispositif d'emission de champ et son procede de fabricationInfo
- Publication number
- FR2349947A1 FR2349947A1 FR7712724A FR7712724A FR2349947A1 FR 2349947 A1 FR2349947 A1 FR 2349947A1 FR 7712724 A FR7712724 A FR 7712724A FR 7712724 A FR7712724 A FR 7712724A FR 2349947 A1 FR2349947 A1 FR 2349947A1
- Authority
- FR
- France
- Prior art keywords
- manufacturing process
- field emission
- emission device
- field
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7604569A NL7604569A (nl) | 1976-04-29 | 1976-04-29 | Veldemitterinrichting en werkwijze tot het vormen daarvan. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2349947A1 true FR2349947A1 (fr) | 1977-11-25 |
FR2349947B1 FR2349947B1 (fr) | 1981-09-18 |
Family
ID=19826099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7712724A Granted FR2349947A1 (fr) | 1976-04-29 | 1977-04-27 | Dispositif d'emission de champ et son procede de fabrication |
Country Status (10)
Country | Link |
---|---|
US (1) | US4095133A (fr) |
JP (1) | JPS52132771A (fr) |
AU (1) | AU503434B2 (fr) |
CA (1) | CA1081312A (fr) |
CH (1) | CH615780A5 (fr) |
DE (1) | DE2716992A1 (fr) |
FR (1) | FR2349947A1 (fr) |
GB (1) | GB1530841A (fr) |
IT (1) | IT1084485B (fr) |
NL (1) | NL7604569A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2709206A1 (fr) * | 1993-06-14 | 1995-02-24 | Fujitsu Ltd | Dispositif cathode ayant une petite ouverture, et son procédé de fabrication. |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL184549C (nl) * | 1978-01-27 | 1989-08-16 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting. |
NL184589C (nl) * | 1979-07-13 | 1989-09-01 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting. |
US4307507A (en) * | 1980-09-10 | 1981-12-29 | The United States Of America As Represented By The Secretary Of The Navy | Method of manufacturing a field-emission cathode structure |
US4728851A (en) * | 1982-01-08 | 1988-03-01 | Ford Motor Company | Field emitter device with gated memory |
US4906894A (en) * | 1986-06-19 | 1990-03-06 | Canon Kabushiki Kaisha | Photoelectron beam converting device and method of driving the same |
DE3628847C2 (de) * | 1986-08-25 | 1995-12-14 | Max Planck Gesellschaft | Heißkathoden-Ionisationsmanometer |
US4721885A (en) * | 1987-02-11 | 1988-01-26 | Sri International | Very high speed integrated microelectronic tubes |
USRE40566E1 (en) * | 1987-07-15 | 2008-11-11 | Canon Kabushiki Kaisha | Flat panel display including electron emitting device |
GB8720792D0 (en) * | 1987-09-04 | 1987-10-14 | Gen Electric Co Plc | Vacuum devices |
US4926056A (en) * | 1988-06-10 | 1990-05-15 | Sri International | Microelectronic field ionizer and method of fabricating the same |
US5126287A (en) * | 1990-06-07 | 1992-06-30 | Mcnc | Self-aligned electron emitter fabrication method and devices formed thereby |
GB9101723D0 (en) * | 1991-01-25 | 1991-03-06 | Marconi Gec Ltd | Field emission devices |
US5138237A (en) * | 1991-08-20 | 1992-08-11 | Motorola, Inc. | Field emission electron device employing a modulatable diamond semiconductor emitter |
JP2728813B2 (ja) * | 1991-10-02 | 1998-03-18 | シャープ株式会社 | 電界放出型電子源及びその製造方法 |
US5199917A (en) * | 1991-12-09 | 1993-04-06 | Cornell Research Foundation, Inc. | Silicon tip field emission cathode arrays and fabrication thereof |
US5627427A (en) * | 1991-12-09 | 1997-05-06 | Cornell Research Foundation, Inc. | Silicon tip field emission cathodes |
US5696028A (en) * | 1992-02-14 | 1997-12-09 | Micron Technology, Inc. | Method to form an insulative barrier useful in field emission displays for reducing surface leakage |
US5371431A (en) * | 1992-03-04 | 1994-12-06 | Mcnc | Vertical microelectronic field emission devices including elongate vertical pillars having resistive bottom portions |
JP3253683B2 (ja) * | 1992-07-14 | 2002-02-04 | 株式会社東芝 | 電界放出型冷陰極板の製造方法 |
US5499938A (en) * | 1992-07-14 | 1996-03-19 | Kabushiki Kaisha Toshiba | Field emission cathode structure, method for production thereof, and flat panel display device using same |
KR950008758B1 (ko) * | 1992-12-11 | 1995-08-04 | 삼성전관주식회사 | 실리콘 전계방출 소자 및 그의 제조방법 |
JPH08507643A (ja) * | 1993-03-11 | 1996-08-13 | フェド.コーポレイション | エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法 |
US5534743A (en) * | 1993-03-11 | 1996-07-09 | Fed Corporation | Field emission display devices, and field emission electron beam source and isolation structure components therefor |
US5561339A (en) * | 1993-03-11 | 1996-10-01 | Fed Corporation | Field emission array magnetic sensor devices |
US5903098A (en) * | 1993-03-11 | 1999-05-11 | Fed Corporation | Field emission display device having multiplicity of through conductive vias and a backside connector |
US5584740A (en) * | 1993-03-31 | 1996-12-17 | The United States Of America As Represented By The Secretary Of The Navy | Thin-film edge field emitter device and method of manufacture therefor |
US5536988A (en) * | 1993-06-01 | 1996-07-16 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5363021A (en) * | 1993-07-12 | 1994-11-08 | Cornell Research Foundation, Inc. | Massively parallel array cathode |
US5844251A (en) * | 1994-01-05 | 1998-12-01 | Cornell Research Foundation, Inc. | High aspect ratio probes with self-aligned control electrodes |
US5480843A (en) * | 1994-02-10 | 1996-01-02 | Samsung Display Devices Co., Ltd. | Method for making a field emission device |
US5583393A (en) * | 1994-03-24 | 1996-12-10 | Fed Corporation | Selectively shaped field emission electron beam source, and phosphor array for use therewith |
US5629583A (en) * | 1994-07-25 | 1997-05-13 | Fed Corporation | Flat panel display assembly comprising photoformed spacer structure, and method of making the same |
US5688158A (en) * | 1995-08-24 | 1997-11-18 | Fed Corporation | Planarizing process for field emitter displays and other electron source applications |
US5828288A (en) * | 1995-08-24 | 1998-10-27 | Fed Corporation | Pedestal edge emitter and non-linear current limiters for field emitter displays and other electron source applications |
US5844351A (en) * | 1995-08-24 | 1998-12-01 | Fed Corporation | Field emitter device, and veil process for THR fabrication thereof |
KR100211945B1 (ko) * | 1995-12-20 | 1999-08-02 | 정선종 | 광게이트 트랜지스터를 이용한 mux 및 demux 회로 |
US6022256A (en) | 1996-11-06 | 2000-02-08 | Micron Display Technology, Inc. | Field emission display and method of making same |
US5828163A (en) * | 1997-01-13 | 1998-10-27 | Fed Corporation | Field emitter device with a current limiter structure |
TW483025B (en) * | 2000-10-24 | 2002-04-11 | Nat Science Council | Formation method of metal tip electrode field emission structure |
US7701128B2 (en) * | 2005-02-04 | 2010-04-20 | Industrial Technology Research Institute | Planar light unit using field emitters and method for fabricating the same |
US7564178B2 (en) * | 2005-02-14 | 2009-07-21 | Agere Systems Inc. | High-density field emission elements and a method for forming said emission elements |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2171366A1 (fr) * | 1972-02-11 | 1973-09-21 | Westinghouse Electric Corp | |
USB453031I5 (fr) * | 1973-03-22 | 1976-03-16 | ||
US4008412A (en) * | 1974-08-16 | 1977-02-15 | Hitachi, Ltd. | Thin-film field-emission electron source and a method for manufacturing the same |
-
1976
- 1976-04-29 NL NL7604569A patent/NL7604569A/xx not_active Application Discontinuation
-
1977
- 1977-03-24 US US05/780,963 patent/US4095133A/en not_active Expired - Lifetime
- 1977-04-18 DE DE19772716992 patent/DE2716992A1/de not_active Withdrawn
- 1977-04-26 CH CH516977A patent/CH615780A5/de not_active IP Right Cessation
- 1977-04-26 JP JP4749377A patent/JPS52132771A/ja active Pending
- 1977-04-26 GB GB17317/77A patent/GB1530841A/en not_active Expired
- 1977-04-26 IT IT7722827Q patent/IT1084485B/it active
- 1977-04-26 AU AU24582/77A patent/AU503434B2/en not_active Expired
- 1977-04-26 CA CA277,051A patent/CA1081312A/fr not_active Expired
- 1977-04-27 FR FR7712724A patent/FR2349947A1/fr active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2171366A1 (fr) * | 1972-02-11 | 1973-09-21 | Westinghouse Electric Corp | |
USB453031I5 (fr) * | 1973-03-22 | 1976-03-16 | ||
US4008412A (en) * | 1974-08-16 | 1977-02-15 | Hitachi, Ltd. | Thin-film field-emission electron source and a method for manufacturing the same |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2709206A1 (fr) * | 1993-06-14 | 1995-02-24 | Fujitsu Ltd | Dispositif cathode ayant une petite ouverture, et son procédé de fabrication. |
US5576594A (en) * | 1993-06-14 | 1996-11-19 | Fujitsu Limited | Cathode device having smaller opening |
US6140760A (en) * | 1993-06-14 | 2000-10-31 | Fujitsu Limited | Cathode device having smaller opening |
Also Published As
Publication number | Publication date |
---|---|
FR2349947B1 (fr) | 1981-09-18 |
IT1084485B (it) | 1985-05-25 |
JPS52132771A (en) | 1977-11-07 |
CA1081312A (fr) | 1980-07-08 |
DE2716992A1 (de) | 1977-11-17 |
GB1530841A (en) | 1978-11-01 |
CH615780A5 (fr) | 1980-02-15 |
AU503434B2 (en) | 1979-09-06 |
NL7604569A (nl) | 1977-11-01 |
US4095133A (en) | 1978-06-13 |
AU2458277A (en) | 1978-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |