FR2349947A1 - Dispositif d'emission de champ et son procede de fabrication - Google Patents

Dispositif d'emission de champ et son procede de fabrication

Info

Publication number
FR2349947A1
FR2349947A1 FR7712724A FR7712724A FR2349947A1 FR 2349947 A1 FR2349947 A1 FR 2349947A1 FR 7712724 A FR7712724 A FR 7712724A FR 7712724 A FR7712724 A FR 7712724A FR 2349947 A1 FR2349947 A1 FR 2349947A1
Authority
FR
France
Prior art keywords
manufacturing process
field emission
emission device
field
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7712724A
Other languages
English (en)
Other versions
FR2349947B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2349947A1 publication Critical patent/FR2349947A1/fr
Application granted granted Critical
Publication of FR2349947B1 publication Critical patent/FR2349947B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • H01J1/3042Field-emissive cathodes microengineered, e.g. Spindt-type
FR7712724A 1976-04-29 1977-04-27 Dispositif d'emission de champ et son procede de fabrication Granted FR2349947A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7604569A NL7604569A (nl) 1976-04-29 1976-04-29 Veldemitterinrichting en werkwijze tot het vormen daarvan.

Publications (2)

Publication Number Publication Date
FR2349947A1 true FR2349947A1 (fr) 1977-11-25
FR2349947B1 FR2349947B1 (fr) 1981-09-18

Family

ID=19826099

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7712724A Granted FR2349947A1 (fr) 1976-04-29 1977-04-27 Dispositif d'emission de champ et son procede de fabrication

Country Status (10)

Country Link
US (1) US4095133A (fr)
JP (1) JPS52132771A (fr)
AU (1) AU503434B2 (fr)
CA (1) CA1081312A (fr)
CH (1) CH615780A5 (fr)
DE (1) DE2716992A1 (fr)
FR (1) FR2349947A1 (fr)
GB (1) GB1530841A (fr)
IT (1) IT1084485B (fr)
NL (1) NL7604569A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2709206A1 (fr) * 1993-06-14 1995-02-24 Fujitsu Ltd Dispositif cathode ayant une petite ouverture, et son procédé de fabrication.

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL184549C (nl) * 1978-01-27 1989-08-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.
NL184589C (nl) * 1979-07-13 1989-09-01 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting.
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
US4728851A (en) * 1982-01-08 1988-03-01 Ford Motor Company Field emitter device with gated memory
US4906894A (en) * 1986-06-19 1990-03-06 Canon Kabushiki Kaisha Photoelectron beam converting device and method of driving the same
DE3628847C2 (de) * 1986-08-25 1995-12-14 Max Planck Gesellschaft Heißkathoden-Ionisationsmanometer
US4721885A (en) * 1987-02-11 1988-01-26 Sri International Very high speed integrated microelectronic tubes
USRE40566E1 (en) * 1987-07-15 2008-11-11 Canon Kabushiki Kaisha Flat panel display including electron emitting device
GB8720792D0 (en) * 1987-09-04 1987-10-14 Gen Electric Co Plc Vacuum devices
US4926056A (en) * 1988-06-10 1990-05-15 Sri International Microelectronic field ionizer and method of fabricating the same
US5126287A (en) * 1990-06-07 1992-06-30 Mcnc Self-aligned electron emitter fabrication method and devices formed thereby
GB9101723D0 (en) * 1991-01-25 1991-03-06 Marconi Gec Ltd Field emission devices
US5138237A (en) * 1991-08-20 1992-08-11 Motorola, Inc. Field emission electron device employing a modulatable diamond semiconductor emitter
JP2728813B2 (ja) * 1991-10-02 1998-03-18 シャープ株式会社 電界放出型電子源及びその製造方法
US5199917A (en) * 1991-12-09 1993-04-06 Cornell Research Foundation, Inc. Silicon tip field emission cathode arrays and fabrication thereof
US5627427A (en) * 1991-12-09 1997-05-06 Cornell Research Foundation, Inc. Silicon tip field emission cathodes
US5696028A (en) * 1992-02-14 1997-12-09 Micron Technology, Inc. Method to form an insulative barrier useful in field emission displays for reducing surface leakage
US5371431A (en) * 1992-03-04 1994-12-06 Mcnc Vertical microelectronic field emission devices including elongate vertical pillars having resistive bottom portions
JP3253683B2 (ja) * 1992-07-14 2002-02-04 株式会社東芝 電界放出型冷陰極板の製造方法
US5499938A (en) * 1992-07-14 1996-03-19 Kabushiki Kaisha Toshiba Field emission cathode structure, method for production thereof, and flat panel display device using same
KR950008758B1 (ko) * 1992-12-11 1995-08-04 삼성전관주식회사 실리콘 전계방출 소자 및 그의 제조방법
JPH08507643A (ja) * 1993-03-11 1996-08-13 フェド.コーポレイション エミッタ先端構造体及び該エミッタ先端構造体を備える電界放出装置並びにその製造方法
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
US5561339A (en) * 1993-03-11 1996-10-01 Fed Corporation Field emission array magnetic sensor devices
US5903098A (en) * 1993-03-11 1999-05-11 Fed Corporation Field emission display device having multiplicity of through conductive vias and a backside connector
US5584740A (en) * 1993-03-31 1996-12-17 The United States Of America As Represented By The Secretary Of The Navy Thin-film edge field emitter device and method of manufacture therefor
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5363021A (en) * 1993-07-12 1994-11-08 Cornell Research Foundation, Inc. Massively parallel array cathode
US5844251A (en) * 1994-01-05 1998-12-01 Cornell Research Foundation, Inc. High aspect ratio probes with self-aligned control electrodes
US5480843A (en) * 1994-02-10 1996-01-02 Samsung Display Devices Co., Ltd. Method for making a field emission device
US5583393A (en) * 1994-03-24 1996-12-10 Fed Corporation Selectively shaped field emission electron beam source, and phosphor array for use therewith
US5629583A (en) * 1994-07-25 1997-05-13 Fed Corporation Flat panel display assembly comprising photoformed spacer structure, and method of making the same
US5688158A (en) * 1995-08-24 1997-11-18 Fed Corporation Planarizing process for field emitter displays and other electron source applications
US5828288A (en) * 1995-08-24 1998-10-27 Fed Corporation Pedestal edge emitter and non-linear current limiters for field emitter displays and other electron source applications
US5844351A (en) * 1995-08-24 1998-12-01 Fed Corporation Field emitter device, and veil process for THR fabrication thereof
KR100211945B1 (ko) * 1995-12-20 1999-08-02 정선종 광게이트 트랜지스터를 이용한 mux 및 demux 회로
US6022256A (en) 1996-11-06 2000-02-08 Micron Display Technology, Inc. Field emission display and method of making same
US5828163A (en) * 1997-01-13 1998-10-27 Fed Corporation Field emitter device with a current limiter structure
TW483025B (en) * 2000-10-24 2002-04-11 Nat Science Council Formation method of metal tip electrode field emission structure
US7701128B2 (en) * 2005-02-04 2010-04-20 Industrial Technology Research Institute Planar light unit using field emitters and method for fabricating the same
US7564178B2 (en) * 2005-02-14 2009-07-21 Agere Systems Inc. High-density field emission elements and a method for forming said emission elements

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2171366A1 (fr) * 1972-02-11 1973-09-21 Westinghouse Electric Corp
USB453031I5 (fr) * 1973-03-22 1976-03-16
US4008412A (en) * 1974-08-16 1977-02-15 Hitachi, Ltd. Thin-film field-emission electron source and a method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2171366A1 (fr) * 1972-02-11 1973-09-21 Westinghouse Electric Corp
USB453031I5 (fr) * 1973-03-22 1976-03-16
US4008412A (en) * 1974-08-16 1977-02-15 Hitachi, Ltd. Thin-film field-emission electron source and a method for manufacturing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2709206A1 (fr) * 1993-06-14 1995-02-24 Fujitsu Ltd Dispositif cathode ayant une petite ouverture, et son procédé de fabrication.
US5576594A (en) * 1993-06-14 1996-11-19 Fujitsu Limited Cathode device having smaller opening
US6140760A (en) * 1993-06-14 2000-10-31 Fujitsu Limited Cathode device having smaller opening

Also Published As

Publication number Publication date
FR2349947B1 (fr) 1981-09-18
IT1084485B (it) 1985-05-25
JPS52132771A (en) 1977-11-07
CA1081312A (fr) 1980-07-08
DE2716992A1 (de) 1977-11-17
GB1530841A (en) 1978-11-01
CH615780A5 (fr) 1980-02-15
AU503434B2 (en) 1979-09-06
NL7604569A (nl) 1977-11-01
US4095133A (en) 1978-06-13
AU2458277A (en) 1978-11-02

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Legal Events

Date Code Title Description
ST Notification of lapse