FR2349771A1 - Dispositif d'etancheite pour enceinte a vide - Google Patents

Dispositif d'etancheite pour enceinte a vide

Info

Publication number
FR2349771A1
FR2349771A1 FR7612571A FR7612571A FR2349771A1 FR 2349771 A1 FR2349771 A1 FR 2349771A1 FR 7612571 A FR7612571 A FR 7612571A FR 7612571 A FR7612571 A FR 7612571A FR 2349771 A1 FR2349771 A1 FR 2349771A1
Authority
FR
France
Prior art keywords
sealing device
vacuum enclosures
enclosures
vacuum
sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7612571A
Other languages
English (en)
Other versions
FR2349771B1 (fr
Inventor
Philippe Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR7612571A priority Critical patent/FR2349771A1/fr
Priority to BE176752A priority patent/BE853642A/fr
Priority to CA276,519A priority patent/CA1064540A/fr
Priority to GB17031/77A priority patent/GB1530977A/en
Priority to US05/790,884 priority patent/US4109922A/en
Priority to JP1977055010U priority patent/JPS6124764Y2/ja
Priority to IT22928/77A priority patent/IT1076742B/it
Publication of FR2349771A1 publication Critical patent/FR2349771A1/fr
Application granted granted Critical
Publication of FR2349771B1 publication Critical patent/FR2349771B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/06—Electron-beam welding or cutting within a vacuum chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/002—Sealings comprising at least two sealings in succession
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S277/00—Seal for a joint or juncture
    • Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Gasket Seals (AREA)
  • Sealing Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
FR7612571A 1976-04-28 1976-04-28 Dispositif d'etancheite pour enceinte a vide Granted FR2349771A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR7612571A FR2349771A1 (fr) 1976-04-28 1976-04-28 Dispositif d'etancheite pour enceinte a vide
BE176752A BE853642A (fr) 1976-04-28 1977-04-15 Dispositif d'etancheite pour enceinte a vide
CA276,519A CA1064540A (fr) 1976-04-28 1977-04-20 Garniture d'etancheite pour contenant sous vide
GB17031/77A GB1530977A (en) 1976-04-28 1977-04-25 Sealing device
US05/790,884 US4109922A (en) 1976-04-28 1977-04-26 Sealing device for a vacuum enclosure
JP1977055010U JPS6124764Y2 (fr) 1976-04-28 1977-04-28
IT22928/77A IT1076742B (it) 1976-04-28 1977-04-28 Dispositivo di tenuta per un involucro sotto vuoto

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7612571A FR2349771A1 (fr) 1976-04-28 1976-04-28 Dispositif d'etancheite pour enceinte a vide

Publications (2)

Publication Number Publication Date
FR2349771A1 true FR2349771A1 (fr) 1977-11-25
FR2349771B1 FR2349771B1 (fr) 1981-10-30

Family

ID=9172402

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7612571A Granted FR2349771A1 (fr) 1976-04-28 1976-04-28 Dispositif d'etancheite pour enceinte a vide

Country Status (7)

Country Link
US (1) US4109922A (fr)
JP (1) JPS6124764Y2 (fr)
BE (1) BE853642A (fr)
CA (1) CA1064540A (fr)
FR (1) FR2349771A1 (fr)
GB (1) GB1530977A (fr)
IT (1) IT1076742B (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2454029A1 (fr) * 1979-04-11 1980-11-07 Petroles Cie Francaise Joint gonflable a grand debattement
FR2717786A1 (fr) * 1994-03-25 1995-09-29 Rhonel Sarl Ateliers Perfectionnements aux portes de cuve comportant un moyen pneumatique d'étanchéité.
EP1916426A3 (fr) * 2006-10-27 2010-10-06 FESTO AG & Co. KG Dispositif de valve
EP2334397A1 (fr) * 2008-08-20 2011-06-22 Semba Biosciences, Inc. Ensemble bloc de soupape
FR3101578A1 (fr) * 2019-10-07 2021-04-09 Compagnie Plastic Omnium Se Dispositif de contrôle de l’étanchéité d’un panneau de véhicule automobile à double paroi

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276945A (en) * 1979-06-08 1981-07-07 Ward Sr Bobby N Mud return line connector apparatus
US4637588A (en) * 1984-04-30 1987-01-20 Westinghouse Electric Corp. Non-bolted ringless nozzle dam
JPH0430459Y2 (fr) * 1985-04-23 1992-07-22
GB8616147D0 (en) * 1986-07-02 1986-08-06 Stephenson K Sealing device
US4884723A (en) * 1987-04-23 1989-12-05 Acf Industries, Incorporated Hard gasket for retrofit installation on hopper outlet/hopper gasket outlet
DE3800941A1 (de) * 1988-01-15 1989-07-27 Avt Anlagen Verfahrenstech Dichtungsanordnung
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
US6135460A (en) * 1997-07-31 2000-10-24 Texas Instruments Incorporated Method of and apparatus for purifying reduced pressure process chambers
EP0916877A3 (fr) * 1997-11-14 2000-04-26 J.M. Voith Ag Dispositif d'étanchéité pour hautes pressions et mise en oeuvre d'un tel dispositif
JP2002048244A (ja) * 2000-08-02 2002-02-15 Ulvac Japan Ltd シール方法及びシール機構並びに真空処理装置
US20060207122A1 (en) * 2005-03-15 2006-09-21 Paul Stewart Freeze dryer
JP5237294B2 (ja) * 2006-11-07 2013-07-17 アイエムエイ ライフ ノース アメリカ、インコーポレイテッド 凍結乾燥機のバリアシステム
EP1953802A3 (fr) * 2007-02-01 2012-05-23 Parker-Hannifin Corporation Chambre de procédés pour semiconducteur
DE102009014214A1 (de) * 2008-12-22 2010-06-24 Von Ardenne Anlagentechnik Gmbh Dichtungseinrichtung für Drehdurchführung
US20110076848A1 (en) * 2009-06-30 2011-03-31 Amitava Datta Semiconductor process chamber and seal
JP5319464B2 (ja) * 2009-09-04 2013-10-16 株式会社カネカ 薄膜製造装置及び薄膜の製造方法
DE102010027757B4 (de) * 2009-12-18 2015-12-10 Von Ardenne Gmbh Durchführung für ein Maschinenelement
US9383037B2 (en) 2010-01-28 2016-07-05 Vat Holding Ag Device for closing an opening in a chamber wall
WO2016074758A1 (fr) * 2014-11-13 2016-05-19 Vat Holding Ag Soupape à vide
CN105445974A (zh) * 2016-01-04 2016-03-30 京东方科技集团股份有限公司 加压脱泡设备及其舱门密封结构
EP3440388B1 (fr) 2016-04-08 2020-04-22 VAT Holding AG Dispositif de fermeture
GB201609995D0 (en) * 2016-06-08 2016-07-20 Aquasium Technology Ltd Shaped welding head
GB201609993D0 (en) * 2016-06-08 2016-07-20 Aquasium Technology Ltd Welding head
US10435038B1 (en) * 2018-11-09 2019-10-08 Mark G. Keffeler Locomotive sanding system
DE102019103979A1 (de) * 2019-02-18 2020-07-09 Voith Patent Gmbh Wasserkraftmaschine mit einer Wellen-Stillstands-Dichtung und Verfahren zur Dichtigkeitsprüfung
US11118697B2 (en) * 2019-07-28 2021-09-14 Pallant Satnarine Ramsundar Inflatable seal system with retractable load bearing feature
TWI742765B (zh) 2020-07-16 2021-10-11 龔祺允 充氣密封件
US11167429B1 (en) * 2021-05-24 2021-11-09 Nemo Power Tools Ltd. Composite sealing element for improving vacuum gripper performance on irregular surface topologies
CN113503363A (zh) * 2021-07-06 2021-10-15 河南中烟工业有限责任公司 气囊密封圈

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3258271A (en) * 1963-07-29 1966-06-28 Woodward Iron Company Fluid-tight joint
BE653074A (fr) * 1963-09-19
BE789759A (fr) * 1971-10-06 1973-02-01 Commissariat Energie Atomique Dispositif de supportage et d'etancheite applicable aux bouchons tournants de dalle de reacteur nucleaire

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2454029A1 (fr) * 1979-04-11 1980-11-07 Petroles Cie Francaise Joint gonflable a grand debattement
FR2717786A1 (fr) * 1994-03-25 1995-09-29 Rhonel Sarl Ateliers Perfectionnements aux portes de cuve comportant un moyen pneumatique d'étanchéité.
EP1916426A3 (fr) * 2006-10-27 2010-10-06 FESTO AG & Co. KG Dispositif de valve
EP2334397A1 (fr) * 2008-08-20 2011-06-22 Semba Biosciences, Inc. Ensemble bloc de soupape
EP2334397A4 (fr) * 2008-08-20 2014-03-05 Semba Biosciences Inc Ensemble bloc de soupape
US9068662B2 (en) 2008-08-20 2015-06-30 Semba Biosciences, Inc. Valve block assembly
FR3101578A1 (fr) * 2019-10-07 2021-04-09 Compagnie Plastic Omnium Se Dispositif de contrôle de l’étanchéité d’un panneau de véhicule automobile à double paroi
EP3805723A1 (fr) * 2019-10-07 2021-04-14 Compagnie Plastic Omnium SE Dispositif de contrôle de l'étanchéité d'un panneau de véhicule automobile à double paroi

Also Published As

Publication number Publication date
CA1064540A (fr) 1979-10-16
JPS6124764Y2 (fr) 1986-07-25
US4109922A (en) 1978-08-29
BE853642A (fr) 1977-08-01
JPS52169654U (fr) 1977-12-23
IT1076742B (it) 1985-04-27
FR2349771B1 (fr) 1981-10-30
GB1530977A (en) 1978-11-01

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse