FR2338509B3 - - Google Patents

Info

Publication number
FR2338509B3
FR2338509B3 FR7701348A FR7701348A FR2338509B3 FR 2338509 B3 FR2338509 B3 FR 2338509B3 FR 7701348 A FR7701348 A FR 7701348A FR 7701348 A FR7701348 A FR 7701348A FR 2338509 B3 FR2338509 B3 FR 2338509B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7701348A
Other languages
French (fr)
Other versions
FR2338509A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of FR2338509A1 publication Critical patent/FR2338509A1/fr
Application granted granted Critical
Publication of FR2338509B3 publication Critical patent/FR2338509B3/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR7701348A 1976-01-19 1977-01-18 Procede et appareillage pour le positionnement a plans paralleles d'une plaque de semi-conducteur pour un cliche photographique Granted FR2338509A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (ja) 1976-01-19 1976-01-19

Publications (2)

Publication Number Publication Date
FR2338509A1 FR2338509A1 (fr) 1977-08-12
FR2338509B3 true FR2338509B3 (ja) 1980-12-26

Family

ID=5503310

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7701348A Granted FR2338509A1 (fr) 1976-01-19 1977-01-18 Procede et appareillage pour le positionnement a plans paralleles d'une plaque de semi-conducteur pour un cliche photographique

Country Status (6)

Country Link
CS (1) CS211450B1 (ja)
DD (1) DD123848A1 (ja)
DE (1) DE2701106A1 (ja)
FR (1) FR2338509A1 (ja)
GB (1) GB1536978A (ja)
SU (1) SU750614A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD151387A1 (de) 1980-06-02 1981-10-14 Erich Adler Verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte
CN109794427B (zh) * 2019-02-03 2024-06-04 东莞市粤蒙电子科技有限公司 一种分选设备

Also Published As

Publication number Publication date
DD123848A1 (ja) 1977-01-19
FR2338509A1 (fr) 1977-08-12
DE2701106A1 (de) 1977-07-28
GB1536978A (en) 1978-12-29
SU750614A1 (ru) 1980-07-23
CS211450B1 (en) 1982-02-26

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Legal Events

Date Code Title Description
ST Notification of lapse