DD123848A1 - - Google Patents

Info

Publication number
DD123848A1
DD123848A1 DD19086176A DD19086176A DD123848A1 DD 123848 A1 DD123848 A1 DD 123848A1 DD 19086176 A DD19086176 A DD 19086176A DD 19086176 A DD19086176 A DD 19086176A DD 123848 A1 DD123848 A1 DD 123848A1
Authority
DD
German Democratic Republic
Application number
DD19086176A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD19086176A priority Critical patent/DD123848A1/xx
Priority to CS6677A priority patent/CS211450B1/cs
Priority to DE19772701106 priority patent/DE2701106A1/de
Priority to SU772439404A priority patent/SU750614A1/ru
Priority to GB161577A priority patent/GB1536978A/en
Priority to FR7701348A priority patent/FR2338509A1/fr
Publication of DD123848A1 publication Critical patent/DD123848A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DD19086176A 1976-01-19 1976-01-19 DD123848A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (ja) 1976-01-19 1976-01-19
CS6677A CS211450B1 (en) 1976-01-19 1977-01-04 Method of planparalell evening the semiconductor plate in respect of the exposure mask and device for executing the same
DE19772701106 DE2701106A1 (de) 1976-01-19 1977-01-12 Verfahren und vorrichtung zum planparallelen ausrichten einer halbleiterscheibe zu einer fotoschablone
SU772439404A SU750614A1 (ru) 1976-01-19 1977-01-12 Способ подготовки к контактному экспонированию и устройство дл его осуществлени
GB161577A GB1536978A (en) 1976-01-19 1977-01-14 Positioning a semiconductor slice
FR7701348A FR2338509A1 (fr) 1976-01-19 1977-01-18 Procede et appareillage pour le positionnement a plans paralleles d'une plaque de semi-conducteur pour un cliche photographique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD19086176A DD123848A1 (ja) 1976-01-19 1976-01-19

Publications (1)

Publication Number Publication Date
DD123848A1 true DD123848A1 (ja) 1977-01-19

Family

ID=5503310

Family Applications (1)

Application Number Title Priority Date Filing Date
DD19086176A DD123848A1 (ja) 1976-01-19 1976-01-19

Country Status (6)

Country Link
CS (1) CS211450B1 (ja)
DD (1) DD123848A1 (ja)
DE (1) DE2701106A1 (ja)
FR (1) FR2338509A1 (ja)
GB (1) GB1536978A (ja)
SU (1) SU750614A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3120696A1 (de) 1980-06-02 1982-03-18 Jenoptik Jena Gmbh, Ddr 6900 Jena "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109794427B (zh) * 2019-02-03 2024-06-04 东莞市粤蒙电子科技有限公司 一种分选设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3120696A1 (de) 1980-06-02 1982-03-18 Jenoptik Jena Gmbh, Ddr 6900 Jena "verfahren und vorrichtung zum automatischen transport und zur lageorientierung scheibenfoermiger objekte"

Also Published As

Publication number Publication date
CS211450B1 (en) 1982-02-26
GB1536978A (en) 1978-12-29
FR2338509B3 (ja) 1980-12-26
FR2338509A1 (fr) 1977-08-12
SU750614A1 (ru) 1980-07-23
DE2701106A1 (de) 1977-07-28

Similar Documents

Publication Publication Date Title
FR2361462B1 (ja)
JPS5427218B2 (ja)
FR2338509B3 (ja)
JPS52139630U (ja)
JPS5365888U (ja)
JPS5360228U (ja)
JPS5336638U (ja)
JPS5326594U (ja)
JPS52139203U (ja)
JPS52148454U (ja)
CH612298A5 (ja)
CH605239A5 (ja)
BG23302A1 (ja)
CH605052A5 (ja)
DD125729A2 (ja)
DD125394A1 (ja)
DD124632A1 (ja)
DD124533A1 (ja)
DD123742A5 (ja)
DD123560A1 (ja)
CH621672GA3 (ja)
CH614803A5 (ja)
CH614104A5 (ja)
CH613068A5 (ja)
CH604989A5 (ja)