FR2311479A1 - Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source - Google Patents

Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source

Info

Publication number
FR2311479A1
FR2311479A1 FR7515440A FR7515440A FR2311479A1 FR 2311479 A1 FR2311479 A1 FR 2311479A1 FR 7515440 A FR7515440 A FR 7515440A FR 7515440 A FR7515440 A FR 7515440A FR 2311479 A1 FR2311479 A1 FR 2311479A1
Authority
FR
France
Prior art keywords
source
ions
hollow
discharge device
particle accelerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7515440A
Other languages
English (en)
Other versions
FR2311479B1 (fr
Inventor
Georges Mourier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7515440A priority Critical patent/FR2311479A1/fr
Priority to JP51053372A priority patent/JPS5918840B2/ja
Priority to US05/687,087 priority patent/US4087721A/en
Priority to GB19845/76A priority patent/GB1500095A/en
Priority to DE2621453A priority patent/DE2621453C3/de
Publication of FR2311479A1 publication Critical patent/FR2311479A1/fr
Application granted granted Critical
Publication of FR2311479B1 publication Critical patent/FR2311479B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/08Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
FR7515440A 1975-05-16 1975-05-16 Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source Granted FR2311479A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7515440A FR2311479A1 (fr) 1975-05-16 1975-05-16 Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source
JP51053372A JPS5918840B2 (ja) 1975-05-16 1976-05-12 イオン源
US05/687,087 US4087721A (en) 1975-05-16 1976-05-13 Ion source using a hollow cathode discharge arrangement and in particular a particle accelerator comprising such a source
GB19845/76A GB1500095A (en) 1975-05-16 1976-05-13 Ion source using a hollow cathode discharge arrangement and a particle accelerator comprising such a source
DE2621453A DE2621453C3 (de) 1975-05-16 1976-05-14 Ionenquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7515440A FR2311479A1 (fr) 1975-05-16 1975-05-16 Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source

Publications (2)

Publication Number Publication Date
FR2311479A1 true FR2311479A1 (fr) 1976-12-10
FR2311479B1 FR2311479B1 (fr) 1977-12-09

Family

ID=9155371

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7515440A Granted FR2311479A1 (fr) 1975-05-16 1975-05-16 Source d'ions utilisant un dispositif a decharge a cathode creuse et, en particulier, accelerateur de particules comportant une telle source

Country Status (5)

Country Link
US (1) US4087721A (fr)
JP (1) JPS5918840B2 (fr)
DE (1) DE2621453C3 (fr)
FR (1) FR2311479A1 (fr)
GB (1) GB1500095A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4282436A (en) * 1980-06-04 1981-08-04 The United States Of America As Represented By The Secretary Of The Navy Intense ion beam generation with an inverse reflex tetrode (IRT)
US4377773A (en) * 1980-12-12 1983-03-22 The United States Of America As Represented By The Department Of Energy Negative ion source with hollow cathode discharge plasma
US6064156A (en) * 1998-09-14 2000-05-16 The United States Of America As Represented By The Administrator Of Nasa Process for ignition of gaseous electrical discharge between electrodes of a hollow cathode assembly
US6729174B1 (en) 1998-09-14 2004-05-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Process for testing a xenon gas feed system of a hollow cathode assembly
US20050035085A1 (en) * 2003-08-13 2005-02-17 Stowell William Randolph Apparatus and method for reducing metal oxides on superalloy articles
JP2010192197A (ja) * 2009-02-17 2010-09-02 Tokyo Electron Ltd 基板処理装置及び基板処理方法
CN114453345B (zh) * 2021-12-30 2023-04-11 广东鼎泰高科技术股份有限公司 一种等离子体清洗系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2467224A (en) * 1948-02-21 1949-04-12 Rca Corp Neutralization of electrostatic charges in electron-optical instruments
US3156090A (en) * 1961-09-18 1964-11-10 Harold R Kaufman Ion rocket

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
DE2621453C3 (de) 1982-02-11
US4087721A (en) 1978-05-02
JPS5918840B2 (ja) 1984-05-01
FR2311479B1 (fr) 1977-12-09
DE2621453B2 (de) 1981-05-27
GB1500095A (en) 1978-02-08
JPS51141999A (en) 1976-12-07
DE2621453A1 (de) 1976-11-25

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