FR2309905A1 - Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus - Google Patents

Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus

Info

Publication number
FR2309905A1
FR2309905A1 FR7514052A FR7514052A FR2309905A1 FR 2309905 A1 FR2309905 A1 FR 2309905A1 FR 7514052 A FR7514052 A FR 7514052A FR 7514052 A FR7514052 A FR 7514052A FR 2309905 A1 FR2309905 A1 FR 2309905A1
Authority
FR
France
Prior art keywords
light beams
coherent light
photosensitive layer
produce
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7514052A
Other languages
English (en)
French (fr)
Other versions
FR2309905B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR7514052A priority Critical patent/FR2309905A1/fr
Publication of FR2309905A1 publication Critical patent/FR2309905A1/fr
Application granted granted Critical
Publication of FR2309905B1 publication Critical patent/FR2309905B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
FR7514052A 1975-04-29 1975-04-29 Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus Granted FR2309905A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7514052A FR2309905A1 (fr) 1975-04-29 1975-04-29 Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7514052A FR2309905A1 (fr) 1975-04-29 1975-04-29 Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus

Publications (2)

Publication Number Publication Date
FR2309905A1 true FR2309905A1 (fr) 1976-11-26
FR2309905B1 FR2309905B1 (enExample) 1980-03-14

Family

ID=9154878

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7514052A Granted FR2309905A1 (fr) 1975-04-29 1975-04-29 Procedes de fabrication de reseaux optiques echelettes et reseaux obtenus

Country Status (1)

Country Link
FR (1) FR2309905A1 (enExample)

Also Published As

Publication number Publication date
FR2309905B1 (enExample) 1980-03-14

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Legal Events

Date Code Title Description
ST Notification of lapse