FR2309860B1 - - Google Patents
Info
- Publication number
- FR2309860B1 FR2309860B1 FR7605148A FR7605148A FR2309860B1 FR 2309860 B1 FR2309860 B1 FR 2309860B1 FR 7605148 A FR7605148 A FR 7605148A FR 7605148 A FR7605148 A FR 7605148A FR 2309860 B1 FR2309860 B1 FR 2309860B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/572,476 US4053232A (en) | 1973-06-25 | 1975-04-28 | Rotating-compensator ellipsometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2309860A1 FR2309860A1 (fr) | 1976-11-26 |
| FR2309860B1 true FR2309860B1 (no) | 1979-04-20 |
Family
ID=24287979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7605148A Granted FR2309860A1 (fr) | 1975-04-28 | 1976-02-17 | Ellipsometre compensateur rotatif |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS6042901B2 (no) |
| BE (1) | BE839043A (no) |
| CA (1) | CA1048806A (no) |
| DE (1) | DE2616141A1 (no) |
| FR (1) | FR2309860A1 (no) |
| GB (1) | GB1493087A (no) |
| IT (1) | IT1064176B (no) |
| NL (1) | NL7603931A (no) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4526471A (en) * | 1982-06-17 | 1985-07-02 | Bykov Anatoly P | Method for sensing spatial coordinate of article point and apparatus therefor |
| JPS5930004A (ja) * | 1982-08-09 | 1984-02-17 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 膜厚測定装置 |
| JPS59182324A (ja) * | 1983-03-31 | 1984-10-17 | Horiba Ltd | 旋光計 |
| NO850157L (no) * | 1984-01-16 | 1985-10-23 | Barringer Research Ltd | Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate. |
| JPH0820358B2 (ja) * | 1986-03-03 | 1996-03-04 | オリンパス光学工業株式会社 | 光学的記録媒体用基盤の屈折率の測定装置 |
| DE3708148A1 (de) * | 1987-03-11 | 1987-10-15 | Michael Linder | Verfahren und vorrichtung zur ellipsometrischen messung |
| JPS6428509A (en) * | 1987-07-23 | 1989-01-31 | Nippon Kokan Kk | Apparatus for measuring thickness of film |
| DE29802464U1 (de) * | 1997-03-25 | 1998-06-04 | Schmekel, Björn, 95463 Bindlach | Vorrichtung zur Messung des Brechungsindex |
| CN104169709B (zh) * | 2011-07-07 | 2018-05-01 | 科磊股份有限公司 | 多分析器角度的光谱椭圆偏光仪 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1422426A (en) * | 1973-06-22 | 1976-01-28 | Penny Turbines Ltd Noel | Compressor rotor |
-
1976
- 1976-01-21 GB GB225176A patent/GB1493087A/en not_active Expired
- 1976-02-17 FR FR7605148A patent/FR2309860A1/fr active Granted
- 1976-02-27 BE BE164736A patent/BE839043A/xx not_active IP Right Cessation
- 1976-03-23 IT IT2145776A patent/IT1064176B/it active
- 1976-04-07 JP JP51038338A patent/JPS6042901B2/ja not_active Expired
- 1976-04-13 DE DE19762616141 patent/DE2616141A1/de not_active Withdrawn
- 1976-04-13 CA CA76250134A patent/CA1048806A/en not_active Expired
- 1976-04-14 NL NL7603931A patent/NL7603931A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2309860A1 (fr) | 1976-11-26 |
| DE2616141A1 (de) | 1976-11-11 |
| NL7603931A (nl) | 1976-11-01 |
| JPS51131655A (en) | 1976-11-16 |
| BE839043A (fr) | 1976-06-16 |
| JPS6042901B2 (ja) | 1985-09-25 |
| GB1493087A (en) | 1977-11-23 |
| CA1048806A (en) | 1979-02-20 |
| IT1064176B (it) | 1985-02-18 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |