FR2306528A1 - Procede de liaison d'un metal et d'un semi-conducteur - Google Patents

Procede de liaison d'un metal et d'un semi-conducteur

Info

Publication number
FR2306528A1
FR2306528A1 FR7609283A FR7609283A FR2306528A1 FR 2306528 A1 FR2306528 A1 FR 2306528A1 FR 7609283 A FR7609283 A FR 7609283A FR 7609283 A FR7609283 A FR 7609283A FR 2306528 A1 FR2306528 A1 FR 2306528A1
Authority
FR
France
Prior art keywords
semiconductor
metal
binding process
binding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7609283A
Other languages
English (en)
Inventor
Harold Frank Webster
Dominic Anthony Cusano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of FR2306528A1 publication Critical patent/FR2306528A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/27Manufacturing methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K35/005Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of a refractory metal
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K2035/008Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of silicium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices
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    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/2612Auxiliary members for layer connectors, e.g. spacers
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    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
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    • H01ELECTRIC ELEMENTS
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    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838Bonding techniques
    • H01L2224/83801Soldering or alloying
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    • H01L2924/013Alloys
    • H01L2924/014Solder alloys

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
  • Physical Vapour Deposition (AREA)
FR7609283A 1975-03-31 1976-03-31 Procede de liaison d'un metal et d'un semi-conducteur Withdrawn FR2306528A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56382175A 1975-03-31 1975-03-31

Publications (1)

Publication Number Publication Date
FR2306528A1 true FR2306528A1 (fr) 1976-10-29

Family

ID=24252025

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7609283A Withdrawn FR2306528A1 (fr) 1975-03-31 1976-03-31 Procede de liaison d'un metal et d'un semi-conducteur

Country Status (4)

Country Link
JP (1) JPS51135467A (fr)
BR (1) BR7601989A (fr)
CA (1) CA1056514A (fr)
FR (1) FR2306528A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0007873A1 (fr) * 1978-07-25 1980-02-06 Thomson-Csf Système de soudure d'un composant semiconducteur émetteur de lumière sur un socle métallique
EP0238066A2 (fr) * 1986-03-18 1987-09-23 Fujitsu Limited Procédé pour effectuer l'adhésion entre des disques de silicium ou de dioxyde de silicium
WO2021110619A1 (fr) * 2019-12-04 2021-06-10 Albert-Ludwigs-Universität Freiburg Procédé de jonction d'au moins une première et une seconde zone de jonction, joint ainsi que composant électronique et ensemble circuit

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013103081A1 (de) * 2013-03-26 2014-10-02 Osram Opto Semiconductors Gmbh Verfahren zum Verbinden von Fügepartnern und Anordnung von Fügepartnern

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1305188A (fr) * 1960-11-16 1962-09-28 Siemens Ag Procédé pour réunir une électrode d'un dispositif à semi-conducteur avec une pièce de contact
DE2041497A1 (de) * 1969-08-25 1971-03-18 Mitsubishi Electric Corp Halbleiterelement und Verfahren zur Herstellung desselben
DE2049571A1 (de) * 1970-10-09 1972-04-13 Siemens Ag Halbleiterbauelement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1305188A (fr) * 1960-11-16 1962-09-28 Siemens Ag Procédé pour réunir une électrode d'un dispositif à semi-conducteur avec une pièce de contact
DE2041497A1 (de) * 1969-08-25 1971-03-18 Mitsubishi Electric Corp Halbleiterelement und Verfahren zur Herstellung desselben
DE2049571A1 (de) * 1970-10-09 1972-04-13 Siemens Ag Halbleiterbauelement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0007873A1 (fr) * 1978-07-25 1980-02-06 Thomson-Csf Système de soudure d'un composant semiconducteur émetteur de lumière sur un socle métallique
FR2431900A1 (fr) * 1978-07-25 1980-02-22 Thomson Csf Systeme de soudure d'un laser a semiconducteur sur un socle metallique
EP0238066A2 (fr) * 1986-03-18 1987-09-23 Fujitsu Limited Procédé pour effectuer l'adhésion entre des disques de silicium ou de dioxyde de silicium
EP0238066A3 (en) * 1986-03-18 1990-03-28 Fujitsu Limited A method for effecting adhesion of silicon or silicon dioxide plates
WO2021110619A1 (fr) * 2019-12-04 2021-06-10 Albert-Ludwigs-Universität Freiburg Procédé de jonction d'au moins une première et une seconde zone de jonction, joint ainsi que composant électronique et ensemble circuit

Also Published As

Publication number Publication date
CA1056514A (fr) 1979-06-12
JPS51135467A (en) 1976-11-24
BR7601989A (pt) 1976-10-05

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