FR2304073B1 - - Google Patents
Info
- Publication number
- FR2304073B1 FR2304073B1 FR7606864A FR7606864A FR2304073B1 FR 2304073 B1 FR2304073 B1 FR 2304073B1 FR 7606864 A FR7606864 A FR 7606864A FR 7606864 A FR7606864 A FR 7606864A FR 2304073 B1 FR2304073 B1 FR 2304073B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L1/00—Enclosures; Chambers
- B01L1/02—Air-pressure chambers; Air-locks therefor
Landscapes
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Sampling And Sample Adjustment (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2510683A DE2510683C3 (de) | 1975-03-12 | 1975-03-12 | Stabschleuse für Vakuumkammern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2304073A1 FR2304073A1 (fr) | 1976-10-08 |
| FR2304073B1 true FR2304073B1 (US20110009641A1-20110113-C00185.png) | 1980-05-30 |
Family
ID=5941100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7606864A Granted FR2304073A1 (fr) | 1975-03-12 | 1976-03-10 | Barre d' echantillonnage pour chambre a vide |
Country Status (4)
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4532816A (en) * | 1983-07-25 | 1985-08-06 | The Perkin-Elmer Corporation | Sample vessel |
| US4493287A (en) * | 1982-12-03 | 1985-01-15 | Northern Telecom Limited | Diffusion equipment |
| US4811958A (en) * | 1987-05-07 | 1989-03-14 | North American Philips Corporation | Sealed shafts moveable in vacuum chambers by exercising control from outside |
| US4834394A (en) * | 1988-06-16 | 1989-05-30 | North American Philip Corporation | Sealed universal movement of a shaft extending between environments |
| JP3982844B2 (ja) * | 1995-01-12 | 2007-09-26 | 株式会社日立国際電気 | 半導体製造装置及び半導体の製造方法 |
| EP4032612A1 (en) * | 2018-10-05 | 2022-07-27 | kiutra GmbH | System and method for inserting a sample into a chamber |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB682530A (en) * | 1950-02-23 | 1952-11-12 | Vickers Electrical Co Ltd | Improvements in apparatus for introducing specimens into an evacuated chamber |
| DE901573C (de) * | 1951-07-31 | 1954-01-14 | Sueddeutsche Lab G M B H | Stabschleuse zum Ein- und Ausschleusen von Objekten bei Korpuskularstrahlapparaten, insbesondere Elektronenmikroskopen |
| NL107208C (US20110009641A1-20110113-C00185.png) * | 1958-05-15 | |||
| US3162049A (en) * | 1962-03-05 | 1964-12-22 | American Cyanamid Co | Sampler for reaction kettles and other vessels under pressure or vacuum |
| US3394679A (en) * | 1966-12-05 | 1968-07-30 | Dresser Ind | Vacuum coating apparatus |
| GB1184356A (en) * | 1967-05-10 | 1970-03-18 | Norton Co | Improvements in or relating to shaft feedthrough apparatus for vacuum coaters |
| GB1284262A (en) * | 1968-09-09 | 1972-08-02 | Unilever Ltd | A device for passing a product between zones of different pressure |
| US3578969A (en) * | 1968-11-25 | 1971-05-18 | Electronic Associates | Solid sample inlet system for a mass spectrometer |
| DE1937008A1 (de) * | 1969-07-21 | 1971-01-28 | Siemens Ag | Vakuumapparatur fuer eine Vorrichtung zur Bearbeitung von Bauteilen |
| US3967127A (en) * | 1975-07-03 | 1976-06-29 | Gca Corporation | Sample introducer |
-
1975
- 1975-03-12 DE DE2510683A patent/DE2510683C3/de not_active Expired
-
1976
- 1976-01-08 GB GB709/76A patent/GB1490681A/en not_active Expired
- 1976-03-10 FR FR7606864A patent/FR2304073A1/fr active Granted
- 1976-03-12 US US05/666,498 patent/US4067697A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2510683B2 (de) | 1978-11-23 |
| GB1490681A (en) | 1977-11-02 |
| DE2510683C3 (de) | 1979-08-16 |
| US4067697A (en) | 1978-01-10 |
| DE2510683A1 (de) | 1976-09-23 |
| FR2304073A1 (fr) | 1976-10-08 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |