FR2301923A1 - Procede pour l'elimination de composants parasites dans les circuits integres - Google Patents

Procede pour l'elimination de composants parasites dans les circuits integres

Info

Publication number
FR2301923A1
FR2301923A1 FR7603862A FR7603862A FR2301923A1 FR 2301923 A1 FR2301923 A1 FR 2301923A1 FR 7603862 A FR7603862 A FR 7603862A FR 7603862 A FR7603862 A FR 7603862A FR 2301923 A1 FR2301923 A1 FR 2301923A1
Authority
FR
France
Prior art keywords
elimination
procedure
integrated circuits
parasite components
parasite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7603862A
Other languages
English (en)
French (fr)
Other versions
FR2301923B1 (US06826419-20041130-M00005.png
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2301923A1 publication Critical patent/FR2301923A1/fr
Application granted granted Critical
Publication of FR2301923B1 publication Critical patent/FR2301923B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/082—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including bipolar components only
    • H01L27/0821—Combination of lateral and vertical transistors only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0821—Collector regions of bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • H01L29/167—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table further characterised by the doping material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/06—Gettering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
FR7603862A 1975-02-20 1976-02-12 Procede pour l'elimination de composants parasites dans les circuits integres Granted FR2301923A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2507366A DE2507366C3 (de) 1975-02-20 1975-02-20 Verfahren zur Unterdrückung parasitärer Schaltungselemente

Publications (2)

Publication Number Publication Date
FR2301923A1 true FR2301923A1 (fr) 1976-09-17
FR2301923B1 FR2301923B1 (US06826419-20041130-M00005.png) 1978-08-18

Family

ID=5939404

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7603862A Granted FR2301923A1 (fr) 1975-02-20 1976-02-12 Procede pour l'elimination de composants parasites dans les circuits integres

Country Status (7)

Country Link
US (1) US4082571A (US06826419-20041130-M00005.png)
JP (1) JPS5653223B2 (US06826419-20041130-M00005.png)
CA (1) CA1033470A (US06826419-20041130-M00005.png)
DE (1) DE2507366C3 (US06826419-20041130-M00005.png)
FR (1) FR2301923A1 (US06826419-20041130-M00005.png)
GB (1) GB1485540A (US06826419-20041130-M00005.png)
IT (1) IT1055198B (US06826419-20041130-M00005.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0168325A2 (en) * 1984-07-11 1986-01-15 Fairchild Semiconductor Corporation Ion implantation to increase emitter energy gap in bipolar transistors
EP0197948A1 (en) * 1984-09-28 1986-10-22 Motorola, Inc. Charge storage depletion region discharge protection
WO1987001868A1 (en) * 1985-09-11 1987-03-26 Robert Bosch Gmbh Monolithically-integrated semiconductor devices
EP0253059A2 (en) * 1986-03-20 1988-01-20 Hitachi, Ltd. Process for suppressing the rise of the buried layer of a semiconductor device
FR2762138A1 (fr) * 1997-04-11 1998-10-16 Sgs Thomson Microelectronics Transistor mos a fort gradient de dopage sous sa grille

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53129589A (en) * 1977-04-18 1978-11-11 Fujitsu Ltd Integrated circuit unit
US4155778A (en) * 1977-12-30 1979-05-22 International Business Machines Corporation Forming semiconductor devices having ion implanted and diffused regions
US4210925A (en) * 1978-02-07 1980-07-01 Harris Corporation I2 L Integrated circuit and process of fabrication
US4140558A (en) * 1978-03-02 1979-02-20 Bell Telephone Laboratories, Incorporated Isolation of integrated circuits utilizing selective etching and diffusion
US4252581A (en) * 1979-10-01 1981-02-24 International Business Machines Corporation Selective epitaxy method for making filamentary pedestal transistor
JPS5658870U (US06826419-20041130-M00005.png) * 1980-10-02 1981-05-20
JPS58210659A (ja) * 1982-06-01 1983-12-07 Nec Corp 半導体装置およびその製造方法
US4507848A (en) * 1982-11-22 1985-04-02 Fairchild Camera & Instrument Corporation Control of substrate injection in lateral bipolar transistors
JPS6031231A (ja) * 1983-07-29 1985-02-18 Toshiba Corp 半導体基体の製造方法
JPS6031232A (ja) * 1983-07-29 1985-02-18 Toshiba Corp 半導体基体の製造方法
JPS61107027U (US06826419-20041130-M00005.png) * 1984-12-20 1986-07-07
US4717677A (en) * 1985-08-19 1988-01-05 Motorola Inc. Fabricating a semiconductor device with buried oxide
US4819040A (en) * 1986-05-02 1989-04-04 Motorola, Inc. Epitaxial CMOS by oxygen implantation
IT1231913B (it) * 1987-10-23 1992-01-15 Sgs Microelettronica Spa Procedimento di fabbricazione di transistori ad alta frequenza.
US5250445A (en) * 1988-12-20 1993-10-05 Texas Instruments Incorporated Discretionary gettering of semiconductor circuits
US5289024A (en) * 1990-08-07 1994-02-22 National Semiconductor Corporation Bipolar transistor with diffusion compensation
US5384477A (en) * 1993-03-09 1995-01-24 National Semiconductor Corporation CMOS latchup suppression by localized minority carrier lifetime reduction
DE10232176A1 (de) * 2002-07-16 2004-02-05 Infineon Technologies Ag Bipolarer Hochfrequenztransistor und Verfahren zur Herstellung desselben

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1564169A1 (de) * 1966-08-06 1970-01-08 Ibm Deutschland Verfahren zur gegenseitigen elektrischen Isolierung verschiedener in einer integrierten oder monolithischen Halbleitervorrichtung zusammengefassten aktiver Schaltelemente mit Hilfe in Sperrichtung vorgespannter PN-UEbergaenge
FR2024916A1 (US06826419-20041130-M00005.png) * 1968-11-22 1970-09-04 Western Electric Co

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3457632A (en) * 1966-10-07 1969-07-29 Us Air Force Process for implanting buried layers in semiconductor devices
US3515956A (en) * 1967-10-16 1970-06-02 Ion Physics Corp High-voltage semiconductor device having a guard ring containing substitutionally active ions in interstitial positions
US3533857A (en) * 1967-11-29 1970-10-13 Hughes Aircraft Co Method of restoring crystals damaged by irradiation
US3622382A (en) * 1969-05-05 1971-11-23 Ibm Semiconductor isolation structure and method of producing
US3666548A (en) * 1970-01-06 1972-05-30 Ibm Monocrystalline semiconductor body having dielectrically isolated regions and method of forming
US3840409A (en) * 1970-03-16 1974-10-08 Ibm Insulating layer pedestal transistor device and process
US3849204A (en) * 1973-06-29 1974-11-19 Ibm Process for the elimination of interface states in mios structures
JPS5179591A (US06826419-20041130-M00005.png) * 1975-01-06 1976-07-10 Hitachi Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1564169A1 (de) * 1966-08-06 1970-01-08 Ibm Deutschland Verfahren zur gegenseitigen elektrischen Isolierung verschiedener in einer integrierten oder monolithischen Halbleitervorrichtung zusammengefassten aktiver Schaltelemente mit Hilfe in Sperrichtung vorgespannter PN-UEbergaenge
FR2024916A1 (US06826419-20041130-M00005.png) * 1968-11-22 1970-09-04 Western Electric Co

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PAGE 1701.) *
REVUE US "IBM" TECHNICAL DISCLOSURE BULLETIN", VOLUME 16, NO 6, NOVEMBRE 1973, "REDUCTION OF PARASITIC EFFECTS BY ION BOMBARDEMENT" M. GHAFGHAICHI ET AL *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0168325A2 (en) * 1984-07-11 1986-01-15 Fairchild Semiconductor Corporation Ion implantation to increase emitter energy gap in bipolar transistors
EP0168325A3 (en) * 1984-07-11 1988-01-20 Fairchild Camera & Instrument Corporation Ion implantation to increase emitter energy gap in bipolar transistors
EP0197948A1 (en) * 1984-09-28 1986-10-22 Motorola, Inc. Charge storage depletion region discharge protection
EP0197948A4 (en) * 1984-09-28 1988-01-07 Motorola Inc PROTECTION AGAINST THE DISCHARGE OF A DEPLETION AREA OF A LOAD MEMORY.
WO1987001868A1 (en) * 1985-09-11 1987-03-26 Robert Bosch Gmbh Monolithically-integrated semiconductor devices
US4829360A (en) * 1985-09-11 1989-05-09 Robert Bosch Gmbh Monolithic integrated semiconductor means to reduce power dissipation of a parasitic transistor
EP0253059A2 (en) * 1986-03-20 1988-01-20 Hitachi, Ltd. Process for suppressing the rise of the buried layer of a semiconductor device
EP0253059A3 (en) * 1986-03-20 1989-09-13 Hitachi, Ltd. Process for suppressing the rise of the buried layer of a semiconductor device
FR2762138A1 (fr) * 1997-04-11 1998-10-16 Sgs Thomson Microelectronics Transistor mos a fort gradient de dopage sous sa grille
WO1998047173A1 (fr) * 1997-04-11 1998-10-22 Stmicroelectronics S.A. Transistor mos a fort gradient de dopage sous sa grille
US6465332B1 (en) 1997-04-11 2002-10-15 Stmicroelectronics S.A. Method of making MOS transistor with high doping gradient under the gate

Also Published As

Publication number Publication date
GB1485540A (en) 1977-09-14
DE2507366B2 (de) 1979-10-04
DE2507366C3 (de) 1980-06-26
IT1055198B (it) 1981-12-21
JPS5653223B2 (US06826419-20041130-M00005.png) 1981-12-17
US4082571A (en) 1978-04-04
DE2507366A1 (de) 1976-09-02
JPS51108787A (US06826419-20041130-M00005.png) 1976-09-27
CA1033470A (en) 1978-06-20
FR2301923B1 (US06826419-20041130-M00005.png) 1978-08-18

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Legal Events

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ST Notification of lapse