FR2300820A1 - Procede de depot chimique de cuivre avec regeneration des bains utilises - Google Patents
Procede de depot chimique de cuivre avec regeneration des bains utilisesInfo
- Publication number
- FR2300820A1 FR2300820A1 FR7532481A FR7532481A FR2300820A1 FR 2300820 A1 FR2300820 A1 FR 2300820A1 FR 7532481 A FR7532481 A FR 7532481A FR 7532481 A FR7532481 A FR 7532481A FR 2300820 A1 FR2300820 A1 FR 2300820A1
- Authority
- FR
- France
- Prior art keywords
- copper
- bath
- soln
- sulphate
- renewing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052802 copper Inorganic materials 0.000 title abstract 3
- 239000010949 copper Substances 0.000 title abstract 3
- 150000001879 copper Chemical class 0.000 title abstract 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 title 1
- 238000007747 plating Methods 0.000 title 1
- 229910021653 sulphate ion Inorganic materials 0.000 title 1
- 238000000034 method Methods 0.000 abstract 2
- 238000009825 accumulation Methods 0.000 abstract 1
- 238000005234 chemical deposition Methods 0.000 abstract 1
- 239000012141 concentrate Substances 0.000 abstract 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US54976675A | 1975-02-13 | 1975-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2300820A1 true FR2300820A1 (fr) | 1976-09-10 |
FR2300820B3 FR2300820B3 (enrdf_load_stackoverflow) | 1978-07-28 |
Family
ID=24194310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7532481A Granted FR2300820A1 (fr) | 1975-02-13 | 1975-10-23 | Procede de depot chimique de cuivre avec regeneration des bains utilises |
Country Status (9)
Country | Link |
---|---|
JP (1) | JPS5194427A (enrdf_load_stackoverflow) |
AU (1) | AU8560475A (enrdf_load_stackoverflow) |
BE (1) | BE834955A (enrdf_load_stackoverflow) |
CH (1) | CH602930A5 (enrdf_load_stackoverflow) |
DE (1) | DE2548914A1 (enrdf_load_stackoverflow) |
FR (1) | FR2300820A1 (enrdf_load_stackoverflow) |
IT (1) | IT1052574B (enrdf_load_stackoverflow) |
NL (1) | NL7512406A (enrdf_load_stackoverflow) |
SE (1) | SE7511587L (enrdf_load_stackoverflow) |
-
1975
- 1975-10-09 AU AU85604/75A patent/AU8560475A/en not_active Expired
- 1975-10-16 SE SE7511587A patent/SE7511587L/xx unknown
- 1975-10-23 NL NL7512406A patent/NL7512406A/xx not_active Application Discontinuation
- 1975-10-23 FR FR7532481A patent/FR2300820A1/fr active Granted
- 1975-10-28 BE BE161325A patent/BE834955A/xx unknown
- 1975-10-31 DE DE19752548914 patent/DE2548914A1/de not_active Withdrawn
- 1975-11-04 CH CH1438775A patent/CH602930A5/xx not_active IP Right Cessation
- 1975-12-15 IT IT52679/75A patent/IT1052574B/it active
- 1975-12-25 JP JP50154148A patent/JPS5194427A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
SE7511587L (sv) | 1976-08-16 |
BE834955A (fr) | 1976-04-28 |
CH602930A5 (enrdf_load_stackoverflow) | 1978-08-15 |
IT1052574B (it) | 1981-07-20 |
NL7512406A (nl) | 1976-08-17 |
DE2548914A1 (de) | 1976-08-26 |
FR2300820B3 (enrdf_load_stackoverflow) | 1978-07-28 |
JPS5194427A (enrdf_load_stackoverflow) | 1976-08-19 |
AU8560475A (en) | 1977-04-21 |
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