FR2295452A2 - Procede et dispositif de projection d'images sur une plaquette semiconductrice - Google Patents

Procede et dispositif de projection d'images sur une plaquette semiconductrice

Info

Publication number
FR2295452A2
FR2295452A2 FR7534729A FR7534729A FR2295452A2 FR 2295452 A2 FR2295452 A2 FR 2295452A2 FR 7534729 A FR7534729 A FR 7534729A FR 7534729 A FR7534729 A FR 7534729A FR 2295452 A2 FR2295452 A2 FR 2295452A2
Authority
FR
France
Prior art keywords
projecting images
semiconductor plate
semiconductor
projecting
images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7534729A
Other languages
English (en)
French (fr)
Other versions
FR2295452B2 (cs
Inventor
Albert Frosch
Hans-Erdmann Korth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2295452A2 publication Critical patent/FR2295452A2/fr
Application granted granted Critical
Publication of FR2295452B2 publication Critical patent/FR2295452B2/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Variable Magnification In Projection-Type Copying Machines (AREA)
  • Automatic Focus Adjustment (AREA)
FR7534729A 1974-12-21 1975-11-07 Procede et dispositif de projection d'images sur une plaquette semiconductrice Granted FR2295452A2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742460914 DE2460914C2 (de) 1974-12-21 1974-12-21 Photolithographische Projektionsvorrichtung

Publications (2)

Publication Number Publication Date
FR2295452A2 true FR2295452A2 (fr) 1976-07-16
FR2295452B2 FR2295452B2 (cs) 1977-12-16

Family

ID=5934300

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7534729A Granted FR2295452A2 (fr) 1974-12-21 1975-11-07 Procede et dispositif de projection d'images sur une plaquette semiconductrice

Country Status (4)

Country Link
JP (1) JPS548070B2 (cs)
DE (1) DE2460914C2 (cs)
FR (1) FR2295452A2 (cs)
GB (1) GB1510007A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2359439A2 (fr) * 1976-07-23 1978-02-17 Siemens Ag Procede pour realiser l'ajustement automatique de pastilles semi-conductrices
FR2360916A1 (fr) * 1976-08-05 1978-03-03 Siemens Ag Procede pour ajuster un substrat en forme de disque par rapport a un masque photosensible dans un appareil d'exposition au rayonnement x
EP0015789A1 (fr) * 1979-02-27 1980-09-17 Thomson-Csf Dispositif optique de projection en photorépétition

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2757386C3 (de) * 1977-12-22 1981-11-26 Agfa-Gevaert Ag, 5090 Leverkusen Belichtungsanordnung für Kopiergeräte
JP2576814B2 (ja) * 1995-06-16 1997-01-29 株式会社日立製作所 露光方法
TWI237307B (en) 2003-05-01 2005-08-01 Nikon Corp Optical projection system, light exposing apparatus and light exposing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819265A (en) * 1972-08-02 1974-06-25 Bell Telephone Labor Inc Scanning projection printer apparatus and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464793A (en) * 1942-08-08 1949-03-22 Lester Cooke Jr H Method and apparatus for photographic scanning
DE1173327B (de) * 1961-04-10 1964-07-02 Logetronics Inc Anordnung zum Feststellen und automatischen Einstellen der Bildschaerfe in einem fotografischen Geraet
DE2050590C2 (de) * 1970-10-15 1982-06-16 Ibm Deutschland Gmbh, 7000 Stuttgart Projektionseinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819265A (en) * 1972-08-02 1974-06-25 Bell Telephone Labor Inc Scanning projection printer apparatus and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2359439A2 (fr) * 1976-07-23 1978-02-17 Siemens Ag Procede pour realiser l'ajustement automatique de pastilles semi-conductrices
FR2360916A1 (fr) * 1976-08-05 1978-03-03 Siemens Ag Procede pour ajuster un substrat en forme de disque par rapport a un masque photosensible dans un appareil d'exposition au rayonnement x
EP0015789A1 (fr) * 1979-02-27 1980-09-17 Thomson-Csf Dispositif optique de projection en photorépétition
FR2450470A1 (fr) * 1979-02-27 1980-09-26 Thomson Csf Systeme optique de projection en photorepetition

Also Published As

Publication number Publication date
FR2295452B2 (cs) 1977-12-16
DE2460914A1 (de) 1976-06-24
GB1510007A (en) 1978-05-10
DE2460914C2 (de) 1983-08-18
JPS5186975A (cs) 1976-07-30
JPS548070B2 (cs) 1979-04-12

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