FR2292215B1 - - Google Patents
Info
- Publication number
- FR2292215B1 FR2292215B1 FR7535905A FR7535905A FR2292215B1 FR 2292215 B1 FR2292215 B1 FR 2292215B1 FR 7535905 A FR7535905 A FR 7535905A FR 7535905 A FR7535905 A FR 7535905A FR 2292215 B1 FR2292215 B1 FR 2292215B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/526,778 US3957378A (en) | 1974-11-25 | 1974-11-25 | Two-axis moire fringe displacement transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2292215A1 FR2292215A1 (fr) | 1976-06-18 |
FR2292215B1 true FR2292215B1 (el) | 1978-05-12 |
Family
ID=24098762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7535905A Granted FR2292215A1 (fr) | 1974-11-25 | 1975-11-25 | Capteur de deplacements utilisant un moire |
Country Status (6)
Country | Link |
---|---|
US (1) | US3957378A (el) |
JP (2) | JPS5177352A (el) |
CA (1) | CA1028144A (el) |
DE (1) | DE2550840C2 (el) |
FR (1) | FR2292215A1 (el) |
GB (1) | GB1513898A (el) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4546347A (en) * | 1981-05-18 | 1985-10-08 | Mouse Systems Corporation | Detector for electro-optical mouse |
DE3234470C2 (de) * | 1982-09-17 | 1985-11-21 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Mehrkoordinaten-Tastkopf |
DE3234471C1 (de) * | 1982-09-17 | 1983-08-25 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Mehrkoordinaten-Tastkopf |
JPS60250201A (ja) * | 1984-05-25 | 1985-12-10 | Agency Of Ind Science & Technol | 投影像の二次元的な変位測定装置 |
US4782327A (en) * | 1985-01-02 | 1988-11-01 | Victor B. Kley | Computer control |
US4942621A (en) * | 1988-11-15 | 1990-07-17 | Msc Technologies, Inc. | Method for mapping scanned pixel data |
US4984287A (en) * | 1988-11-15 | 1991-01-08 | Msc Technologies, Inc. | Method for orienting a dual mouse optical scanner |
DE58901190D1 (de) * | 1989-04-12 | 1992-05-21 | Landis & Gyr Betriebs Ag | Anordnung zur messung einer spurabweichung einer bewegbaren folienbahn. |
US5390424A (en) * | 1990-01-25 | 1995-02-21 | Renishaw Metrology Limited | Analogue probe |
US5052807A (en) * | 1990-06-28 | 1991-10-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Three dimensional moire pattern alignment |
US5390423A (en) * | 1991-01-22 | 1995-02-21 | Renishaw Plc | Analogue probe |
DE4105433C2 (de) * | 1991-02-21 | 1994-05-19 | Heidenhain Gmbh Dr Johannes | Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine |
US5204524A (en) * | 1991-03-22 | 1993-04-20 | Mitutoyo Corporation | Two-dimensional optical encoder with three gratings in each dimension |
US6660997B2 (en) * | 2001-04-26 | 2003-12-09 | Creo Srl | Absolute position Moiré type encoder for use in a control system |
US7256871B2 (en) * | 2004-07-27 | 2007-08-14 | Asml Netherlands B.V. | Lithographic apparatus and method for calibrating the same |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1220152B (de) * | 1963-08-23 | 1966-06-30 | Wenczler & Heidenhain | Vorrichtung zum verkantungsfehlerfreien Messen von Laengen |
US3330964A (en) * | 1963-09-09 | 1967-07-11 | Itck Corp | Photoelectric coordinate measuring system |
US3578979A (en) * | 1968-04-23 | 1971-05-18 | Tajima Seisakusho Kk | Electrical signal generating apparatus having a scale grid |
DE2003492A1 (de) * | 1970-01-27 | 1971-08-12 | Leitz Ernst Gmbh | Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens |
GB1383744A (en) * | 1971-06-01 | 1974-02-12 | Ferranti Ltd | Indicating devices |
US3768911A (en) * | 1971-08-17 | 1973-10-30 | Keuffel & Esser Co | Electro-optical incremental motion and position indicator |
US3806254A (en) * | 1971-12-08 | 1974-04-23 | Information Storage Systems | Agc servo system having error signal responsive to a non-extinguishable intensity light energy signal |
US3867038A (en) * | 1972-11-27 | 1975-02-18 | Baird Atomic Inc | Optical alignment system |
GB1443220A (en) * | 1972-12-19 | 1976-07-21 | Leitz Ernst Gmbh | Photo-electric incremental transducer |
-
1974
- 1974-11-25 US US05/526,778 patent/US3957378A/en not_active Expired - Lifetime
-
1975
- 1975-09-18 CA CA235,764A patent/CA1028144A/en not_active Expired
- 1975-10-27 GB GB44171/75A patent/GB1513898A/en not_active Expired
- 1975-11-12 DE DE2550840A patent/DE2550840C2/de not_active Expired
- 1975-11-25 FR FR7535905A patent/FR2292215A1/fr active Granted
- 1975-11-25 JP JP50140353A patent/JPS5177352A/ja active Pending
-
1984
- 1984-06-11 JP JP1984085614U patent/JPS6025912U/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US3957378A (en) | 1976-05-18 |
JPS6025912U (ja) | 1985-02-21 |
GB1513898A (en) | 1978-06-14 |
CA1028144A (en) | 1978-03-21 |
JPS5177352A (el) | 1976-07-05 |
DE2550840A1 (de) | 1976-05-26 |
FR2292215A1 (fr) | 1976-06-18 |
DE2550840C2 (de) | 1984-07-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |