FR2289235A1 - FILM DEPOSIT PROCESS ON A GROWTH SUBSTRATE - Google Patents

FILM DEPOSIT PROCESS ON A GROWTH SUBSTRATE

Info

Publication number
FR2289235A1
FR2289235A1 FR7521482A FR7521482A FR2289235A1 FR 2289235 A1 FR2289235 A1 FR 2289235A1 FR 7521482 A FR7521482 A FR 7521482A FR 7521482 A FR7521482 A FR 7521482A FR 2289235 A1 FR2289235 A1 FR 2289235A1
Authority
FR
France
Prior art keywords
growth substrate
deposit process
film deposit
film
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7521482A
Other languages
French (fr)
Other versions
FR2289235B1 (en
Inventor
Richard A Ghez
Edward A Giess
Thomas S Plaskett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2289235A1 publication Critical patent/FR2289235A1/en
Application granted granted Critical
Publication of FR2289235B1 publication Critical patent/FR2289235B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061—Tipping system, e.g. by rotation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/28—Complex oxides with formula A3Me5O12 wherein A is a rare earth metal and Me is Fe, Ga, Sc, Cr, Co or Al, e.g. garnets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Thin Magnetic Films (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR7521482A 1974-10-29 1975-07-03 FILM DEPOSIT PROCESS ON A GROWTH SUBSTRATE Granted FR2289235A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51883174A 1974-10-29 1974-10-29

Publications (2)

Publication Number Publication Date
FR2289235A1 true FR2289235A1 (en) 1976-05-28
FR2289235B1 FR2289235B1 (en) 1977-07-22

Family

ID=24065695

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7521482A Granted FR2289235A1 (en) 1974-10-29 1975-07-03 FILM DEPOSIT PROCESS ON A GROWTH SUBSTRATE

Country Status (6)

Country Link
JP (1) JPS546033B2 (en)
CA (1) CA1055818A (en)
DE (1) DE2541140A1 (en)
FR (1) FR2289235A1 (en)
GB (1) GB1463648A (en)
IT (1) IT1042727B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154262U (en) * 1982-04-12 1983-10-15 株式会社日立製作所 elevator control panel
JPS60124724A (en) * 1983-12-12 1985-07-03 Hitachi Ltd Touch panel input device
JPS60167024A (en) * 1984-02-08 1985-08-30 Omron Tateisi Electronics Co Key input device equipped with touch panel
DE3731010A1 (en) * 1987-09-16 1989-03-30 Telefunken Electronic Gmbh Process for liquid-phase epitaxy
JPH01320520A (en) * 1988-06-23 1989-12-26 Toshiba Corp Method for controlling input of touch screen device
JPH07168669A (en) * 1994-12-02 1995-07-04 Hitachi Ltd Touch panel input device
DE10241703A1 (en) * 2002-09-09 2004-03-18 Vishay Semiconductor Gmbh Reactor for carrying liquid phase epitaxial growth on semiconductor substrates comprises a growing chamber having an intermediate storage region for temporarily storing melts and a growing region for holding a substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
GB1463648A (en) 1977-02-02
FR2289235B1 (en) 1977-07-22
JPS546033B2 (en) 1979-03-23
JPS5165085A (en) 1976-06-05
DE2541140A1 (en) 1976-05-13
CA1055818A (en) 1979-06-05
IT1042727B (en) 1980-01-30

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Legal Events

Date Code Title Description
ST Notification of lapse