FR2288392B1 - - Google Patents

Info

Publication number
FR2288392B1
FR2288392B1 FR7435151A FR7435151A FR2288392B1 FR 2288392 B1 FR2288392 B1 FR 2288392B1 FR 7435151 A FR7435151 A FR 7435151A FR 7435151 A FR7435151 A FR 7435151A FR 2288392 B1 FR2288392 B1 FR 2288392B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7435151A
Other languages
French (fr)
Other versions
FR2288392A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR7435151A priority Critical patent/FR2288392A1/fr
Priority to GB42222/75A priority patent/GB1526425A/en
Priority to BR7506737*A priority patent/BR7506737A/pt
Priority to JP12388575A priority patent/JPS5640492B2/ja
Priority to DE2546316A priority patent/DE2546316C2/de
Priority to US05/623,939 priority patent/US4087367A/en
Publication of FR2288392A1 publication Critical patent/FR2288392A1/fr
Application granted granted Critical
Publication of FR2288392B1 publication Critical patent/FR2288392B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302—Non-deposition formation processes
    • H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6314—Formation by oxidation, e.g. oxidation of the substrate of a metallic layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
FR7435151A 1974-10-18 1974-10-18 Procede de realisation de dispositifs semiconducteurs Granted FR2288392A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7435151A FR2288392A1 (fr) 1974-10-18 1974-10-18 Procede de realisation de dispositifs semiconducteurs
GB42222/75A GB1526425A (en) 1974-10-18 1975-10-15 Method of etching aluminium oxide
BR7506737*A BR7506737A (pt) 1974-10-18 1975-10-15 Processo para tratar corpos com um agente de ataque para remover oxido de aluminio e processo para fabricar dispositivos semicondutores
JP12388575A JPS5640492B2 (online.php) 1974-10-18 1975-10-16
DE2546316A DE2546316C2 (de) 1974-10-18 1975-10-16 Verfahren zur Behandlung von Körpern mit einem Fluorid enthaltenden Ätzmittel und seine Anwendung bei der Herstellung von Halbleiteranordnungen
US05/623,939 US4087367A (en) 1974-10-18 1975-10-20 Preferential etchant for aluminium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7435151A FR2288392A1 (fr) 1974-10-18 1974-10-18 Procede de realisation de dispositifs semiconducteurs

Publications (2)

Publication Number Publication Date
FR2288392A1 FR2288392A1 (fr) 1976-05-14
FR2288392B1 true FR2288392B1 (online.php) 1978-07-13

Family

ID=9144273

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7435151A Granted FR2288392A1 (fr) 1974-10-18 1974-10-18 Procede de realisation de dispositifs semiconducteurs

Country Status (2)

Country Link
US (1) US4087367A (online.php)
FR (1) FR2288392A1 (online.php)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4230523A (en) * 1978-12-29 1980-10-28 International Business Machines Corporation Etchant for silicon dioxide films disposed atop silicon or metallic silicides
US4235648A (en) * 1979-04-05 1980-11-25 Motorola, Inc. Method for immersion plating very thin films of aluminum
DE3048083C2 (de) * 1980-12-19 1983-09-29 Ludwig 8900 Augsburg Fahrmbacher-Lutz Verfahren zur chemischen Entfernung von Oxidschichten von Gegenständen aus Titan oder Titanlegierungen
US4451304A (en) * 1981-05-04 1984-05-29 Walter Batiuk Method of improving the corrosion resistance of chemical conversion coated aluminum
US4368220A (en) * 1981-06-30 1983-01-11 International Business Machines Corporation Passivation of RIE patterned al-based alloy films by etching to remove contaminants and surface oxide followed by oxidation
US5462634A (en) * 1991-08-23 1995-10-31 Honda Giken Kogyo Kabushiki Kaisha Surface-treated aluminum material and method for its surface treatment
US5320709A (en) * 1993-02-24 1994-06-14 Advanced Chemical Systems International Incorporated Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution
US5376236A (en) * 1993-10-29 1994-12-27 At&T Corp. Process for etching titanium at a controllable rate
US5476816A (en) * 1994-03-28 1995-12-19 Motorola, Inc. Process for etching an insulating layer after a metal etching step
TW294831B (online.php) * 1995-04-26 1997-01-01 Handotai Energy Kenkyusho Kk
US5632438A (en) * 1995-10-12 1997-05-27 International Business Machines Corporation Direct chip attachment process and apparatus for aluminum wirebonding on copper circuitization
US5928969A (en) * 1996-01-22 1999-07-27 Micron Technology, Inc. Method for controlled selective polysilicon etching
JP3333684B2 (ja) * 1996-03-15 2002-10-15 東京エレクトロン株式会社 研磨処理方法
US5723187A (en) * 1996-06-21 1998-03-03 Ford Global Technologies, Inc. Method of bonding thermally sprayed coating to non-roughened aluminum surfaces
US6224785B1 (en) 1997-08-29 2001-05-01 Advanced Technology Materials, Inc. Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates
US6755989B2 (en) 1997-01-09 2004-06-29 Advanced Technology Materials, Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
US6896826B2 (en) * 1997-01-09 2005-05-24 Advanced Technology Materials, Inc. Aqueous cleaning composition containing copper-specific corrosion inhibitor for cleaning inorganic residues on semiconductor substrate
IL120514A (en) * 1997-03-25 2000-08-31 P C B Ltd Electronic interconnect structure and method for manufacturing it
KR19990011638A (ko) * 1997-07-24 1999-02-18 윤종용 반도체장치의 제조에 이용되는 세정액
DE19805525C2 (de) * 1998-02-11 2002-06-13 Sez Semiconduct Equip Zubehoer Verfahren zum Naßätzen von Halbleiterscheiben zum Erzeugen eines definierten Randbereichs durch Unterätzen
US5939336A (en) * 1998-08-21 1999-08-17 Micron Technology, Inc. Aqueous solutions of ammonium fluoride in propylene glycol and their use in the removal of etch residues from silicon substrates
JP3903215B2 (ja) * 1998-11-24 2007-04-11 ダイキン工業株式会社 エッチング液
US8153095B2 (en) * 1999-03-29 2012-04-10 Honeywell International Inc. Method for producing highly pure solutions using gaseous hydrogen fluoride
US20040112409A1 (en) * 2002-12-16 2004-06-17 Supercritical Sysems, Inc. Fluoride in supercritical fluid for photoresist and residue removal
EP1511074B1 (en) * 2003-08-01 2015-01-28 Imec A method for selective removal of high-K material
US7030034B2 (en) * 2003-09-18 2006-04-18 Micron Technology, Inc. Methods of etching silicon nitride substantially selectively relative to an oxide of aluminum
US7624742B1 (en) * 2004-04-05 2009-12-01 Quantum Global Technologies, Llc. Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipment
US7699998B2 (en) * 2005-08-22 2010-04-20 Micron Technology, Inc. Method of substantially uniformly etching non-homogeneous substrates
JP5734734B2 (ja) 2010-05-18 2015-06-17 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 半導体上に電流トラックを形成する方法
JP2013535110A (ja) 2010-06-21 2013-09-09 アイメック 薄膜トランジスタの製造方法及びトランジスタ回路
WO2019151090A1 (ja) * 2018-01-30 2019-08-08 東京エレクトロン株式会社 基板処理方法、基板処理装置およびエッチング液
US10886249B2 (en) 2018-01-31 2021-01-05 Ams International Ag Hybrid wafer-to-wafer bonding and methods of surface preparation for wafers comprising an aluminum metalization

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2867514A (en) * 1955-09-12 1959-01-06 Amchem Prod Method of deoxidizing an aluminum surface
US2883311A (en) * 1956-10-01 1959-04-21 Vertol Aircraft Corp Method and composition for treating aluminum and aluminum alloys
US3479237A (en) * 1966-04-08 1969-11-18 Bell Telephone Labor Inc Etch masks on semiconductor surfaces
US3634262A (en) * 1970-05-13 1972-01-11 Macdermid Inc Process and compositions for treating aluminum and aluminum alloys
US3767492A (en) * 1971-10-12 1973-10-23 Bell Telephone Labor Inc Semiconductor masking
JPS5217995B2 (online.php) * 1972-02-18 1977-05-19
US3867218A (en) * 1973-04-25 1975-02-18 Philips Corp Method of etching a pattern in a silicon nitride layer
US3932685A (en) * 1973-11-09 1976-01-13 Motorola, Inc. Aluminum stabilization process and stabilization solution therefor
US3930870A (en) * 1973-12-28 1976-01-06 International Business Machines Corporation Silicon polishing solution preparation
US3920471A (en) * 1974-10-10 1975-11-18 Teletype Corp Prevention of aluminum etching during silox photoshaping

Also Published As

Publication number Publication date
US4087367A (en) 1978-05-02
FR2288392A1 (fr) 1976-05-14

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Legal Events

Date Code Title Description
ST Notification of lapse