FR2286503A1 - Procede de fabrication d'un transistor de puissance - Google Patents
Procede de fabrication d'un transistor de puissanceInfo
- Publication number
- FR2286503A1 FR2286503A1 FR7526330A FR7526330A FR2286503A1 FR 2286503 A1 FR2286503 A1 FR 2286503A1 FR 7526330 A FR7526330 A FR 7526330A FR 7526330 A FR7526330 A FR 7526330A FR 2286503 A1 FR2286503 A1 FR 2286503A1
- Authority
- FR
- France
- Prior art keywords
- manufacturing process
- power transistor
- transistor
- power
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/05—Etch and refill
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/139—Schottky barrier
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/145—Shaped junctions
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19742445480 DE2445480A1 (de) | 1974-09-24 | 1974-09-24 | Verfahren zur herstellung eines leistungstransistors |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2286503A1 true FR2286503A1 (fr) | 1976-04-23 |
FR2286503B1 FR2286503B1 (fr) | 1978-04-07 |
Family
ID=5926552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7526330A Granted FR2286503A1 (fr) | 1974-09-24 | 1975-08-19 | Procede de fabrication d'un transistor de puissance |
Country Status (5)
Country | Link |
---|---|
US (1) | US3970487A (fr) |
JP (1) | JPS5151289A (fr) |
DE (1) | DE2445480A1 (fr) |
FR (1) | FR2286503A1 (fr) |
GB (1) | GB1501894A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL184589C (nl) * | 1979-07-13 | 1989-09-01 | Philips Nv | Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting. |
US4954455A (en) * | 1984-12-18 | 1990-09-04 | Advanced Micro Devices | Semiconductor memory device having protection against alpha strike induced errors |
IT1298516B1 (it) * | 1998-01-30 | 2000-01-12 | Sgs Thomson Microelectronics | Dispositivo elettronico di potenza integrato su un materiale semiconduttore e relativo processo di fabricazione |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1425087A (fr) * | 1964-02-24 | 1966-01-14 | Siemens Ag | Procédé de fabrication d'un transistor |
FR1488176A (fr) * | 1965-08-02 | 1967-07-07 | Gen Electric | Perfectionnements aux dispositifs à semiconducteurs |
FR2085821A1 (fr) * | 1970-04-03 | 1971-12-31 | Rca Corp |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3678573A (en) * | 1970-03-10 | 1972-07-25 | Westinghouse Electric Corp | Self-aligned gate field effect transistor and method of preparing |
NL170348C (nl) * | 1970-07-10 | 1982-10-18 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een tegen dotering en tegen thermische oxydatie maskerend masker wordt aangebracht, de door de vensters in het masker vrijgelaten delen van het oppervlak worden onderworpen aan een etsbehandeling voor het vormen van verdiepingen en het halfgeleiderlichaam met het masker wordt onderworpen aan een thermische oxydatiebehandeling voor het vormen van een oxydepatroon dat de verdiepingen althans ten dele opvult. |
US3806361A (en) * | 1972-01-24 | 1974-04-23 | Motorola Inc | Method of making electrical contacts for and passivating a semiconductor device |
-
1974
- 1974-09-24 DE DE19742445480 patent/DE2445480A1/de not_active Withdrawn
-
1975
- 1975-06-16 US US05/589,276 patent/US3970487A/en not_active Expired - Lifetime
- 1975-08-06 GB GB32784/75A patent/GB1501894A/en not_active Expired
- 1975-08-19 FR FR7526330A patent/FR2286503A1/fr active Granted
- 1975-08-27 JP JP50103108A patent/JPS5151289A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1425087A (fr) * | 1964-02-24 | 1966-01-14 | Siemens Ag | Procédé de fabrication d'un transistor |
FR1488176A (fr) * | 1965-08-02 | 1967-07-07 | Gen Electric | Perfectionnements aux dispositifs à semiconducteurs |
FR2085821A1 (fr) * | 1970-04-03 | 1971-12-31 | Rca Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS5151289A (fr) | 1976-05-06 |
US3970487A (en) | 1976-07-20 |
FR2286503B1 (fr) | 1978-04-07 |
DE2445480A1 (de) | 1976-04-01 |
GB1501894A (en) | 1978-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |