FR2279514A1 - Mecanisme d'entrainement, en particulier pour machine a tracer des lignes rectilignes de reseaux de diffraction et ses applications - Google Patents

Mecanisme d'entrainement, en particulier pour machine a tracer des lignes rectilignes de reseaux de diffraction et ses applications

Info

Publication number
FR2279514A1
FR2279514A1 FR7523497A FR7523497A FR2279514A1 FR 2279514 A1 FR2279514 A1 FR 2279514A1 FR 7523497 A FR7523497 A FR 7523497A FR 7523497 A FR7523497 A FR 7523497A FR 2279514 A1 FR2279514 A1 FR 2279514A1
Authority
FR
France
Prior art keywords
clamping devices
electromagnets
drive
diffraction grating
movable clamping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7523497A
Other languages
English (en)
Other versions
FR2279514B3 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Techtron Pty Ltd
Original Assignee
Varian Techtron Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Techtron Pty Ltd filed Critical Varian Techtron Pty Ltd
Publication of FR2279514A1 publication Critical patent/FR2279514A1/fr
Application granted granted Critical
Publication of FR2279514B3 publication Critical patent/FR2279514B3/fr
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/50Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step-by-step
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/58Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1847Manufacturing methods
    • G02B5/1852Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Machine Tool Units (AREA)
FR7523497A 1974-07-26 1975-07-28 Mecanisme d'entrainement, en particulier pour machine a tracer des lignes rectilignes de reseaux de diffraction et ses applications Granted FR2279514A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU833574 1974-07-26

Publications (2)

Publication Number Publication Date
FR2279514A1 true FR2279514A1 (fr) 1976-02-20
FR2279514B3 FR2279514B3 (fr) 1978-03-17

Family

ID=3699055

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7523497A Granted FR2279514A1 (fr) 1974-07-26 1975-07-28 Mecanisme d'entrainement, en particulier pour machine a tracer des lignes rectilignes de reseaux de diffraction et ses applications

Country Status (4)

Country Link
JP (1) JPS5172800A (fr)
AU (1) AU8313075A (fr)
DE (1) DE2533186A1 (fr)
FR (1) FR2279514A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006941A1 (fr) * 1987-03-20 1988-09-22 Kernforschungszentrum Karlsruhe Gmbh Procede de production de corps a structure fine
US5249359A (en) * 1987-03-20 1993-10-05 Kernforschungszentrum Karlsruhe Gmbh Process for manufacturing finely structured bodies such as heat exchangers

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157451A (en) * 1979-05-21 1980-12-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Positioning device
JPS606815A (ja) * 1983-06-24 1985-01-14 Mitsutoyo Mfg Co Ltd 微動送り装置
JPS63120051A (ja) * 1986-11-04 1988-05-24 Koyo Seiko Co Ltd 精密変位発生装置
DE102006021344B4 (de) * 2006-05-05 2012-05-24 Franz Kessler Gmbh Werkzeugmaschine mit einer Klemmvorrichtung
CN103862300B (zh) * 2014-02-13 2016-05-04 温州医科大学眼视光研究院 一种气体导轨高频响应型装置
CN106468794B (zh) * 2016-09-07 2019-06-11 中国科学院长春光学精密机械与物理研究所 光栅划刻机及其工作台的锁紧装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1988006941A1 (fr) * 1987-03-20 1988-09-22 Kernforschungszentrum Karlsruhe Gmbh Procede de production de corps a structure fine
US5152060A (en) * 1987-03-20 1992-10-06 Kernforschungszentrum Karlsruhe Gmbh Process for manufacturing fine-structured bodies
US5249359A (en) * 1987-03-20 1993-10-05 Kernforschungszentrum Karlsruhe Gmbh Process for manufacturing finely structured bodies such as heat exchangers

Also Published As

Publication number Publication date
AU8313075A (en) 1977-01-20
DE2533186A1 (de) 1976-02-05
FR2279514B3 (fr) 1978-03-17
JPS5172800A (ja) 1976-06-23

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Legal Events

Date Code Title Description
ST Notification of lapse