FR2276624B1 - - Google Patents
Info
- Publication number
- FR2276624B1 FR2276624B1 FR7515555A FR7515555A FR2276624B1 FR 2276624 B1 FR2276624 B1 FR 2276624B1 FR 7515555 A FR7515555 A FR 7515555A FR 7515555 A FR7515555 A FR 7515555A FR 2276624 B1 FR2276624 B1 FR 2276624B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
- Optical Recording Or Reproduction (AREA)
- Optical Head (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/483,267 US4066863A (en) | 1974-06-26 | 1974-06-26 | Method and system for automatically correcting aberrations of a beam of charged particles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2276624A1 FR2276624A1 (fr) | 1976-01-23 |
| FR2276624B1 true FR2276624B1 (US07488766-20090210-C00029.png) | 1977-03-18 |
Family
ID=23919399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7515555A Granted FR2276624A1 (fr) | 1974-06-26 | 1975-05-09 | Procede et dispositif pour la correction automatique des aberrations d'un faisceau de particules chargees |
Country Status (11)
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367365A (en) * | 1976-11-29 | 1978-06-15 | Nippon Telegr & Teleph Corp <Ntt> | Correcting method for beam position |
| JPS5693318A (en) * | 1979-12-10 | 1981-07-28 | Fujitsu Ltd | Electron beam exposure device |
| US4371774A (en) * | 1980-11-26 | 1983-02-01 | The United States Of America As Represented By The United States Department Of Energy | High power linear pulsed beam annealer |
| JPS57209786A (en) * | 1981-06-17 | 1982-12-23 | Hitachi Ltd | Electron beam machining device |
| JPS585955A (ja) * | 1981-07-03 | 1983-01-13 | Hitachi Ltd | 動的偏向非点の補正装置 |
| JPS5921481A (ja) * | 1982-07-26 | 1984-02-03 | Mitsubishi Electric Corp | 金属ストリツプ製造ラインにおけるパンチングおよびサイドノツチング装置 |
| US5124522A (en) * | 1990-07-23 | 1992-06-23 | Booke Michael A | High accuracy, high flexibility energy beam machining system |
| US5171964A (en) * | 1990-07-23 | 1992-12-15 | International Business Machines Corporation | High accuracy, high flexibility, energy beam machining system |
| JPH08146156A (ja) * | 1994-11-28 | 1996-06-07 | Masataro Sato | 腕輪時計 |
| JP4359232B2 (ja) * | 2004-12-20 | 2009-11-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| WO2016103493A1 (ja) * | 2014-12-26 | 2016-06-30 | 技術研究組合次世代３Ｄ積層造形技術総合開発機構 | ３次元造形装置、３次元造形装置の制御方法および制御プログラム |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2831145A (en) * | 1956-12-31 | 1958-04-15 | Ibm | Anti-distortion means for cathode ray tube displays |
| NL113812C (US07488766-20090210-C00029.png) * | 1957-11-20 | |||
| US2951965A (en) * | 1959-01-23 | 1960-09-06 | Westinghouse Electric Corp | Cathode ray image display systems |
| US3150284A (en) * | 1962-09-17 | 1964-09-22 | Philco Corp | Apparatus for use in conjunction with a cathode ray tube to reduce defocusing and astigmatism of an electron beam thereof |
| US3422305A (en) * | 1967-10-12 | 1969-01-14 | Tektronix Inc | Geometry and focus correcting circuit |
| US3619707A (en) * | 1969-08-08 | 1971-11-09 | Rca Corp | Astigmatism correction for electron beam devices |
| US3644700A (en) * | 1969-12-15 | 1972-02-22 | Ibm | Method and apparatus for controlling an electron beam |
| US3749963A (en) * | 1970-05-19 | 1973-07-31 | Us Air Force | Device to aid in centering of high energy electric particle beams in an evacuated drift tube |
| US3740608A (en) * | 1970-08-18 | 1973-06-19 | Alphanumeric Inc | Scanning correction methods and systems utilizing stored digital correction values |
| US3714496A (en) * | 1970-10-07 | 1973-01-30 | Harris Intertype Corp | Compensation for graphical image display system for compensating the particular non-linear characteristic of a display |
| BE789869A (fr) * | 1971-10-09 | 1973-04-09 | Philips Nv | Dispositif de reproduction d'images de television en couleur, muni d'untube cathodique |
| US3806758A (en) * | 1972-07-19 | 1974-04-23 | Hughes Aircraft Co | Dynamic focus generator |
-
1974
- 1974-06-26 US US05/483,267 patent/US4066863A/en not_active Expired - Lifetime
-
1975
- 1975-04-22 CA CA225,412A patent/CA1040275A/en not_active Expired
- 1975-05-09 FR FR7515555A patent/FR2276624A1/fr active Granted
- 1975-05-15 DE DE2521579A patent/DE2521579C2/de not_active Expired
- 1975-05-21 GB GB21876/75A patent/GB1504976A/en not_active Expired
- 1975-06-04 JP JP6665575A patent/JPS5333473B2/ja not_active Expired
- 1975-06-05 IT IT24021/75A patent/IT1038693B/it active
- 1975-06-12 NL NL7506983A patent/NL7506983A/xx not_active Application Discontinuation
- 1975-06-16 CH CH775775A patent/CH587561A5/xx not_active IP Right Cessation
- 1975-06-16 SE SE7506874A patent/SE401753B/xx not_active IP Right Cessation
- 1975-06-18 ES ES438667A patent/ES438667A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| IT1038693B (it) | 1979-11-30 |
| DE2521579C2 (de) | 1982-06-16 |
| DE2521579A1 (de) | 1976-01-15 |
| JPS5333473B2 (US07488766-20090210-C00029.png) | 1978-09-14 |
| ES438667A1 (es) | 1977-03-01 |
| CH587561A5 (US07488766-20090210-C00029.png) | 1977-05-13 |
| CA1040275A (en) | 1978-10-10 |
| US4066863A (en) | 1978-01-03 |
| FR2276624A1 (fr) | 1976-01-23 |
| NL7506983A (nl) | 1975-12-30 |
| SE7506874L (sv) | 1975-12-29 |
| JPS5111574A (US07488766-20090210-C00029.png) | 1976-01-29 |
| SE401753B (sv) | 1978-05-22 |
| GB1504976A (en) | 1978-03-22 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |