FR2273369A1 - Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen - Google Patents

Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen

Info

Publication number
FR2273369A1
FR2273369A1 FR7418999A FR7418999A FR2273369A1 FR 2273369 A1 FR2273369 A1 FR 2273369A1 FR 7418999 A FR7418999 A FR 7418999A FR 7418999 A FR7418999 A FR 7418999A FR 2273369 A1 FR2273369 A1 FR 2273369A1
Authority
FR
France
Prior art keywords
half cylinder
target area
radio frequency
frame
diode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7418999A
Other languages
English (en)
French (fr)
Other versions
FR2273369B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Priority to FR7418999A priority Critical patent/FR2273369A1/fr
Publication of FR2273369A1 publication Critical patent/FR2273369A1/fr
Application granted granted Critical
Publication of FR2273369B1 publication Critical patent/FR2273369B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7418999A 1974-05-31 1974-05-31 Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen Granted FR2273369A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7418999A FR2273369A1 (en) 1974-05-31 1974-05-31 Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7418999A FR2273369A1 (en) 1974-05-31 1974-05-31 Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen

Publications (2)

Publication Number Publication Date
FR2273369A1 true FR2273369A1 (en) 1975-12-26
FR2273369B1 FR2273369B1 (enExample) 1977-01-21

Family

ID=9139531

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7418999A Granted FR2273369A1 (en) 1974-05-31 1974-05-31 Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen

Country Status (1)

Country Link
FR (1) FR2273369A1 (enExample)

Also Published As

Publication number Publication date
FR2273369B1 (enExample) 1977-01-21

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Legal Events

Date Code Title Description
ST Notification of lapse